SU1377787A1 - Device for measuring hall electromotive force in space-charge region - Google Patents

Abstract

The invention relates to magnetic measurements and makes it possible to increase the reliability and reliability of measurements. Hall, potential and current electrodes (E) 3, 2 and 4 are located on an insulating plate 1. Potential E 7 is located above the semiconductor plate (P) 6. On the current E 4 an alternating voltage is applied, which induces in P 6 a high-frequency current, flowing in the P 6 plane. At the same time, an electrostatic field is created, perpendicular to the P 6 plane, by applying a potential difference between potential E 2 and 7, installed with the possibility of vertical movement relative to each other as well as a constant magnetic field. In this case, the charges flowing in the spatial charge region, under the action of an alternating electric field, are deflected to the Hall 3, where the Hall voltage is set. 2 Il. S (P

Description

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The invention relates to magnetic measurements and is intended to measure the Hall voltage in the spatial charge region of semiconductors at the intermediate control stage during the manufacture of devices and integrated circuits.

The purpose of the invention is to increase the reliability and validity of measurements due to the possibility of using the same device for measuring a series of samples without disturbing their integrity and by using a non-contact measurement method. FIG. 1 shows the proposed device, side view; in fig. 2 shows section A-A in FIG. one.

The device contains an insulating plate 1, a first potential electrode (resistive) 2, Hall 3 and current 4 electrodes, holders 5 placed on plate 1, sample 6 and the second potential electrode 7 in contact with the sample.

Sample 6 is mounted on holders 5 with the test surface to potential electrode 2. In this case, electrodes 2 and 7 are located one under the other and are mounted on a tripod (not shown) with the possibility of vertical movement relative to each other. The metallized electrode 8 is lowered until it touches the sample and makes electrical contact with it. An alternating voltage is applied to the current electrodes 4, which, due to capacitive coupling, induces in sample 6

high frequency current flowing in the plane of the sample. Simultaneously with the alternating voltage, they create an electrostatic field perpendicular to the sample plane when applying a potential difference between potential electrodes 2 and 7, as well as a constant magnetic field. In this case, the charges flowing in the spatial charge region, under the action of an alternating electric field, are deflected to the Hall electrodes 3, where the measured Hall voltage is established.

Claims (1)

Invention Formula A device for measuring the EMF of the Hol in the spatial charge region, containing a semiconductor plate and a pair of Hall, current potential electrodes, characterized in that, in order to increase the reliability and reliability of measurements, an additional insulating plate is inserted into it, which contains Hall and current electrodes and one of the potential electrodes, made in the form of a resistive film, which is in electrical contact with Hall and current electrodes, and the other potential cial electrode is disposed above the wafer for vertical movement to provide an electrical contact with the wafer. L-;} FIG. 2