SU1310657A1 - Device for leakage testing of articles - Google Patents

Abstract

The invention relates to the field of monitoring the leaktightness of products by a mass spectrometric method and makes it possible to increase the sensitivity of the control. The device contains a series-connected vacuum chamber 1, an adsorption pump 6, a mass spectrometer chamber B, a diffusion pump 10 and a mechanical pump 14. The output of the diffusion pump 10 is connected to the inlet 4 before the adsorption pump 6. When cooled with liquid nitrogen, the adsorption pump 6 repeatedly absorbs all atmospheric gases in the circulating flow, except hydrogen and helium, and reduces the background signal of the leak detector. The device allows accumulation of test gas in the system, which ensures the measurement of small values of leaks. 1 hp f-ly, 1 ill. (L oo o o JV

Description

This invention relates to the monitoring of the leaktightness of products by a mass spectrometric method.

The aim of the invention is to increase the sensitivity by repeatedly separating the sample gas from the circulating gas stream before feeding it into the mass spectrometer chamber.

A device for testing leak tightness contains a chamber 1 with a test article 2 located inside it, connected through valve 3 to one end of an input magistral line 4, the second end of which through valve 5 is connected to the inlet of an adsorption pump 6, the output of which through valve 7 is connected to the entrance of the mass spectrometry chamber 8 The last output through the valve 9 is connected to the input of the diffusion pump 10, the output of which through the valve 1Т is connected to one end of the pipeline 12, which through the valve 13 is connected to the mechanical 14, the other end of which is connected to the pipe 4.

The device works as follows.

The product 2 is placed in the chamber 1, the valves 3 and 13 are opened and the chamber 1, the pipeline 4 and the pipeline 12 are evacuated. The valve 11 is opened, the diffusion pump 10 is turned on and the valve 9 is opened. The mass spectrometer chamber 8 is pumped out. The valve 13 is closed and the product is filled 2 control gas. Liquid nitrogen is poured into the adsorption pump 6 and valves 5 and 7 are opened. When cooled with liquid nitrogen, the adsorption pump 6 absorbs all atmospheric gases, except composer V. Chernov. Editor K. Voloschuk Tehred N. Glushchenko Corrector M.Sharoshi

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Order 1881/37. Circulation 777 Subscription

VNIIPI USSR State Committee

for inventions and discoveries 113035, Moscow, Zh-35, Raushsk nab., 4/5

Production and printing company, Uzhgorod, st. Project, 4

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five

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natures and gels, and reduces the background signal of the leak detector. The evacuated gas mixture, the passage through the mass-with-spectrometric chamber 8, is recorded by the latter and evacuated by the diffusion pump 10. The evacuated adsorption pump 6 enters the gas mixture again into the last, and then into the mass spectrometric chamber 8, by circulating the pumped gas mixture in the closed loop of the test system, there is a manifold increase in the concentration of the test gas in the mass spectrometer chamber 8, according to the magnitude of which the product is leaky. In this case, the entire flow of sample gas passes through chamber 8, which additionally increases the sensitivity.

Formula of the invention

Claims (2)

1. A device for testing products for leak tightness; a containing input line, a mass spectrometer chamber connected to it, a diffusion and mechanical pumps, a diffusion pump input is connected to the input line, and the output is connected to a mechanical pump and an input line, characterized in that . the purpose of increasing the sensitivity, it is equipped with an adsorption pump installed on the inlet line between the connection point of the diffusion pump outlet and the mass spectrometry chamber. 2. The device according to claim 1, characterized in that the mass spectrometric chamber is located between the adsorption and diffusion pumps.