SU1279447A1

SU1279447A1 - Ion source

Info

Publication number: SU1279447A1
Application number: SU853878880A
Authority: SU
Inventors: Ю.П. Третьяков
Original assignee: Объединенный Институт Ядерных Исследований
Priority date: 1985-01-11
Filing date: 1985-01-11
Publication date: 1987-08-07

Abstract

Изобретение относитс к ускорительной технике. Цель изобретени повьшение надежности и уменьшение габаритов источника ионов. По мере расходовани распыл емого электрода (Э) 2, содержащего рабочее вещество, увеличиваетс положительный потенциал на сборнике 4. В скрещенных магнитном поле В и электрическом поле Е, образующемс в системе сборник 4-разр дна камера 3, происходит дрейф плазмы ч сторону Э 2 со скоростью V .р Е + + B/Bj. Выполнение сборника 4 изолированным , размещение его вдоль противоположной металлической накладки 5, а также расположение Э 2, сборника 4 рабочего вещества и металлической накладки 5 в проекции разр дной камеры 3 на N полюс по часовой стрелке исключает расплавление Э 2, т.е. последний при сборке устанавливаетс на границе пучка первичных электронов. Исi (Л точник позвол ет осуществить продолжительную работу в режиме, обеспечивающем стабильный пучок ускоренных многоразр дных ионов твердых веществ. 2 ил. N3 vl СО 4 4 This invention relates to accelerator technology. The purpose of the invention is to increase the reliability and reduce the size of the ion source. As the sprayed electrode (E) 2 containing the working substance is consumed, the positive potential on collector 4 increases. In a crossed magnetic field B and an electric field E formed in the system a collector 4-bit chamber 3, plasma drift occurs on the E side with speed V. р Е + + B / Bj. The execution of the collection 4 is isolated, its placement along the opposite metal lining 5, as well as the location of the E 2, the collection 4 of the working substance and the metal lining 5 in the projection of the discharge chamber 3 on the N pole in a clockwise direction eliminates the melting of the E 2, i.e. the latter, when assembled, is installed at the boundary of the primary electron beam. Isi (L-point allows continuous operation in a mode that provides a stable beam of accelerated multidischarge solid ions. 2 Il. N3 vl CO 4 4

Description

1one

Изобретение относитс к ускорительной технике, а именно к ионным источникам циклотронов, ускор ющих многозар дные ионы.The invention relates to accelerator technology, namely to ion sources of cyclotrons accelerating multi-charge ions.

Поэтому источник снабжен дистанционным механизмом перемещени распыл емого электрода.Therefore, the source is provided with a remote mechanism for moving the sputtered electrode.

Целью изобретени вл етс повышение надежности и уменьшение габаритов источника ионов.The aim of the invention is to increase the reliability and reduce the size of the ion source.

На фиг.1 изображен источник ионов, сечение в медианной плоскости электромагнита; на фиг.2 - то же, вертикальный разрез.Figure 1 shows the ion source, the cross section in the median plane of the electromagnet; figure 2 is the same vertical section.

На держателе 1 закреплен распыл емый электрод 2, которьй введен в разр дную камеру 3. В разр дной камере 3 установлен изолированный сборник 4A sputtered electrode 2 is fixed on the holder 1, which is inserted into the discharge chamber 3. An insulated collector 4 is installed in the discharge chamber 3

рабочего вещества, к которому подклю- 20 и распьш емого электрода позвол ет чен положительный полюс регулируемого сконструировать компактный источникthe working substance to which the connected-20 and spreadable electrode allows the positive pole of an adjustable to construct a compact source

выпр мител (на чертеже не показан). На боковой поверхности разр дной камеры 3 закреплена металлическа накладка 5 со щелью. rectifier (not shown). On the side surface of the discharge chamber 3 there is fixed a metal lining 5 with a slit.

Извлекающий электрод 6 установлен напротив щели. Катод 7 и антикатод 8 расположены соосно с разр дной камерой 3 и параллельно оси 9 электромагнита (на чертеже не показан). Векторы магнитного пол В и электрическогоRemoving the electrode 6 is installed opposite the gap. The cathode 7 and anticathode 8 are located coaxially with the discharge chamber 3 and parallel to the axis 9 of the electromagnet (not shown). Vectors of the magnetic field and electric

пол Е задают направление скорости дрейфа плазмы V.the floor E sets the direction of the plasma drift velocity V.

Работа устройства происходит следующим образом.The operation of the device is as follows.

По мере расходовани распыл емого электрода 2, содержащего рабочее вещество , увеличивают положительный потенциал на сборнике 4. В скрещенных Mai HHTHOM поле В и электрическом поле Е, образ тощемс в системе сборник 4 - разр дна камера 3, происходит дрейф плазмы з сторону распыл емого электрода 2 со С к о рос т ью ВAs the sprayed electrode 2 containing the working substance is consumed, the positive potential on collector 4 increases. In the crossed Mai HHTHOM field B and the electric field E formed in the system collector 4 - discharge chamber 3, the plasma drift to the side of the sprayed electrode 2 co rc h

V 5-2 цгV 5-2 kg

На фиг.1 схематически показаны тра- eK iiijijiH liOHOB, бомбардир пощих распыл емый электрод. Таким образом под- д,ерживаетс заданный ток распыл емо- iO электрода и необходимый расход рабочего вещества.Fig. 1 shows schematically a traced eK iiijijiH liOHOB, a scorer of a sprayed electrode. In this way, the specified current of the sputtering of the iO electrode and the necessary flow rate of the working substance is maintained.

В распор жение оператора циклотрона поступает быстрый, в отличие от механического перемещени , способ воздействи иа распыл емьш электрод. Пол- иос1ъю исключаютс ошибочные действи : в ис 1-очкмке с подвижным держа- тр.тем г лектрода при чрезмерной подачеThe cyclotron operator has a fast, as opposed to mechanical movement, method of acting on the sputtered electrode. Errors are excluded from the field: in 1-point shotgun with a moving body of the electrode during an excessive feed

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электрода в разр д, когда электрод попадает под пучок первичных электронов с катода, он расплавл етс . В предлагаемом устройстве такое положение исключаетс : распьш емый электрод при сборке устанавливаетс на границе пучка первичных электронов, т.е. уровень с проекцией кра катода,electrode into the discharge, when the electrode falls under the beam of primary electrons from the cathode, it melts. In the proposed device, this position is excluded: the spreading electrode is mounted at the assembly on the boundary of the primary electron beam, i.e. level with the projection of the edge of the cathode,

10 а в дальнейшем за счет расходовани рабочего вещества распыл ема грань электрода только удал етс от этой границы.10 and further, due to consumption of the working substance, the sprayed edge of the electrode only moves away from this boundary.

Предлагаемый источник позвол етThe proposed source allows

15 осуществить продолжительную работу в режиме, обеспечивающем стабильный пучок ускоренных многоразр дных ионов твердых веществ (например кобальта ) . Ликвидаци механизма перемещемногозар дных ионоь твердых веществ.15 to carry out continuous operation in a mode that provides a stable beam of accelerated multidischarge solid ions (for example, cobalt). The elimination of the mechanism of translocated ionic solids.

Claims

The invention relates to accelerator technology, namely to ion sources of cyclotrons accelerating multi-charge ions. Therefore, the source is provided with a remote mechanism for moving the sputtered electrode. The aim of the invention is to increase the reliability and reduce the size of the ion source. Figure 1 shows the ion source, the cross section in the median plane of the electromagnet; figure 2 is the same vertical section. A sputtered electrode 2 is fixed on the holder 1, which is inserted into the discharge chamber 3. In the discharge chamber 3 there is an isolated collection 4 of the working substance, to which the positive pole of the rectifier is connected (not shown). On the side surface of the discharge chamber 3 there is fixed a metal lining 5 with a slit. Removing the electrode 6 is installed opposite the gap. The cathode 7 and anticathode 8 are located coaxially with the discharge chamber 3 and parallel to the axis 9 of the electromagnet (not shown). The vectors of the magnetic field B and the electric field E set the direction of the plasma drift velocity V. The device operates as follows. As the sprayed electrode 2, containing the working substance, is consumed, the positive potential on collector 4 increases. In a crossed Mai HHTHOM field B and an electric field E, as seen in the system, collector 4 bit chamber 3, the plasma drift to the side of the sputtered electrode 2 with scattering B V 5-2 cg. In Fig. 1 schematically shows tra eKiiijijiH liOHOB, the scorer of the sprayed electrode. Thus, the substrate is kept at a predetermined atomization current of the iOO electrode and the necessary flow rate of the working substance. The cyclotron operator has a fast, as opposed to mechanical movement, method of irradiation of the spray electrode. The field excludes erroneous actions: in an electrolysis cell with a movable electrode holder when an excessively supplied 12,472 electrodes are in discharge, when the electrode falls under the beam of primary electrons from the cathode, it melts. In the proposed device, this position is excluded: the spreading electrode is mounted at the assembly on the boundary of the beam of primary electrons, i.e. the level with the projection of the edge of the cathode, and later, due to the expenditure of the working substance, the sprayed edge of the electrode only moves away from this boundary. The proposed source allows continuous operation in a mode that provides a stable beam of accelerated multi-bit solids (for example, cobalt). The elimination of the mechanism for displacing and spreading the electrode makes it possible to construct a compact source of multi-charge ionic solids. The invention The ion source containing an electromagnet with N and S poles, in a gap between which, parallel to the axis of the electromagnet, is placed a coaxially arranged cathode, discharge chamber and anti-cathode, with a metal pad fixed on the side surface of the discharge chamber, opposite which the extraction the electrode, and in the internal cavity of the discharge chamber in the region bounded by the overlay, the sprayed electrode with the working substance and the collection of the working substance are placed; The base of the said collector is parallel, and the plane of the end of the spreading electrode is perpendicular to the plane of the pad, characterized in that, in order to increase reliability and reduce the size, the collector of the sprayed substance is insulated, located along the opposite metal cover of the side surface of the discharge chamber and connected to the positive the pole of the additionally introduced controlled rectifier, which by its negative pole is connected to the discharge chamber, while the sprayed electr One, a collection of the working substance and a metal plate in the projection of the discharge chamber on the N pole are placed clockwise, respectively.

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