SU1061401A1 - Способ получени тонкодисперсного кремни - Google Patents
Способ получени тонкодисперсного кремни Download PDFInfo
- Publication number
- SU1061401A1 SU1061401A1 SU813321350A SU3321350A SU1061401A1 SU 1061401 A1 SU1061401 A1 SU 1061401A1 SU 813321350 A SU813321350 A SU 813321350A SU 3321350 A SU3321350 A SU 3321350A SU 1061401 A1 SU1061401 A1 SU 1061401A1
- Authority
- SU
- USSR - Soviet Union
- Prior art keywords
- ammonia
- carrier gas
- silicon dioxide
- silicon
- carbon content
- Prior art date
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims description 16
- 238000000034 method Methods 0.000 title claims description 16
- 239000000377 silicon dioxide Substances 0.000 title claims description 8
- 235000012239 silicon dioxide Nutrition 0.000 title description 5
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 42
- 229910021529 ammonia Inorganic materials 0.000 claims description 21
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 16
- 229910052799 carbon Inorganic materials 0.000 claims description 16
- 239000012159 carrier gas Substances 0.000 claims description 14
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 229910052710 silicon Inorganic materials 0.000 claims description 6
- 239000010703 silicon Substances 0.000 claims description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 5
- 239000011261 inert gas Substances 0.000 claims description 5
- 239000001301 oxygen Substances 0.000 claims description 5
- 229910052760 oxygen Inorganic materials 0.000 claims description 5
- 125000003545 alkoxy group Chemical group 0.000 claims description 3
- 239000007789 gas Substances 0.000 claims description 2
- 239000000463 material Substances 0.000 claims 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 19
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 14
- 229910052757 nitrogen Inorganic materials 0.000 description 10
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- 239000000203 mixture Substances 0.000 description 6
- 229910052786 argon Inorganic materials 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000006071 cream Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 210000001367 artery Anatomy 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000000909 electrodialysis Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000002657 fibrous material Substances 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 230000007062 hydrolysis Effects 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 238000000197 pyrolysis Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 239000006200 vaporizer Substances 0.000 description 1
Landscapes
- Carbon And Carbon Compounds (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SU813321350A SU1061401A1 (ru) | 1981-07-20 | 1981-07-20 | Способ получени тонкодисперсного кремни |
| BG67268A BG45908A1 (en) | 1981-07-20 | 1984-10-25 | Method for preparing fine- dispertional silicon dioxide |
| CS848274A CS827484A1 (en) | 1981-07-20 | 1984-10-31 | Zpusob vyroby jemne dispergovaneho dioxidu kremiku |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SU813321350A SU1061401A1 (ru) | 1981-07-20 | 1981-07-20 | Способ получени тонкодисперсного кремни |
| CS848274A CS827484A1 (en) | 1981-07-20 | 1984-10-31 | Zpusob vyroby jemne dispergovaneho dioxidu kremiku |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SU1061401A1 true SU1061401A1 (ru) | 1985-12-30 |
Family
ID=25746575
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SU813321350A SU1061401A1 (ru) | 1981-07-20 | 1981-07-20 | Способ получени тонкодисперсного кремни |
Country Status (3)
| Country | Link |
|---|---|
| BG (1) | BG45908A1 (cs) |
| CS (1) | CS827484A1 (cs) |
| SU (1) | SU1061401A1 (cs) |
-
1981
- 1981-07-20 SU SU813321350A patent/SU1061401A1/ru active
-
1984
- 1984-10-25 BG BG67268A patent/BG45908A1/xx unknown
- 1984-10-31 CS CS848274A patent/CS827484A1/cs unknown
Also Published As
| Publication number | Publication date |
|---|---|
| CS827484A1 (en) | 1987-09-17 |
| BG45908A1 (en) | 1989-09-15 |
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