SU1024714A1 - Optical electronic system for measuring planar wave-guide film parameters - Google Patents

Abstract

1. OPTICO LECTRONIC SYSTEM FOR MEASURING PARAMETERS OF PLANARS X WAVEGUIDE FILMS, containing radiation source, wave (photorny frame with the angle reference scale installed with the possibility of axis axis displacement, radius beam beam falling device, radiation beam device of the detector. A beam of radiation on the film and a recording device, characterized in that with a chain {shiriruyu functionality by providing measurement and spenhi values of the angular and amplitude distribution radiation in vopnovodnyh modes different indeksszh, it is provided mounted on the rotary stspiko optako-mechanical scanning device with pho Ashrovatelem reference pulse arranged sequentially along the beam izluchshn off-axis parabolic evrkapom and a photodetector installed in the focus of off-axis arabopicheskogo mirror outputs of the photodetector and the shaper support them (/ The plugs are connected respectively to the ENT and the second inputs of the registering device.

Description

: 2, The system under item i, that is, that the reproducing device is galpopnen in the form of an oscilloscope, a logarithmic amplifier and an adjustable generator of paired pulses, connected to the first and second oscars of the oscilloscope, and a time meter

intervals, connected with the output of an adjustable generator of paired pulses, the third input of the oscilloscope and the input of an adjustable generator of paired pulses is the second input of the registering device, and the input of a log amplifier is its first input.

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This invention relates to coiters n-; measurement technology and can be; used in the electronics industry and optical instrument for measurements during vacuum deposition.

A known optical / optical system for measuring the size of planar vodovodny films containing a radiation source, a turntable with a scale of reading angles mounted rotatably around an axis perpendicular to the plane of incidence of the radiation beam, a device for irradiating a radiation beam into the film, a radiation beam output device from the film and the regulating device, filled in the form of a refraktometer, with a pair of stitches. which produces a registrar excitation vapnvvodn D mode and the reading of the angle corresponding to stage 1 of the iT mode.

However, the device does not allow the quantification of quantitative information about the amplitude distribution in the current modes, as well as the narrow spectrum of individual modes, which makes it impossible to determine the suitability of the film under study for use in various natural optical elements. In addition, it is not possible to measure in the low-red region of the spectrum, since the radiation from the radiation emerging from the film is visually impaired.

The aim of the invention is to enhance the functionality by providing measurement and evaluation of the value of the angular and averaged radiation distribution in the waveguide modes of various indices.

This goal is achieved by the fact that an opt-co-tron system for measuring the parameters of planar sheets of Foan films containing a swept source, a turntable with angle counting, mounted with an angle of rotation perpendicular to the axis perpendicular to the plane of the fall of the pulsed beam (and the device of input of a beam radiation or in a film

the radiation from the film to the registrar device is equipped with a ticomechanical scanning device mounted on the turntable with a tic-mechanical scanning device with a reference pulse

successively along the beam of radiation outside the parabopic & parabopic mirror and photodetector, which is installed at the focus of the axial parabolic tube, the outputs of the photodetector and form

d are connected respectively with the first and second inputs of the recording device.s

In addition, the register device is made in the bastard, logarithmic yctumrenst generator of paired pulses, connected to a BiMyMy and oscilloscope input, and a time interval meter connected to the vtanoaoM of the paired generator

pulses, the third input of the ocawutorp ia and the input of the paired microvoltage generator is the second input of the registering device, and the input of the analog pulse is its first input.

FIG. 1 shows a functional diagram of the opto-electronic system} in FIG. 2 - reg stroyruyayego device

The optical system is composed of a source 1, a rotary table 2 with an explosive film 3 located on it, a film 3, an injection device 4 for introducing radiation into the film, an output device 5 for outputting a beam of optical films, an optical-mechanical scanning device 6 with a rotating mirror plane 7 in the worldviewer 8 a pulse of an impulse, an off-axis parabolic mirror 9, a phototransformer 10 in a remote device 11, which consists of an oscilloscope 12, an adjustable oscillator 13 of paired pulses, a logarithmic amplifier 14 and a meter 15 time intervals ;, the system works as follows. The film 3 under investigation is mounted on a rotary stop 2 so that its plane is perpendicular to the plane of incidence, and the position relative to devices 4 and 5 of the input and output radiation provides excitation of the waveguide mode and output of the radiation from 3. A rotating flat mirror.6 patches the radiation that comes out of the water-borne film 3 in the plane of incidence and directs it to the axial parabolic mirror 9, at the focus of which is sensed flax with a photographic receiver 10. A photocurrent pulse from the output of the photoreceiver 1O arrives at the input of the register device Lggea 11. When the table 2 is rotated, the rotations are fixed, according to the maximum amplitudes of the pulses appearing at the output of the photoelectric 1, as a result of the effect of the effect of the effect of the output signal of the photoelectric 1, as a result of the effect of the output signal of the photoelectric 1, as a result of the effect of the output of the photoelement 1, the result of the impact of the effect of the impact of the output of the photoelectric 1, the result of the impact of the effect of the effect of the output of the photoelectric 1, the result of the impact of the effect of the effect of the effect of the output of the photoelectric 1, the result of the impact of the effect of the effect of the effect of the output of the photoelectric 1, the result of the impact of the effect of the impact of the output of the photo of the receiver of the effect of the max. of the film 3, which is reflected from the rotating 7 And) parabolic h 9 mirrors. The position of the table is taken as a reference point. 2, with (the incident radiation beam passes parallel to the plane of the film under study 3. The set of angles determined in this way does not reflect the mode spectrum of the high-water film, from which the coefficient of wavelength L of the film 3 can be determined by a known method. The computation, quantitative information on the amplitude distribution and the angles of the spectrum from the film emerging from the film 3, is used to collect the feature of a parabolic mirror 9 in focus, i.e. on the sensitive the photodetector 10, tspko those rays that are parallel to the axis of the perabopa.So the case is investigated film 3. with radiation input devices 4 a 5 and scissors without a mirror 7 form an optical mirror similar to the two-mirror one, then in accordance with the well-known property of two mirror systems the signal from the photodetector 1O arrives at the input of the registering device 11 lii at the time instant corresponding to the same position of the rotating mirror 7 relative to the plane of the film 3. This position of the plane vrashayushogo mirror 7 is given in accordance with the moment of occurrence of the reference pulse at the output of the imaging unit 8 of the reference pulse of the opto-mechanical scanning device 6, which is achieved by appropriate positioning of the fixed stationary P4 (photo table: 2 and the 4vOvvvl 8 reference pulse of the light-emitting diode and photodiode relative to rotating mirror. When measuring, the pulse triggers the oscilloscope 12 and the generator of 13 pair pulses (with adjustable 1: delay). The input of the oscilloscope 12 receives a signal from the output of the photoreceiver 1O, amplified by a log amplifier and 14. As a result, an image of the radiation beam emerging from the film 3 appears on the screen of the oscillograph 12, containing information about its angular spectrum and amplitude distribution. The presence of a logarithmic amplifier 14 in the recording device 11 makes it possible to record the ratio of amplitudes in a logarithmic scale on the screen of the X-ray scanner 12 and provides a high resolution of measurements. To obtain quantitative information on the uHp & radiation spectrum, the output of the generator 13 pair pulses (with adjustable delay) is connected to the input of the meter 15 time intervals and parallel to the input of the sampler 12. As a result, the cross section images recorded by the oscilloscope 12 show bright marks, the position the first of which (from the first pulse of the generator 13) corresponds to the origin of the pulse (the moment of the appearance of the reference pulse), and the position (from the second pulse i tepaTopa 13) can be arbitrarily changed by adjusting delays between the pulses of the generator 13, thus setting the second brightness mark to any point of the image of the beam section. Since the optical-mechanical scanned device 6 provides a uniform sweep angle, this time scale on the oscillo screen. column 12 can be aligned with the angular scale of the scanning device 6, i.e. measuring the delay of the second mark relative to, you can determine the angular position relative to the n. countdown. For example, by successively setting the second mark at the level of half the amplitude of the pulse on the front5 102

It is possible to measure the angular width of the impulse by the level O, 5j. Similarly, by setting the mark to the maxima of the impulses, it is possible to determine the angular position of the parasitic K4OD relative to the main, if any, in the spectrum of the investigated pigment and so on. The measurement of the delay time is carried out with. a 13 Bjg MeHHbix interval meter, which uses, for example, a frequency meter operating in the corresponding mode, and calibrating the time scale by the angle of time between two adjacent reference pulses corresponding to 36O.

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The focal length of the off-axis parabolic mirror 9 and the size of the sensitive photopath of the photocopier -10 are chosen so that the instantaneous angular field of view of the photoelectric transducer 10 is significantly (at least 20 times) smaller than the angle of the emitted beam of radiation that ensures a high angle system placement .

Thus, due to the availability of obtaining the entire set of experimental data on the waveguide film under study, the optical system's structural design and circuit design of the recording device are used to expand the functionality of the system.

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Claims (2)

1, OPTICAL-ELECTRONIC SYSTEM FOR MEASURING PARAMETERS OF PLANAR WAVEGUIDE FILMS, containing a radiation source, a rotary stick with a “reference scale of angles * mounted for rotation about an axis perpendicular to the plane of incidence of the radiation beam, a device for introducing a radiation beam into a film, a device for outputting a radiation beam from a film films and a recording device, characterized in that, in order to expand functionality by providing measurement and evaluation of the values of the angular and amplitude distribution radiation in waveguide modes of various indices, it is equipped with an opto-mechanical scanning device mounted on a turntable with a reference pulse shaper, arranged sequentially along the radiation beam with an off-axis parabolic mirror and a photodetector, which is installed at the focus of an off-axis parabolic mirror, the outputs of the photodetector and the driver of the reference pulse are connected respectively with the first and second inputs of the recording device. SU .1024714 2, The system of claim. ^ Characterized in that the recording device is made in the form of an oscilloscope, a logarithmic amplifier and an adjustable pair of pulse pulses connected to the first and second input of the oscilloscope, and a time interval meter connected to the output of the adjustable 'pair of pulses, The third input of the oscillogram and the input of the adjustable pair pulse generator is the second input of the recording device, and the input of the logarithmic amplifier is its first input.