SU1023356A1 - Device for recognition of object image defects - Google Patents

Abstract

DEVICE FOR RECOGNITION OF DEFECTS image object containing television sensors, inputs of which are connected to the distributor pulse f and outputs connected to the corresponding shaper m signal detectors connected to the respective fo {adirovatel m signal selector connected to one signal shaper and to the block memory , the first group of OR elements, whose inputs are connected to a pulse distributor and with one detector, and the outputs are connected to a memory block, a trigger, one input of which is connected to A pulse distributor connected to a registration unit, characterized in that, in order to increase the reliability of the distributed, it contains a counter connected to the memory unit, to the pulse distributor, to the registration unit and to the DRUG4 input of the trigger, the second group of OR elements, whose inputs are connected to another detector and to a pulse distributor, and the outputs are connected to a memory unit, the first group of elements I, whose inputs are connected to a trigger and to a pulse distributor, an element NOT connected to a distributor pulse s, the second group of elements AND, whose inputs are connected to the trigger, with the element NOT and with the pulse distributor, and the third rpynriy of the elements OR whose inputs are connected to the outputs of the elements of the first and second groups, and the outputs are connected to the registration unit. 1C with 00. SP and

Description

The invention relates to automation and computing technology and can be used in the construction of automatic systems for controlling and recognizing images of microelectronic products, in particular, for controlling photomasks, IC crystals, printed circuit boards, etc. by sight of him. A device for detecting object image defects is known, comprising two television sensors, a synchronization unit, the input of which is connected to the inputs of television sensors, a video monitoring unit, two video signal conditioners, a conductor extraction unit, a memory unit, a conductor register, a coordinate counter, And, the trigger of the mode, the element of coincidence began the conductors l. A disadvantage of this device is the low recognition accuracy due to the dependence of the control results on the size and location of defects in the conductors. For example, the conductor area may not change at certain sizes and locations of rupture and short-type defects. The closest to the present invention is a device comprising television sensors, the outputs of which are connected via pulse shapers to the detectors of the communication areas, a memory block connected to the pulse distributor and to a group of OR elements whose inputs are connected to a pulse distributor connected to the trigger and to the recording unit, a selector connected to the signal conditioner and to the memory block 2. This device is characterized by a rather high unreliability of recognition. The purpose of the invention is to increase the reliability of recognition. The goal is achieved by the fact that the device containing television sensors, the inputs of which are connected to the pulse distributor, and the outputs are connected to the corresponding DIM signal conditioner, detectors connected to the corresponding signal conditioner, a selector connected to one signal conditioner and to the unit memory, the first group of elements OR, whose inputs are connected to the pulse distributor and with one detector, and the outputs are connected to the unit, memory, trigger, one Bxorf of which is connected to the distributor impulses connected to the registration unit, a counter connected to the memory unit, and to the impulse distributor with the registration unit and to another trigger input, the second group of OR elements, whose inputs are connected to another detector and impulse distributor, and the outputs are connected to the unit memory, the first group of elements AND, whose inputs are connected to the trigger and to the distributor of pulses, the element NOT connected to the distributor of pulses, the second group of elements AND whose inputs are connected to the trigger, with the element HE-AND from limiter pulses, and the third group of elements OR whose inputs are connected to the outputs of the elements of the first and second groups, and the outputs are connected to the registration unit. Figure 1 presents the block diagram of the device; Figures 2 and 3 show a constructive execution of a selector and a pulse distributor, the device contains television sensors 1 .and 2, shapers -3 and 4 signals, detectors 5 and 6 of the communication areas, selector 7, starts conductors, the first 8, the second 9, and the third 10 groups of elements OR, the memory block 11, the counter 12, the trigger 13, the element NOT 14, the first 15 and the second 16 groups of elements AND, the distributor 17 pulses and the block 18 of registration. In this case, the selector 7 contains a group of delay elements for line 19, a group of delay elements 20 for the decomposition element in a row, OR-NOT 21 elements and AND element 22, and the pulse distributor contains a synchronous generator 23, 24 cycles counter, elements 2И-OR 25-28 , counters 29 and 30 addresses. The device works as follows. Video signals from scanned and reference images, which are synchronized to the pulse of the distributor 17, come from the outputs of television sensors 1 and 2, respectively, to the inputs of drivers 3 and 4, from the outputs of which video signals are quantized with respect to the inputs of detectors 5 and 6. The detectors 5 and b convert the quantized video signals of image points into codes, so that the codes represent the image points belonging to the corresponding communication areas. The coding of the conductors is carried out according to the following rule. Each conductor or object of the image. considered as a collection of connected chords. If the chord has no connection with it on the previous line, i.e. is the initial chord of the new communication area, then a new code is assigned to it. If the scanned chord has a chord associated with it on the previous line, then it

the chord link code is assigned. After coding, all points of the same conductor have the same codes, and the points belonging to different conductors have different codes. The signals from the outputs of the detectors 5 and b through the elements OR of the first and second groups 8 and 9 are sent to the corresponding; unit 11. The second quantized video signal is supplied to the input of the selector 7, which delays the video signal for a duration of three lines and nine decomposition elements with a psmyping of support elements 19 and 20, respectively. The delayed video signals are fed to the inputs of a group of OR-NOT 21 elements and an AND 22 element. Upon output of the AND 22 element, a signal with a level of 1 appears only at the starting points of the conductors in the reference image. The pulses from the output of the selector 7 are on; the entry-recording of the block 11 is set to the input. If a signal with a level is supplied to this input of the block 11, the block 11 operates in the mode

level oh

. Records, and if with

that

in read mode.

The first and second address inputs of block 11 are used to select the rows and columns of the MOZU, respectively. During the scanning of the examined and reference images, the block 11 operates to record, therefore, the cell with the corresponding address will be recorded i if a signal arrives at the first and second address inputs of this cell. At the time of the end of the image sweep the number

accumulated in the corresponding line MOZU equal to the number of shorted conductors in the figure. the image under study, and the number of MOZU accumulated in the corresponding column is equal to the number of discontinuities in the corresponding conductor. At the completion of the scanning of images from the output of the selector 7, a signal is output with the level O and the device switches to the mode of reading information from block 11.

The read mode is divided into two cycles. In the first cycle, information is read from the columns of the MOZU, and in the second cycle, from the rows of the MOZU. At the moment of termination of the scanning of the images from the third output of the synchronizing generator 23 of the distributor 17, the discharge pulse of the cycle counter 24 is output to the state and its first output will be

and on the second

logical signal

 logical j o signal

 The clock pulses from the second output of the sihihrogenerator 23 through the element 2I-OR 25 arrive at the counting

the input of the address counter 29, which generates the address signals for sampling the average columns of the MOZU. the pulses from the second output of the counter 29 through the AND-OR element 26 arrive at the counting input of the address counter 30, which generates the address signals for sampling the corresponding rows of the MOZU. After a certain time after the start of reading from the second output of counter 30 through element 2I-OR 28, a pulse passes through the counting input of loop counter 24, which changes its state, so the first output will be O signal and the second output. At the same time clock im-.

log

pulses will pass to the counting input of the second address counter, from the second output — which pulses arrive at the counting input of counter 29. Counter 12 counts the number of MOZUs accumulated in each column (row). After the end of reading the information from each column (row) of the MOZU from the distributor 17, pulses are output to set the counter 12 to the initial state. -If the number H in the column (row) of the MOZU is greater than one, then a defect signal appears at the output of counter 12, which sets trigger 13 to H and elements 15 and 16 of the first and second groups open and the code of the conductor having defect. The type of defect (break or short is determined by the read cycle, so when reading the information on the columns of the MOZU, the presence of gaps in the conductors is determined, and when reading the lines, the short is determined. The cycle number is determined by the signal level (log or) from the corresponding distributor output , which is also fed to the input of block 18. The first read cycle corresponds to the level of the log., and the second read cycle corresponds to the log of O. Since only the fact of the presence or absence of connectivity between the corresponding and the points of the beginning of the conductors in the controlled image and no restrictions on the shape, size and location of the defects in the firmware are superimposed, the results of the recognition of defects using the proposed device will not depend on the shape, size and location of the defects in the conductors ..

The introduction of new nodes and elements can significantly improve the reliability of recognition.

Claims (1)

DEVICE FOR RECOGNITION OF OBJECT IMAGE DEFECTS, containing television sensors, the inputs of which are connected to the pulse distributor, and the outputs are connected to the corresponding signal conditioners, detectors connected to the corresponding form—. 1 signal selector, sub-key to one signal driver and to the memory unit, the first group of OR elements, the inputs of which are connected to the pulse distributor and one detector, and the outputs are connected to the memory unit, a trigger, one input of which is connected to the pulse distributor, connected to the registration unit, characterized in that, in order to increase the recognition reliability, it contains a counter connected to the memory unit, to a pulse distributor, to the registration unit and to another trigger input, a second group OR elements, the inputs of which are connected to another detector and to the pulse distributor, and the outputs are connected to the memory block, the first group of AND elements, the inputs of which are connected to the trigger and to the pulse distributor, the element NOT connected to the pulse distributor, the second group of elements Y, inputs which are connected to the trigger, to the NOT element and to the pulse distributor, and the third group of OR elements, the inputs of which are connected to the outputs of the AND elements of the first. and second groups, and the outputs are connected to the registration unit. . 9utl SUn., 1023356