SI2008072T1 - Keramični tlačni senzorji in postopki njihove izdelave - Google Patents

Keramični tlačni senzorji in postopki njihove izdelave

Info

Publication number
SI2008072T1
SI2008072T1 SI200732126T SI200732126T SI2008072T1 SI 2008072 T1 SI2008072 T1 SI 2008072T1 SI 200732126 T SI200732126 T SI 200732126T SI 200732126 T SI200732126 T SI 200732126T SI 2008072 T1 SI2008072 T1 SI 2008072T1
Authority
SI
Slovenia
Prior art keywords
producing
same
pressure sensors
ceramic pressure
ceramic
Prior art date
Application number
SI200732126T
Other languages
English (en)
Inventor
Uwe Partsch
Original Assignee
All Impex Gmbh Import/Export
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by All Impex Gmbh Import/Export filed Critical All Impex Gmbh Import/Export
Publication of SI2008072T1 publication Critical patent/SI2008072T1/sl

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0055—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements bonded on a diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/04—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of resistance-strain gauges

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Laminated Bodies (AREA)
SI200732126T 2006-04-10 2007-04-05 Keramični tlačni senzorji in postopki njihove izdelave SI2008072T1 (sl)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102006018049A DE102006018049B4 (de) 2006-04-10 2006-04-10 Keramische Drucksensoren und Verfahren zu ihrer Herstellung
EP07727883.6A EP2008072B1 (de) 2006-04-10 2007-04-05 Keramische drucksensoren und verfahren zu ihrer herstellung
PCT/EP2007/053415 WO2007116030A2 (de) 2006-04-10 2007-04-05 Keramische drucksensoren und verfahren zu ihrer herstellung

Publications (1)

Publication Number Publication Date
SI2008072T1 true SI2008072T1 (sl) 2019-11-29

Family

ID=38514685

Family Applications (1)

Application Number Title Priority Date Filing Date
SI200732126T SI2008072T1 (sl) 2006-04-10 2007-04-05 Keramični tlačni senzorji in postopki njihove izdelave

Country Status (5)

Country Link
US (1) US8079268B2 (sl)
EP (1) EP2008072B1 (sl)
DE (1) DE102006018049B4 (sl)
SI (1) SI2008072T1 (sl)
WO (1) WO2007116030A2 (sl)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006049607B4 (de) 2006-10-20 2009-06-10 Airbus Deutschland Gmbh Herstellverfahren einer Sensorfolie
DE102010028773A1 (de) * 2010-05-07 2011-11-10 Endress + Hauser Gmbh + Co. Kg Gegenlager mit asphärischem Membranbett, Drucksensor mit einem solchen Gegenlager und Verfahren zu deren Herstellung
DE102010030156A1 (de) * 2010-06-16 2011-12-22 Endress + Hauser Gmbh + Co. Kg Keramischer Drucksensor
DE102010051644B4 (de) * 2010-11-17 2014-07-03 Baumer Innotec Ag Drucksensor mit Keramikzelle
ITMI20120456A1 (it) * 2012-03-23 2013-09-24 Microtel Tecnologie Elettroniche S P A Sensore di pressione ceramico e relativo metodo di produzione, e trasduttore che incorpora un sensore di pressione ceramico
GB2542332A (en) 2015-06-29 2017-03-22 Continental automotive systems inc Pressure sensor device with a MEMS piezoresistive element attached to an in-circuit ceramic board
DE102015121625A1 (de) * 2015-12-11 2017-06-14 Endress+Hauser Gmbh+Co. Kg Verfahren zur Herstellung einer Druckmesseinrichtung
CN115711695B (zh) * 2022-10-13 2023-11-21 无锡盛赛传感科技有限公司 金属基陶瓷压力传感器、其制备工艺及制备工装
CN115979498B (zh) * 2023-03-02 2023-11-03 无锡胜脉电子有限公司 绝压平膜陶瓷压力传感器的制作工艺及其质量检验方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5483834A (en) * 1993-09-20 1996-01-16 Rosemount Inc. Suspended diaphragm pressure sensor
US5954900A (en) * 1996-10-04 1999-09-21 Envec Mess- Und Regeltechnik Gmbh + Co. Process for joining alumina ceramic bodies
DE19716521C2 (de) * 1997-04-19 2001-03-01 Bosch Gmbh Robert Kraftsensor in LTCC-Technologie
US6387318B1 (en) * 1997-12-05 2002-05-14 Alliedsignal, Inc. Glass-ceramic pressure sensor support base and its fabrication
DE59804701D1 (de) * 1997-12-23 2002-08-08 Unaxis Balzers Ag Membrane für eine kapazitive vakuummesszelle
DE10308820B4 (de) 2003-02-27 2006-10-12 Ifm Electronic Gmbh Sensor, Meßzelle zur Verwendung in einem Sensor und Verfahren zur Herstellung einer Meßzelle
US20040200291A1 (en) * 2003-04-11 2004-10-14 Xunhu Dai Multilayer ceramic pressure sensor

Also Published As

Publication number Publication date
EP2008072A2 (de) 2008-12-31
WO2007116030A3 (de) 2008-01-10
DE102006018049A1 (de) 2007-10-18
US20100005894A1 (en) 2010-01-14
EP2008072B1 (de) 2019-06-12
DE102006018049B4 (de) 2008-10-16
WO2007116030A2 (de) 2007-10-18
US8079268B2 (en) 2011-12-20

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