SG87888A1 - Substrater assembling apparatus - Google Patents

Substrater assembling apparatus

Info

Publication number
SG87888A1
SG87888A1 SG200001561A SG200001561A SG87888A1 SG 87888 A1 SG87888 A1 SG 87888A1 SG 200001561 A SG200001561 A SG 200001561A SG 200001561 A SG200001561 A SG 200001561A SG 87888 A1 SG87888 A1 SG 87888A1
Authority
SG
Singapore
Prior art keywords
substrater
assembling apparatus
assembling
substrater assembling
Prior art date
Application number
SG200001561A
Inventor
Yawata Satoshi
Imaizumi Kiyoshi
Saito Masayuki
Kawasumi Yukihiro
Mishina Haruo
Hirai Akira
Original Assignee
Hitachi Techno Eng
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP08961299A external-priority patent/JP3410983B2/en
Priority claimed from JP17290399A external-priority patent/JP3535044B2/en
Application filed by Hitachi Techno Eng filed Critical Hitachi Techno Eng
Publication of SG87888A1 publication Critical patent/SG87888A1/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67092—Apparatus for mechanical treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
    • H01L21/6833—Details of electrostatic chucks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Liquid Crystal (AREA)
SG200001561A 1999-03-30 2000-03-20 Substrater assembling apparatus SG87888A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP08961299A JP3410983B2 (en) 1999-03-30 1999-03-30 Substrate assembly method and apparatus
JP17290399A JP3535044B2 (en) 1999-06-18 1999-06-18 Substrate assembling apparatus and method, and liquid crystal panel manufacturing method

Publications (1)

Publication Number Publication Date
SG87888A1 true SG87888A1 (en) 2002-04-16

Family

ID=26431027

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200001561A SG87888A1 (en) 1999-03-30 2000-03-20 Substrater assembling apparatus

Country Status (3)

Country Link
KR (1) KR100360833B1 (en)
SG (1) SG87888A1 (en)
TW (1) TW526367B (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6739929B2 (en) * 2000-03-31 2004-05-25 Minolta Co., Ltd. Method and apparatus for producing a display panel, method for adhering an adhesive sheet and method for adhering plates
KR100783705B1 (en) * 2001-06-26 2007-12-07 삼성전자주식회사 Devices for combining panels for a display and methods for manufacturing the display using the same
JP3693972B2 (en) * 2002-03-19 2005-09-14 富士通株式会社 Bonded substrate manufacturing apparatus and substrate bonding method
KR100847816B1 (en) * 2002-03-25 2008-07-23 엘지디스플레이 주식회사 Vacuum bonding device for liquid crystal display
CN100376945C (en) 2004-06-11 2008-03-26 鸿富锦精密工业（深圳）有限公司 Substrate plying-up apparatus and substrate plying-up process
TWI313384B (en) 2004-07-09 2009-08-11 Innolux Display Corp Method for curing sealant
KR101245181B1 (en) * 2006-03-13 2013-03-19 엘아이지에이디피 주식회사 Substrate bonding apparatus
KR101292803B1 (en) * 2006-12-06 2013-08-02 엘아이지에이디피 주식회사 Apparatus for assembling substrates having a gap control unit
JP5706180B2 (en) * 2011-02-15 2015-04-22 常陽工学株式会社 Sealing method and apparatus
JP5139604B1 (en) * 2011-11-25 2013-02-06 信越エンジニアリング株式会社 Substrate transfer device and substrate assembly line
JP6311967B2 (en) 2014-03-06 2018-04-18 Ｔｉａｎｍａ Ｊａｐａｎ株式会社 Substrate bonding apparatus and substrate bonding method

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06326179A (en) * 1993-05-14 1994-11-25 Shin Etsu Chem Co Ltd Electrostatic chuck
JPH1026763A (en) * 1996-07-11 1998-01-27 Seiko Epson Corp Production of liquid crystal panel and device therefor

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06326179A (en) * 1993-05-14 1994-11-25 Shin Etsu Chem Co Ltd Electrostatic chuck
JPH1026763A (en) * 1996-07-11 1998-01-27 Seiko Epson Corp Production of liquid crystal panel and device therefor

Also Published As

Publication number Publication date
KR100360833B1 (en) 2002-11-13
TW526367B (en) 2003-04-01
KR20010020690A (en) 2001-03-15

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