SG74149A1 - Fluid control device - Google Patents

Fluid control device

Info

Publication number
SG74149A1
SG74149A1 SG1999003296A SG1999003296A SG74149A1 SG 74149 A1 SG74149 A1 SG 74149A1 SG 1999003296 A SG1999003296 A SG 1999003296A SG 1999003296 A SG1999003296 A SG 1999003296A SG 74149 A1 SG74149 A1 SG 74149A1
Authority
SG
Singapore
Prior art keywords
control device
fluid control
fluid
control
Prior art date
Application number
SG1999003296A
Other languages
English (en)
Inventor
Michio Yamaji
Toshiro Nariai
Hiroshi Morokoshi
Original Assignee
Fujikin Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikin Kk filed Critical Fujikin Kk
Publication of SG74149A1 publication Critical patent/SG74149A1/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B1/00—Installations or systems with accumulators; Supply reservoir or sump assemblies
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/5109—Convertible
    • Y10T137/5283—Units interchangeable between alternate locations
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/877—With flow control means for branched passages
    • Y10T137/87885—Sectional block structure

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Valve Housings (AREA)
  • Flow Control (AREA)
SG1999003296A 1998-07-10 1999-07-09 Fluid control device SG74149A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19567298A JP3921565B2 (ja) 1998-07-10 1998-07-10 流体制御装置

Publications (1)

Publication Number Publication Date
SG74149A1 true SG74149A1 (en) 2000-07-18

Family

ID=16345085

Family Applications (1)

Application Number Title Priority Date Filing Date
SG1999003296A SG74149A1 (en) 1998-07-10 1999-07-09 Fluid control device

Country Status (9)

Country Link
US (1) US6116283A (he)
EP (1) EP0971277B1 (he)
JP (1) JP3921565B2 (he)
KR (1) KR100570492B1 (he)
CA (1) CA2277337C (he)
DE (1) DE69921398T2 (he)
IL (1) IL130870A (he)
SG (1) SG74149A1 (he)
TW (1) TW432265B (he)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4244254B2 (ja) * 1999-04-30 2009-03-25 株式会社キッツエスシーティー 集積化ガス制御装置
EP1132669B1 (en) * 2000-03-10 2004-10-13 Tokyo Electron Limited Fluid control apparatus
JP4487135B2 (ja) * 2001-03-05 2010-06-23 東京エレクトロン株式会社 流体制御装置
CN100396980C (zh) * 2002-08-27 2008-06-25 迅捷公司 在公共平面中有歧管连接的模块式衬底配气板
JP2004183771A (ja) * 2002-12-03 2004-07-02 Fujikin Inc 流体制御装置
JP2004340199A (ja) * 2003-05-14 2004-12-02 Fujikin Inc 加熱装置付き流体制御装置
US7178556B2 (en) * 2003-08-07 2007-02-20 Parker-Hannifin Corporation Modular component connector substrate assembly system
JP4677805B2 (ja) * 2005-03-22 2011-04-27 株式会社フジキン 流体制御装置
US7320339B2 (en) * 2005-06-02 2008-01-22 Ultra Clean Holdings, Inc. Gas-panel assembly
JP5096696B2 (ja) * 2006-03-02 2012-12-12 サーパス工業株式会社 流体機器ユニット構造
JP2007327542A (ja) * 2006-06-07 2007-12-20 Surpass Kogyo Kk 流体機器ユニット構造
US20080029170A1 (en) * 2006-08-02 2008-02-07 O'reilly Edward Three-in-one valve and control system
JP5127304B2 (ja) * 2007-05-31 2013-01-23 株式会社フジキン 流体制御装置
CN101680561B (zh) * 2007-05-31 2011-12-21 东京毅力科创株式会社 流体控制装置
US20080302426A1 (en) * 2007-06-06 2008-12-11 Greg Patrick Mulligan System and method of securing removable components for distribution of fluids
JP5340760B2 (ja) * 2009-02-12 2013-11-13 倉敷紡績株式会社 流体制御方法及び流体制御装置
US8307854B1 (en) 2009-05-14 2012-11-13 Vistadeltek, Inc. Fluid delivery substrates for building removable standard fluid delivery sticks
KR101779849B1 (ko) * 2009-06-10 2017-10-10 비스타델텍, 엘엘씨 극 유량 및/또는 고온 유체 전달 기판
US8950433B2 (en) 2011-05-02 2015-02-10 Advantage Group International Inc. Manifold system for gas and fluid delivery
US9810377B2 (en) * 2012-03-07 2017-11-07 Illinois Tool Works Inc. System and method for improving the accuracy of a rate of decay (ROD) measurement in a mass flow controller
US9454158B2 (en) 2013-03-15 2016-09-27 Bhushan Somani Real time diagnostics for flow controller systems and methods
JP1539278S (he) * 2015-03-31 2015-11-30
US10983538B2 (en) 2017-02-27 2021-04-20 Flow Devices And Systems Inc. Systems and methods for flow sensor back pressure adjustment for mass flow controller
TW202117217A (zh) * 2019-09-19 2021-05-01 美商應用材料股份有限公司 清潔減少滯留區的隔離閥

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3546275B2 (ja) * 1995-06-30 2004-07-21 忠弘 大見 流体制御装置
JP3355279B2 (ja) * 1996-07-10 2002-12-09 シーケーディ株式会社 ガス供給ユニット
KR100232112B1 (ko) * 1996-01-05 1999-12-01 아마노 시게루 가스공급유닛
JP4022696B2 (ja) * 1996-11-20 2007-12-19 忠弘 大見 遮断開放器
JP3997337B2 (ja) * 1996-11-20 2007-10-24 忠弘 大見 流体制御装置
JPH10220698A (ja) * 1996-12-03 1998-08-21 Nippon Aera Kk 流体制御装置

Also Published As

Publication number Publication date
DE69921398D1 (de) 2004-12-02
US6116283A (en) 2000-09-12
DE69921398T2 (de) 2005-10-27
EP0971277B1 (en) 2004-10-27
KR20000011592A (ko) 2000-02-25
EP0971277A3 (en) 2001-01-17
CA2277337C (en) 2005-06-07
TW432265B (en) 2001-05-01
JP2000029535A (ja) 2000-01-28
CA2277337A1 (en) 2000-01-10
KR100570492B1 (ko) 2006-04-13
IL130870A (he) 2002-11-10
JP3921565B2 (ja) 2007-05-30
EP0971277A2 (en) 2000-01-12
IL130870A0 (en) 2001-01-28

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