SG48331A1 - Method of and apparatus for interferometrically inspecting a surface of an object - Google Patents

Method of and apparatus for interferometrically inspecting a surface of an object

Info

Publication number
SG48331A1
SG48331A1 SG1996008954A SG1996008954A SG48331A1 SG 48331 A1 SG48331 A1 SG 48331A1 SG 1996008954 A SG1996008954 A SG 1996008954A SG 1996008954 A SG1996008954 A SG 1996008954A SG 48331 A1 SG48331 A1 SG 48331A1
Authority
SG
Singapore
Prior art keywords
image
inspecting
obtains
interferometrically
data
Prior art date
Application number
SG1996008954A
Other languages
English (en)
Inventor
Jean-Pierre Fillard
Paul Christopher Montgomery
Original Assignee
British Tech Group
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by British Tech Group filed Critical British Tech Group
Publication of SG48331A1 publication Critical patent/SG48331A1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02083—Interferometers characterised by particular signal processing and presentation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062—Active error reduction, i.e. varying with time
    • G01B9/02063—Active error reduction, i.e. varying with time by particular alignment of focus position, e.g. dynamic focussing in optical coherence tomography
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry
    • G01J3/453—Interferometric spectrometry by correlation of the amplitudes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity
    • G01N2021/551—Retroreflectance

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Signal Processing (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
SG1996008954A 1992-06-22 1993-06-18 Method of and apparatus for interferometrically inspecting a surface of an object SG48331A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB929213159A GB9213159D0 (en) 1992-06-22 1992-06-22 Method of and apparatus for interferometrically inspecting a surface of an object

Publications (1)

Publication Number Publication Date
SG48331A1 true SG48331A1 (en) 1998-04-17

Family

ID=10717478

Family Applications (1)

Application Number Title Priority Date Filing Date
SG1996008954A SG48331A1 (en) 1992-06-22 1993-06-18 Method of and apparatus for interferometrically inspecting a surface of an object

Country Status (8)

Country Link
EP (1) EP0647310B1 (de)
JP (1) JPH07508345A (de)
KR (1) KR950702304A (de)
AT (1) ATE159587T1 (de)
DE (1) DE69314795T2 (de)
GB (1) GB9213159D0 (de)
SG (1) SG48331A1 (de)
WO (1) WO1994000733A1 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5535002A (en) * 1995-04-27 1996-07-09 At&T Corp. Band matching system and method for enabling accurate determination of a disparity between two surfaces using an interferometer
US5898494A (en) * 1995-04-27 1999-04-27 Lucent Technologies Inc. Automatic inspection system and method for contactlessly measuring the disparity between two surfaces
US5636020A (en) * 1995-04-27 1997-06-03 Lucent Technologies Inc. Zone analysis system and method for optimizing the performance of an inspection system for determining disparity between two surfaces
US5543915A (en) * 1995-04-27 1996-08-06 At&T Corp. Autofocusing system and method for positioning an interferometric fringe over a target in an image
US5600439A (en) * 1995-04-27 1997-02-04 Lucent Technologies Inc. Self-calibration system and method for determining the adequacy of an interferometer angle and surface curvatures in an inspection system for determining disparity between two surfaces
US6724489B2 (en) * 2000-09-22 2004-04-20 Daniel Freifeld Three dimensional scanning camera
AU2002225629A1 (en) 2001-12-05 2003-07-24 Semiconductor Technologies And Instruments, Inc. System and method for inspection using white light intererometry
CN1784588B (zh) * 2003-03-06 2011-07-13 齐戈股份有限公司 使用扫描干涉测量形成复杂表面结构的轮廓以及对其表征
CN1784587B (zh) * 2003-03-06 2010-09-08 齐戈股份有限公司 使用扫描干涉测量形成复杂表面结构的轮廓
GB0415766D0 (en) 2004-07-14 2004-08-18 Taylor Hobson Ltd Apparatus for and a method of determining a characteristic of a layer or layers
DE102007018951B3 (de) * 2007-04-21 2009-01-02 Carl Mahr Holding Gmbh Modulares Messkopfsystem
KR100927865B1 (ko) 2008-01-03 2009-11-23 서강대학교산학협력단 Ｉ／ｑ 간섭계와 스캐닝 방법을 이용한 복합 기능 현미경
US8248617B2 (en) 2008-04-22 2012-08-21 Zygo Corporation Interferometer for overlay measurements
US8120781B2 (en) 2008-11-26 2012-02-21 Zygo Corporation Interferometric systems and methods featuring spectral analysis of unevenly sampled data
US8189202B2 (en) 2009-08-04 2012-05-29 Zygo Corporation Interferometer for determining overlay errors
EP2314982B1 (de) * 2009-10-20 2020-12-02 Mitutoyo Corporation Verfahren und Vorrichtung zur Bestimmung der Höhe einer Reihe räumlicher Positionen auf einer Probe, die ein Profil einer Oberfläche mithilfe der Weißlicht-Interferometrie definieren
JP5607392B2 (ja) * 2010-03-12 2014-10-15 株式会社ミツトヨ 光干渉測定装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4387994A (en) * 1980-02-04 1983-06-14 Balasubramanian N Optical system for surface topography measurement
GB2191855A (en) * 1986-05-07 1987-12-23 Univ London Method and apparatus for detecting reflection sites
US4791584A (en) * 1986-10-15 1988-12-13 Eastman Kodak Company Sub-nyquist interferometry

Also Published As

Publication number Publication date
ATE159587T1 (de) 1997-11-15
GB9213159D0 (en) 1992-08-05
DE69314795D1 (de) 1997-11-27
EP0647310B1 (de) 1997-10-22
KR950702304A (ko) 1995-06-19
JPH07508345A (ja) 1995-09-14
DE69314795T2 (de) 1998-02-19
WO1994000733A1 (en) 1994-01-06
EP0647310A1 (de) 1995-04-12

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