SG40837A1 - Method for forming a tapered opening in silicon - Google Patents
Method for forming a tapered opening in siliconInfo
- Publication number
- SG40837A1 SG40837A1 SG1996006407A SG1996006407A SG40837A1 SG 40837 A1 SG40837 A1 SG 40837A1 SG 1996006407 A SG1996006407 A SG 1996006407A SG 1996006407 A SG1996006407 A SG 1996006407A SG 40837 A1 SG40837 A1 SG 40837A1
- Authority
- SG
- Singapore
- Prior art keywords
- silicon
- forming
- tapered opening
- tapered
- opening
- Prior art date
Links
- 229910052710 silicon Inorganic materials 0.000 title 1
- 239000010703 silicon Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3065—Plasma etching; Reactive-ion etching
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Plasma & Fusion (AREA)
- Drying Of Semiconductors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US39924595A | 1995-03-06 | 1995-03-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SG40837A1 true SG40837A1 (en) | 1997-06-14 |
Family
ID=23578769
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SG1996006407A SG40837A1 (en) | 1995-03-06 | 1996-03-05 | Method for forming a tapered opening in silicon |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US5651858A (ja) |
| JP (1) | JPH08250485A (ja) |
| KR (1) | KR960035858A (ja) |
| SG (1) | SG40837A1 (ja) |
| TW (1) | TW297919B (ja) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2644912B2 (ja) | 1990-08-29 | 1997-08-25 | 株式会社日立製作所 | 真空処理装置及びその運転方法 |
| US7089680B1 (en) | 1990-08-29 | 2006-08-15 | Hitachi, Ltd. | Vacuum processing apparatus and operating method therefor |
| USRE39824E1 (en) * | 1990-08-29 | 2007-09-11 | Hitachi, Ltd. | Vacuum processing apparatus and operating method with wafers, substrates and/or semiconductors |
| USRE39756E1 (en) * | 1990-08-29 | 2007-08-07 | Hitachi, Ltd. | Vacuum processing operating method with wafers, substrates and/or semiconductors |
| TW388100B (en) | 1997-02-18 | 2000-04-21 | Hitachi Ulsi Eng Corp | Semiconductor deivce and process for producing the same |
| US6008131A (en) * | 1997-12-22 | 1999-12-28 | Taiwan Semiconductor Manufacturing Company Ltd. | Bottom rounding in shallow trench etching using a highly isotropic etching step |
| KR100702723B1 (ko) * | 2001-06-22 | 2007-04-03 | 동경 엘렉트론 주식회사 | 드라이 에칭 방법 |
| US7514328B2 (en) * | 2003-06-26 | 2009-04-07 | Mears Technologies, Inc. | Method for making a semiconductor device including shallow trench isolation (STI) regions with a superlattice therebetween |
| US7332737B2 (en) * | 2004-06-22 | 2008-02-19 | Micron Technology, Inc. | Isolation trench geometry for image sensors |
| US8703619B2 (en) * | 2012-01-19 | 2014-04-22 | Headway Technologies, Inc. | Taper-etching method and method of manufacturing near-field light generator |
| US9985094B2 (en) * | 2013-12-27 | 2018-05-29 | Taiwan Semiconductor Manufacturing Company, Ltd. | Super junction with an angled trench, transistor having the super junction and method of making the same |
| US9865471B2 (en) * | 2015-04-30 | 2018-01-09 | Tokyo Electron Limited | Etching method and etching apparatus |
| KR20240095152A (ko) * | 2022-12-13 | 2024-06-25 | 주식회사 히타치하이테크 | 플라스마 처리 방법 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4702795A (en) * | 1985-05-03 | 1987-10-27 | Texas Instruments Incorporated | Trench etch process |
| US4855017A (en) * | 1985-05-03 | 1989-08-08 | Texas Instruments Incorporated | Trench etch process for a single-wafer RIE dry etch reactor |
| JPS62224687A (ja) * | 1986-03-25 | 1987-10-02 | Anelva Corp | エツチング方法 |
| US5118384A (en) * | 1990-04-03 | 1992-06-02 | International Business Machines Corporation | Reactive ion etching buffer mask |
-
1996
- 1996-01-24 TW TW085100837A patent/TW297919B/zh active
- 1996-02-29 KR KR1019960005640A patent/KR960035858A/ko not_active Application Discontinuation
- 1996-03-04 JP JP8073216A patent/JPH08250485A/ja active Pending
- 1996-03-05 SG SG1996006407A patent/SG40837A1/en unknown
- 1996-07-26 US US08/690,192 patent/US5651858A/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| KR960035858A (ko) | 1996-10-28 |
| US5651858A (en) | 1997-07-29 |
| JPH08250485A (ja) | 1996-09-27 |
| TW297919B (ja) | 1997-02-11 |
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