SG172852A1 - Large area, homogeneous array fabrication including homogeneous substrates - Google Patents

Large area, homogeneous array fabrication including homogeneous substrates Download PDF

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Publication number
SG172852A1
SG172852A1 SG2011048980A SG2011048980A SG172852A1 SG 172852 A1 SG172852 A1 SG 172852A1 SG 2011048980 A SG2011048980 A SG 2011048980A SG 2011048980 A SG2011048980 A SG 2011048980A SG 172852 A1 SG172852 A1 SG 172852A1
Authority
SG
Singapore
Prior art keywords
tips
article
array
cantilevers
substrate
Prior art date
Application number
SG2011048980A
Other languages
English (en)
Inventor
Nabil A Amro
Raymond Sanedrin
Earl J Gubbins
Original Assignee
Nanoink Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nanoink Inc filed Critical Nanoink Inc
Publication of SG172852A1 publication Critical patent/SG172852A1/en

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Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00Manufacture or treatment of nanostructures
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/544Marks applied to semiconductor devices or parts, e.g. registration marks, alignment structures, wafer maps
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/24Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24802Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Nanotechnology (AREA)
  • Chemical & Material Sciences (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Theoretical Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Micromachines (AREA)
  • Apparatus Associated With Microorganisms And Enzymes (AREA)
  • Micro-Organisms Or Cultivation Processes Thereof (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
SG2011048980A 2009-01-26 2010-01-25 Large area, homogeneous array fabrication including homogeneous substrates SG172852A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US14745209P 2009-01-26 2009-01-26
PCT/US2010/022015 WO2010085769A1 (en) 2009-01-26 2010-01-25 Large area, homogeneous array fabrication including homogeneous substrates

Publications (1)

Publication Number Publication Date
SG172852A1 true SG172852A1 (en) 2011-08-29

Family

ID=42096549

Family Applications (1)

Application Number Title Priority Date Filing Date
SG2011048980A SG172852A1 (en) 2009-01-26 2010-01-25 Large area, homogeneous array fabrication including homogeneous substrates

Country Status (8)

Country Link
US (1) US20100221505A1 (enExample)
EP (1) EP2389614A1 (enExample)
JP (1) JP2012515560A (enExample)
KR (1) KR20110124214A (enExample)
AU (1) AU2010206594A1 (enExample)
CA (1) CA2750430A1 (enExample)
SG (1) SG172852A1 (enExample)
WO (1) WO2010085769A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8214916B2 (en) * 2009-01-26 2012-07-03 Nanoink, Inc. Large area, homogeneous array fabrication including leveling with use of bright spots
US20100229264A1 (en) * 2009-01-26 2010-09-09 Nanoink, Inc. Large area, homogeneous array fabrication including controlled tip loading vapor deposition
US9040339B2 (en) 2013-10-01 2015-05-26 The Pen Practical method of producing an aerogel composite continuous thin film thermoelectric semiconductor material
US9276190B2 (en) 2013-10-01 2016-03-01 The Pen Practical method of producing an aerogel composite continuous thin film thermoelectric semiconductor material by modified MOCVD
US12174533B2 (en) 2019-07-23 2024-12-24 University Of Massachusetts Thermal imprinting of nanostructure materials

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USRE23838E (en) 1950-09-14 1954-06-08 Post-deflected color kinescope
US5171992A (en) * 1990-10-31 1992-12-15 International Business Machines Corporation Nanometer scale probe for an atomic force microscope, and method for making same
US6635311B1 (en) 1999-01-07 2003-10-21 Northwestern University Methods utilizing scanning probe microscope tips and products therefor or products thereby
US6827979B2 (en) * 1999-01-07 2004-12-07 Northwestern University Methods utilizing scanning probe microscope tips and products therefor or produced thereby
US7291284B2 (en) 2000-05-26 2007-11-06 Northwestern University Fabrication of sub-50 nm solid-state nanostructures based on nanolithography
US6642129B2 (en) * 2001-07-26 2003-11-04 The Board Of Trustees Of The University Of Illinois Parallel, individually addressable probes for nanolithography
SE0102764D0 (sv) 2001-08-17 2001-08-17 Astrazeneca Ab Compounds
AU2003211027A1 (en) 2002-03-27 2003-10-13 Nanoink, Inc. Method and apparatus for aligning patterns on a substrate
US7060977B1 (en) * 2002-05-14 2006-06-13 Nanoink, Inc. Nanolithographic calibration methods
EP1363164B1 (en) * 2002-05-16 2015-04-29 NaWoTec GmbH Procedure for etching of materials at the surface with focussed electron beam induced chemical reactions at said surface
US7034854B2 (en) 2002-11-12 2006-04-25 Nanoink, Inc. Methods and apparatus for ink delivery to nanolithographic probe systems
US20040228962A1 (en) 2003-05-16 2004-11-18 Chang Liu Scanning probe microscopy probe and method for scanning probe contact printing
US7690325B2 (en) 2004-04-30 2010-04-06 Bioforce Nanosciences, Inc. Method and apparatus for depositing material onto a surface
ATE491938T1 (de) * 2004-10-29 2011-01-15 Japan Science & Tech Agency Substrat für maldi-tof-ms und massenspektrometrisches verfahren unter verwendung davon
US7339282B2 (en) 2005-01-10 2008-03-04 Bioforce Nanosciences, Inc. Topographically indexed support substrates
WO2007126689A1 (en) * 2006-04-19 2007-11-08 Northwestern University Article for parallel lithography with two-dimensional pen arrays
EP2044485B1 (en) * 2006-06-28 2013-06-05 Northwestern University Etching hole arrays
US8256017B2 (en) * 2006-08-31 2012-08-28 Nanoink, Inc. Using optical deflection of cantilevers for alignment
US20120141731A1 (en) * 2006-12-18 2012-06-07 Mirkin Chad A Fabrication of microstructures and nanostructures using etching resist
KR20100015321A (ko) * 2007-03-13 2010-02-12 나노잉크, 인크. 검시창을 사용하는 나노리소그래피
EP2156246A1 (en) * 2007-05-09 2010-02-24 Nanoink, Inc. Compact nanofabrication apparatus
AU2008284284A1 (en) * 2007-08-08 2009-02-12 Northwestern University Independently-addressable, self-correcting inking for cantilever arrays
JP2011513945A (ja) * 2008-02-05 2011-04-28 ナノインク インコーポレーティッド アレイおよびカンチレバーアレイのレベリング方法
CN102037407B (zh) 2008-04-25 2014-01-01 西北大学 聚合物笔平版印刷术
GB0812789D0 (en) * 2008-07-12 2008-08-20 Univ Liverpool Materials and methods for cell growth
US8214916B2 (en) * 2009-01-26 2012-07-03 Nanoink, Inc. Large area, homogeneous array fabrication including leveling with use of bright spots
US20100229264A1 (en) * 2009-01-26 2010-09-09 Nanoink, Inc. Large area, homogeneous array fabrication including controlled tip loading vapor deposition
WO2010085770A1 (en) * 2009-01-26 2010-07-29 Nanoink, Inc. Large area, homogeneous array fabrication including substrate temperature control
US9918209B2 (en) 2013-10-28 2018-03-13 Microsoft Technology Licensing, Llc Policies for selecting sources for resource strings

Also Published As

Publication number Publication date
WO2010085769A1 (en) 2010-07-29
EP2389614A1 (en) 2011-11-30
JP2012515560A (ja) 2012-07-12
US20100221505A1 (en) 2010-09-02
CA2750430A1 (en) 2010-07-29
KR20110124214A (ko) 2011-11-16
AU2010206594A1 (en) 2011-07-28

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