SG166689A1 - Ceramic sputtering target assembly and a method for producing the same - Google Patents
Ceramic sputtering target assembly and a method for producing the sameInfo
- Publication number
- SG166689A1 SG166689A1 SG200903330-9A SG2009033309A SG166689A1 SG 166689 A1 SG166689 A1 SG 166689A1 SG 2009033309 A SG2009033309 A SG 2009033309A SG 166689 A1 SG166689 A1 SG 166689A1
- Authority
- SG
- Singapore
- Prior art keywords
- ceramic
- sputtering target
- producing
- solder
- interface layer
- Prior art date
Links
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
A method for producing a ceramic sputtering target assembly has steps of providing a backing plate (10) and forming a solder layer (11) on a surface of the backing plate (10); providing a ceramic target (20) and forming an interface layer (21) on a surface of the ceramic target (20); annealing the ceramic target (20) with the interface layer (21); and solder-bonding the solder layer (11) of the backing plate (10) and the interface layer (21) of the ceramic target (20) to obtain the ceramic sputtering target assembly. By annealing the interface layer (21) made of chromium or chromium-containing alloy, the interface layer (21) provides excellent adhesive ability to solder-bonding the solder layer (11) and allows the ceramic target (20) and the backing plate (10) to be combined securely.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SG200903330-9A SG166689A1 (en) | 2009-05-14 | 2009-05-14 | Ceramic sputtering target assembly and a method for producing the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SG200903330-9A SG166689A1 (en) | 2009-05-14 | 2009-05-14 | Ceramic sputtering target assembly and a method for producing the same |
Publications (1)
Publication Number | Publication Date |
---|---|
SG166689A1 true SG166689A1 (en) | 2010-12-29 |
Family
ID=43859894
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG200903330-9A SG166689A1 (en) | 2009-05-14 | 2009-05-14 | Ceramic sputtering target assembly and a method for producing the same |
Country Status (1)
Country | Link |
---|---|
SG (1) | SG166689A1 (en) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6320154A (en) * | 1986-07-10 | 1988-01-27 | Kobe Steel Ltd | Bonding method for sputtering target |
US20040118679A1 (en) * | 2002-07-25 | 2004-06-24 | Shigeru Taniguchi | Target and manufacturing method thereof |
WO2006129941A1 (en) * | 2005-05-31 | 2006-12-07 | Applied Science Corp. | Solder bonding method for sputtering target |
-
2009
- 2009-05-14 SG SG200903330-9A patent/SG166689A1/en unknown
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6320154A (en) * | 1986-07-10 | 1988-01-27 | Kobe Steel Ltd | Bonding method for sputtering target |
US20040118679A1 (en) * | 2002-07-25 | 2004-06-24 | Shigeru Taniguchi | Target and manufacturing method thereof |
WO2006129941A1 (en) * | 2005-05-31 | 2006-12-07 | Applied Science Corp. | Solder bonding method for sputtering target |
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