SG166689A1 - Ceramic sputtering target assembly and a method for producing the same - Google Patents

Ceramic sputtering target assembly and a method for producing the same

Info

Publication number
SG166689A1
SG166689A1 SG200903330-9A SG2009033309A SG166689A1 SG 166689 A1 SG166689 A1 SG 166689A1 SG 2009033309 A SG2009033309 A SG 2009033309A SG 166689 A1 SG166689 A1 SG 166689A1
Authority
SG
Singapore
Prior art keywords
ceramic
sputtering target
producing
solder
interface layer
Prior art date
Application number
SG200903330-9A
Inventor
Kuo-Hsien Wu
Cheng-Hsin Tu
Original Assignee
Solar Applied Mat Tech Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Solar Applied Mat Tech Corp filed Critical Solar Applied Mat Tech Corp
Priority to SG200903330-9A priority Critical patent/SG166689A1/en
Publication of SG166689A1 publication Critical patent/SG166689A1/en

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Abstract

A method for producing a ceramic sputtering target assembly has steps of providing a backing plate (10) and forming a solder layer (11) on a surface of the backing plate (10); providing a ceramic target (20) and forming an interface layer (21) on a surface of the ceramic target (20); annealing the ceramic target (20) with the interface layer (21); and solder-bonding the solder layer (11) of the backing plate (10) and the interface layer (21) of the ceramic target (20) to obtain the ceramic sputtering target assembly. By annealing the interface layer (21) made of chromium or chromium-containing alloy, the interface layer (21) provides excellent adhesive ability to solder-bonding the solder layer (11) and allows the ceramic target (20) and the backing plate (10) to be combined securely.
SG200903330-9A 2009-05-14 2009-05-14 Ceramic sputtering target assembly and a method for producing the same SG166689A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SG200903330-9A SG166689A1 (en) 2009-05-14 2009-05-14 Ceramic sputtering target assembly and a method for producing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SG200903330-9A SG166689A1 (en) 2009-05-14 2009-05-14 Ceramic sputtering target assembly and a method for producing the same

Publications (1)

Publication Number Publication Date
SG166689A1 true SG166689A1 (en) 2010-12-29

Family

ID=43859894

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200903330-9A SG166689A1 (en) 2009-05-14 2009-05-14 Ceramic sputtering target assembly and a method for producing the same

Country Status (1)

Country Link
SG (1) SG166689A1 (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6320154A (en) * 1986-07-10 1988-01-27 Kobe Steel Ltd Bonding method for sputtering target
US20040118679A1 (en) * 2002-07-25 2004-06-24 Shigeru Taniguchi Target and manufacturing method thereof
WO2006129941A1 (en) * 2005-05-31 2006-12-07 Applied Science Corp. Solder bonding method for sputtering target

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6320154A (en) * 1986-07-10 1988-01-27 Kobe Steel Ltd Bonding method for sputtering target
US20040118679A1 (en) * 2002-07-25 2004-06-24 Shigeru Taniguchi Target and manufacturing method thereof
WO2006129941A1 (en) * 2005-05-31 2006-12-07 Applied Science Corp. Solder bonding method for sputtering target

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