SG135178A1 - System and method of controlling fluid flow - Google Patents

System and method of controlling fluid flow

Info

Publication number
SG135178A1
SG135178A1 SG200705755-7A SG2007057557A SG135178A1 SG 135178 A1 SG135178 A1 SG 135178A1 SG 2007057557 A SG2007057557 A SG 2007057557A SG 135178 A1 SG135178 A1 SG 135178A1
Authority
SG
Singapore
Prior art keywords
close
controlling fluid
fluid
dispense
fluid flow
Prior art date
Application number
SG200705755-7A
Other languages
English (en)
Inventor
Marc Laverdiere
Robert F Mcloughlin
Original Assignee
Entegris Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Entegris Inc filed Critical Entegris Inc
Publication of SG135178A1 publication Critical patent/SG135178A1/en

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D11/00—Control of flow ratio
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0971—Speed responsive valve control
    • Y10T137/0989—Acceleration responsive valve control

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Flow Control (AREA)
  • Coating Apparatus (AREA)
SG200705755-7A 2004-02-13 2005-02-07 System and method of controlling fluid flow SG135178A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/779,009 US7107128B2 (en) 2004-02-13 2004-02-13 System for controlling fluid flow

Publications (1)

Publication Number Publication Date
SG135178A1 true SG135178A1 (en) 2007-09-28

Family

ID=34838286

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200705755-7A SG135178A1 (en) 2004-02-13 2005-02-07 System and method of controlling fluid flow

Country Status (8)

Country Link
US (3) US7107128B2 (ja)
EP (1) EP1725921A2 (ja)
JP (2) JP4729504B2 (ja)
KR (1) KR101162390B1 (ja)
CN (1) CN101160585A (ja)
SG (1) SG135178A1 (ja)
TW (1) TWI399628B (ja)
WO (1) WO2005079235A2 (ja)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2837945B1 (fr) * 2002-03-28 2005-04-08 Celec Conception Electronique Gamme de produits configurables a l'installation, outil de configuration et procede de configuration de tels produits
US7107128B2 (en) * 2004-02-13 2006-09-12 Entegris, Inc. System for controlling fluid flow
US20080221822A1 (en) * 2004-08-13 2008-09-11 Marc Laverdiere System and Method for Calibration of a Flow Device
US7172096B2 (en) * 2004-11-15 2007-02-06 Advanced Technology Materials, Inc. Liquid dispensing system
US7940664B2 (en) * 2005-12-02 2011-05-10 Entegris, Inc. I/O systems, methods and devices for interfacing a pump controller
US7517469B2 (en) * 2006-04-28 2009-04-14 Sokudo Co., Ltd. Method and system to measure flow velocity and volume
US8265794B2 (en) * 2007-10-01 2012-09-11 Westlock Controls Corporation Knowledge based valve control method
EP2210153B1 (en) * 2007-11-13 2013-04-24 Rockwell Automation Technologies, Inc. Industrial controller using shared memory multicore architecture
DE102009032547A1 (de) * 2009-07-10 2011-01-13 Krones Ag Verfahren zur automatisierten Steuerung eines Rohrleitungsnetzes
WO2011160105A2 (en) * 2010-06-18 2011-12-22 Advanced Technology Materials, Inc. Endpoint determination for capillary-assisted flow control
DE102010039296B4 (de) * 2010-08-13 2020-06-10 Robert Bosch Gmbh Vorrichtung und Verfahren zur Erzeugung eines Steuersignals
WO2012109320A1 (en) * 2011-02-08 2012-08-16 The University Of Utah Research Foundation System and method for dispensing a minimum quantity of cutting fluid
US9506785B2 (en) 2013-03-15 2016-11-29 Rain Bird Corporation Remote flow rate measuring
EP3191751B1 (en) * 2014-09-09 2020-11-04 Proteus Industries Inc. Systems and methods for coolant drawback
JP6415418B2 (ja) * 2015-11-27 2018-10-31 株式会社アドヴィックス 流体制御弁装置
KR101817212B1 (ko) 2016-04-29 2018-02-21 세메스 주식회사 처리액 분사 유닛 및 기판 처리 장치
US10634538B2 (en) 2016-07-13 2020-04-28 Rain Bird Corporation Flow sensor
US10719089B2 (en) * 2017-05-18 2020-07-21 Fisher Controls International Llc Apparatus and methods to characterize fluid control valves
US10473494B2 (en) 2017-10-24 2019-11-12 Rain Bird Corporation Flow sensor
KR20230165878A (ko) 2018-08-29 2023-12-05 엠케이에스 인스트루먼츠 인코포레이티드 오존수 전달 시스템 및 사용 방법
US11662242B2 (en) 2018-12-31 2023-05-30 Rain Bird Corporation Flow sensor gauge
US11415230B2 (en) * 2020-03-31 2022-08-16 Applied Material, Inc. Slit valve pneumatic control

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10274016A (ja) * 1997-03-28 1998-10-13 Fuji Heavy Ind Ltd 電磁式動弁制御装置
JPH1133471A (ja) * 1997-07-23 1999-02-09 Tokyo Electron Ltd 塗布装置
JP3997535B2 (ja) * 1998-08-31 2007-10-24 Ｓｍｃ株式会社 サックバックバルブ
JP3493322B2 (ja) * 1998-09-25 2004-02-03 Ｓｍｃ株式会社 液だれ防止方法およびシステム
US6348098B1 (en) * 1999-01-20 2002-02-19 Mykrolis Corporation Flow controller
US20010035512A1 (en) * 2000-04-07 2001-11-01 Messer Jeffrey M. Environmentally friendly electro-pneumatic positioner
AU2002254405A1 (en) * 2001-03-29 2002-10-15 Applied Precision, Llc Precision controlled fast valve
TW483047B (en) * 2001-04-20 2002-04-11 Winbond Electronics Corp Liquid spraying method capable of preventing residual liquid drops
WO2004007931A2 (en) * 2002-07-11 2004-01-22 Sturman Industries, Inc. Hydraulic valve actuation methods and apparatus
US6973375B2 (en) * 2004-02-12 2005-12-06 Mykrolis Corporation System and method for flow monitoring and control
US7107128B2 (en) * 2004-02-13 2006-09-12 Entegris, Inc. System for controlling fluid flow

Also Published As

Publication number Publication date
US20050182525A1 (en) 2005-08-18
US8082066B2 (en) 2011-12-20
US20060276935A1 (en) 2006-12-07
CN101160585A (zh) 2008-04-09
TWI399628B (zh) 2013-06-21
KR20060127122A (ko) 2006-12-11
EP1725921A2 (en) 2006-11-29
US7317971B2 (en) 2008-01-08
TW200540591A (en) 2005-12-16
US20080071425A1 (en) 2008-03-20
WO2005079235A2 (en) 2005-09-01
JP2007525837A (ja) 2007-09-06
KR101162390B1 (ko) 2012-07-04
JP2011071564A (ja) 2011-04-07
JP4729504B2 (ja) 2011-07-20
US7107128B2 (en) 2006-09-12
JP5314059B2 (ja) 2013-10-16
WO2005079235A3 (en) 2007-04-05

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