SG131071A1 - Method for removing organic electroluminescent residues from a substrate - Google Patents

Method for removing organic electroluminescent residues from a substrate

Info

Publication number
SG131071A1
SG131071A1 SG200606458-8A SG2006064588A SG131071A1 SG 131071 A1 SG131071 A1 SG 131071A1 SG 2006064588 A SG2006064588 A SG 2006064588A SG 131071 A1 SG131071 A1 SG 131071A1
Authority
SG
Singapore
Prior art keywords
substrate
organic electroluminescent
removing organic
residues
electroluminescent residues
Prior art date
Application number
SG200606458-8A
Other languages
English (en)
Inventor
Andrew David Johnson
Peter James Maroulis
Mark Ian Sistern
Martin Jay Plishka
Original Assignee
Air Prod & Chem
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Prod & Chem filed Critical Air Prod & Chem
Publication of SG131071A1 publication Critical patent/SG131071A1/en

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/20—Changing the shape of the active layer in the devices, e.g. patterning
    • H10K71/231—Changing the shape of the active layer in the devices, e.g. patterning by etching of existing layers
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/40—Thermal treatment, e.g. annealing in the presence of a solvent vapour
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Drying Of Semiconductors (AREA)
  • Electroluminescent Light Sources (AREA)
  • Physical Vapour Deposition (AREA)
SG200606458-8A 2005-09-20 2006-09-15 Method for removing organic electroluminescent residues from a substrate SG131071A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US71871205P 2005-09-20 2005-09-20
US11/518,958 US7485580B2 (en) 2005-09-20 2006-09-12 Method for removing organic electroluminescent residues from a substrate

Publications (1)

Publication Number Publication Date
SG131071A1 true SG131071A1 (en) 2007-04-26

Family

ID=37188947

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200606458-8A SG131071A1 (en) 2005-09-20 2006-09-15 Method for removing organic electroluminescent residues from a substrate

Country Status (6)

Country Link
US (1) US7485580B2 (de)
EP (1) EP1764848A2 (de)
JP (1) JP2007084933A (de)
KR (3) KR20070032925A (de)
SG (1) SG131071A1 (de)
TW (1) TW200715386A (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1998389B1 (de) * 2007-05-31 2018-01-31 Applied Materials, Inc. Verfahren zur Reinigung einer Strukturierungsvorrichtung, Verfahren zur Anbringung eines Schichtsystems auf einem Substrat, System zur Reinigung einer Strukturierungsvorrichtung und Beschichtungssystem zur Anbringung eines Schichtsystems auf einem Substrat
US20090176010A1 (en) * 2008-01-04 2009-07-09 M Zwick Lucy Method of manufacturing organic light emitting display
JP2010027795A (ja) * 2008-07-17 2010-02-04 Ulvac Japan Ltd 有機薄膜のエッチング方法
EP2315501B1 (de) * 2008-07-22 2013-05-15 Showa Denko K.K. Verfahren zur herstellung eines organischen elektrolumineszierenden und mit einem verschlussteil ausgestatteten elements
JP5378193B2 (ja) * 2008-12-26 2013-12-25 株式会社アルバック プラズマ成膜装置及び成膜方法
KR20130064050A (ko) * 2010-04-21 2013-06-17 엔테그리스, 아이엔씨. 코팅된 흑연 물품 및 이 흑연 물품의 반응성 이온 에칭 제조 및 재생
JP6387198B1 (ja) 2017-04-14 2018-09-05 堺ディスプレイプロダクト株式会社 有機ｅｌ表示装置の製造方法及び製造装置
JP7404217B2 (ja) * 2017-04-28 2023-12-25 アプライド マテリアルズ インコーポレイテッド Ｏｌｅｄデバイスの製造に使用される真空システムを洗浄するための方法、ｏｌｅｄデバイスを製造するための基板の上での真空堆積のための方法、及びｏｌｅｄデバイスを製造するための基板の上での真空堆積のための装置
JP6588128B2 (ja) * 2018-05-24 2019-10-09 堺ディスプレイプロダクト株式会社 有機ｅｌ表示装置の製造方法及び製造装置
US20220056376A1 (en) * 2018-12-26 2022-02-24 3M Innovative Properties Company Removal of electroluminescenct materials for substrates

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6872322B1 (en) 1997-11-12 2005-03-29 Applied Materials, Inc. Multiple stage process for cleaning process chambers
TW490714B (en) * 1999-12-27 2002-06-11 Semiconductor Energy Lab Film formation apparatus and method for forming a film
JP2003086576A (ja) * 2001-09-11 2003-03-20 Hitachi Kokusai Electric Inc 基板処理装置
US6949389B2 (en) 2002-05-02 2005-09-27 Osram Opto Semiconductors Gmbh Encapsulation for organic light emitting diodes devices
US7357138B2 (en) * 2002-07-18 2008-04-15 Air Products And Chemicals, Inc. Method for etching high dielectric constant materials and for cleaning deposition chambers for high dielectric constant materials
US6803097B2 (en) 2002-12-19 2004-10-12 Agilent Technologies, Inc. Composite film made of particles embedded in a polymer matrix
US6953705B2 (en) * 2003-07-22 2005-10-11 E. I. Du Pont De Nemours And Company Process for removing an organic layer during fabrication of an organic electronic device
US20050118085A1 (en) 2003-11-12 2005-06-02 Satchell Donald P.Jr. Chamber cleaning or etching gas regeneration and recycle method
KR100615216B1 (ko) * 2004-04-29 2006-08-25 삼성에스디아이 주식회사 유기 억셉터막을 구비한 유기 박막 트랜지스터

Also Published As

Publication number Publication date
KR20080069157A (ko) 2008-07-25
KR20070032925A (ko) 2007-03-23
JP2007084933A (ja) 2007-04-05
US20070066177A1 (en) 2007-03-22
US7485580B2 (en) 2009-02-03
KR20080097969A (ko) 2008-11-06
EP1764848A2 (de) 2007-03-21
TW200715386A (en) 2007-04-16

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