SG115819A1 - Pressure sensor - Google Patents

Pressure sensor

Info

Publication number
SG115819A1
SG115819A1 SG200501991A SG200501991A SG115819A1 SG 115819 A1 SG115819 A1 SG 115819A1 SG 200501991 A SG200501991 A SG 200501991A SG 200501991 A SG200501991 A SG 200501991A SG 115819 A1 SG115819 A1 SG 115819A1
Authority
SG
Singapore
Prior art keywords
pressure sensor
sensor
pressure
Prior art date
Application number
SG200501991A
Other languages
English (en)
Inventor
Gajdeczko Boguslaw
J Violette Kevin
Original Assignee
Asml Holding Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asml Holding Nv filed Critical Asml Holding Nv
Publication of SG115819A1 publication Critical patent/SG115819A1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
    • G01L11/02—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0076—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means
    • G01L9/0077—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light
SG200501991A 2004-03-30 2005-03-30 Pressure sensor SG115819A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/812,098 US7272976B2 (en) 2004-03-30 2004-03-30 Pressure sensor

Publications (1)

Publication Number Publication Date
SG115819A1 true SG115819A1 (en) 2005-10-28

Family

ID=34887676

Family Applications (2)

Application Number Title Priority Date Filing Date
SG200806575-7A SG146616A1 (en) 2004-03-30 2005-03-30 Pressure sensor
SG200501991A SG115819A1 (en) 2004-03-30 2005-03-30 Pressure sensor

Family Applications Before (1)

Application Number Title Priority Date Filing Date
SG200806575-7A SG146616A1 (en) 2004-03-30 2005-03-30 Pressure sensor

Country Status (7)

Country Link
US (2) US7272976B2 (zh)
EP (1) EP1582852A3 (zh)
JP (2) JP2005283588A (zh)
KR (2) KR20060044896A (zh)
CN (2) CN100430707C (zh)
SG (2) SG146616A1 (zh)
TW (1) TWI276791B (zh)

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US7272976B2 (en) * 2004-03-30 2007-09-25 Asml Holdings N.V. Pressure sensor
US7134321B2 (en) 2004-07-20 2006-11-14 Asml Holding N.V. Fluid gauge proximity sensor and method of operating same using a modulated fluid flow
US7437938B2 (en) * 2007-03-21 2008-10-21 Rosemount Inc. Sensor with composite diaphragm containing carbon nanotubes or semiconducting nanowires
US7775118B2 (en) * 2008-04-24 2010-08-17 Custom Sensors & Technologies, Inc. Sensor element assembly and method
NL2003266A1 (nl) * 2008-08-11 2010-02-15 Asml Holding Nv Multi nozzle proximity sensor employing common sensing and nozzle shaping.
JP5349997B2 (ja) * 2009-02-10 2013-11-20 株式会社ケネック 光学式変位計
KR101929864B1 (ko) * 2009-07-31 2018-12-17 에이에스엠엘 홀딩 엔.브이. 저압 및 고압 근접 센서
US20110069291A1 (en) * 2009-09-11 2011-03-24 Sogard Michael R Physical sensor for autofocus system
KR101045006B1 (ko) * 2009-09-17 2011-06-29 군산대학교산학협력단 다공압력프로브의 교정시스템 및 교정방법
CN102062665A (zh) * 2009-11-17 2011-05-18 刘保龙 一种镜面反射型真空度测量装置
CN102824274A (zh) * 2012-08-30 2012-12-19 谭和平 自动饮水瓶
WO2014048911A1 (en) * 2012-09-28 2014-04-03 Biofluidix Gmbh Capacitive pressure sensor
EP2931334B1 (en) 2012-12-14 2017-08-09 Gambro Lundia AB Diaphragm repositioning for pressure pod using position sensing
NO20130884A1 (no) 2013-06-21 2014-12-22 Sinvent As Sensorelement med optisk forskyvning
CN105092110A (zh) * 2014-05-06 2015-11-25 无锡华润上华半导体有限公司 压力传感器及其制作方法
CN109562208A (zh) 2016-09-01 2019-04-02 诺华股份有限公司 用于盒压力的非侵入性测量的系统和方法
CN109414200B (zh) * 2017-12-25 2019-12-24 深圳市得道健康管理有限公司 表面应变检测装置及其表面应变传感器
KR102039426B1 (ko) * 2018-06-22 2019-11-27 한국표준과학연구원 공기 부상 박막 두께 측정 장치
CN108663157A (zh) * 2018-08-01 2018-10-16 桂林电子科技大学 Michelson白光干涉光纤液压传感器及测量系统
CA3132860A1 (en) 2019-03-15 2020-09-24 Nxstage Medical, Inc. Pressure measurement devices, methods, and systems
CN110082026B (zh) * 2019-03-26 2021-01-01 中山大学 气压检测设备及其制作方法、气压检测方法
DE102021212018B3 (de) 2021-10-25 2022-11-10 Carl Zeiss Smt Gmbh Projektionsbelichtungsanlage, Verfahren zum Betreiben der Projektionsbelichtungsanlage

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US7272976B2 (en) * 2004-03-30 2007-09-25 Asml Holdings N.V. Pressure sensor
ITMI20061000A1 (it) * 2006-05-22 2007-11-23 Milano Politecnico Giunto elastico a cerniera sferica traslante e sensore di forze e momenti perfezionato con tale giunto

Also Published As

Publication number Publication date
KR20060044896A (ko) 2006-05-16
US20050217384A1 (en) 2005-10-06
CN1680794A (zh) 2005-10-12
KR20080077057A (ko) 2008-08-21
US20080087094A1 (en) 2008-04-17
JP2009085968A (ja) 2009-04-23
CN101398336A (zh) 2009-04-01
US7272976B2 (en) 2007-09-25
EP1582852A2 (en) 2005-10-05
JP2005283588A (ja) 2005-10-13
TWI276791B (en) 2007-03-21
TW200535406A (en) 2005-11-01
JP5033780B2 (ja) 2012-09-26
EP1582852A3 (en) 2008-02-27
CN100430707C (zh) 2008-11-05
SG146616A1 (en) 2008-10-30

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