SG11202111579YA - High speed synchronization of plasma source/bias power delivery - Google Patents

High speed synchronization of plasma source/bias power delivery

Info

Publication number
SG11202111579YA
SG11202111579YA SG11202111579YA SG11202111579YA SG11202111579YA SG 11202111579Y A SG11202111579Y A SG 11202111579YA SG 11202111579Y A SG11202111579Y A SG 11202111579YA SG 11202111579Y A SG11202111579Y A SG 11202111579YA SG 11202111579Y A SG11202111579Y A SG 11202111579YA
Authority
SG
Singapore
Prior art keywords
high speed
bias power
plasma source
power delivery
speed synchronization
Prior art date
Application number
SG11202111579YA
Inventor
Aaron T Radomski
Benjamin J Gitlin
Larry J Fisk
Mariusz Oldziej
Aaron M Burry
Jonathan W Smyka
Alexei Marakhtanov
Bing Ji
Felix Leib Kozakevich
John Holland
Ranadeep Bhowmick
Original Assignee
Mks Instr Inc
Lam Res Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mks Instr Inc, Lam Res Corp filed Critical Mks Instr Inc
Publication of SG11202111579YA publication Critical patent/SG11202111579YA/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32174—Circuits specially adapted for controlling the RF discharge
    • H01J37/32183—Matching circuits
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32174—Circuits specially adapted for controlling the RF discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32137—Radio frequency generated discharge controlling of the discharge by modulation of energy
    • H01J37/32146—Amplitude modulation, includes pulsing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32137—Radio frequency generated discharge controlling of the discharge by modulation of energy
    • H01J37/32155—Frequency modulation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32137—Radio frequency generated discharge controlling of the discharge by modulation of energy
    • H01J37/32155—Frequency modulation
    • H01J37/32165—Plural frequencies
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32—Processing objects by plasma generation
    • H01J2237/33—Processing objects by plasma generation characterised by the type of processing
    • H01J2237/334—Etching
SG11202111579YA 2019-06-26 2020-04-27 High speed synchronization of plasma source/bias power delivery SG11202111579YA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US16/452,716 US11158488B2 (en) 2019-06-26 2019-06-26 High speed synchronization of plasma source/bias power delivery
PCT/US2020/030067 WO2020263401A1 (en) 2019-06-26 2020-04-27 High speed synchronization of plasma source/bias power delivery

Publications (1)

Publication Number Publication Date
SG11202111579YA true SG11202111579YA (en) 2021-11-29

Family

ID=74042911

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11202111579YA SG11202111579YA (en) 2019-06-26 2020-04-27 High speed synchronization of plasma source/bias power delivery

Country Status (8)

Country Link
US (2) US11158488B2 (en)
EP (1) EP3991197A4 (en)
JP (1) JP7374223B2 (en)
KR (1) KR20220017395A (en)
CN (1) CN113826184B (en)
SG (1) SG11202111579YA (en)
TW (1) TWI750639B (en)
WO (1) WO2020263401A1 (en)

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Also Published As

Publication number Publication date
EP3991197A1 (en) 2022-05-04
US11158488B2 (en) 2021-10-26
KR20220017395A (en) 2022-02-11
TW202107515A (en) 2021-02-16
JP2022538723A (en) 2022-09-06
JP7374223B2 (en) 2023-11-06
US11935726B2 (en) 2024-03-19
US20200411289A1 (en) 2020-12-31
WO2020263401A1 (en) 2020-12-30
CN113826184B (en) 2024-03-29
US20220005674A1 (en) 2022-01-06
CN113826184A (en) 2021-12-21
TWI750639B (en) 2021-12-21
EP3991197A4 (en) 2023-08-16

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