SG11202110974YA - High-order mode surface acoustic wave device - Google Patents

High-order mode surface acoustic wave device

Info

Publication number
SG11202110974YA
SG11202110974YA SG11202110974YA SG11202110974YA SG11202110974YA SG 11202110974Y A SG11202110974Y A SG 11202110974YA SG 11202110974Y A SG11202110974Y A SG 11202110974YA SG 11202110974Y A SG11202110974Y A SG 11202110974YA SG 11202110974Y A SG11202110974Y A SG 11202110974YA
Authority
SG
Singapore
Prior art keywords
acoustic wave
surface acoustic
wave device
order mode
mode surface
Prior art date
Application number
SG11202110974YA
Inventor
Michio Kadota
Shuji Tanaka
Original Assignee
Univ Tohoku
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Tohoku filed Critical Univ Tohoku
Publication of SG11202110974YA publication Critical patent/SG11202110974YA/en

Links

Classifications

    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02Details
    • H03H9/125Driving means, e.g. electrodes, coils
    • H03H9/145Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14538Formation
    • H03H9/14541Multilayer finger or busbar electrode
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02Details
    • H03H9/125Driving means, e.g. electrodes, coils
    • H03H9/145Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02Details
    • H03H9/02535Details of surface acoustic wave devices
    • H03H9/02543Characteristics of substrate, e.g. cutting angles
    • H03H9/02559Characteristics of substrate, e.g. cutting angles of lithium niobate or lithium-tantalate substrates
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02Details
    • H03H9/02535Details of surface acoustic wave devices
    • H03H9/02543Characteristics of substrate, e.g. cutting angles
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02Details
    • H03H9/02535Details of surface acoustic wave devices
    • H03H9/02543Characteristics of substrate, e.g. cutting angles
    • H03H9/02574Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02Details
    • H03H9/02535Details of surface acoustic wave devices
    • H03H9/02818Means for compensation or elimination of undesirable effects
    • H03H9/02834Means for compensation or elimination of undesirable effects of temperature influence
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02Details
    • H03H9/125Driving means, e.g. electrodes, coils
    • H03H9/13Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
    • H03H9/131Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials consisting of a multilayered structure
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02Details
    • H03H9/125Driving means, e.g. electrodes, coils
    • H03H9/145Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14538Formation
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/25Constructional features of resonators using surface acoustic waves
SG11202110974YA 2019-04-03 2020-03-31 High-order mode surface acoustic wave device SG11202110974YA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019071405 2019-04-03
PCT/JP2020/014906 WO2020204045A1 (en) 2019-04-03 2020-03-31 High-order mode surface acoustic wave device

Publications (1)

Publication Number Publication Date
SG11202110974YA true SG11202110974YA (en) 2021-11-29

Family

ID=72668500

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11202110974YA SG11202110974YA (en) 2019-04-03 2020-03-31 High-order mode surface acoustic wave device

Country Status (8)

Country Link
US (1) US20220200566A1 (en)
KR (1) KR20210145804A (en)
CN (1) CN113678372A (en)
DE (1) DE112020001723T5 (en)
GB (1) GB2596956B (en)
SG (1) SG11202110974YA (en)
TW (1) TW202044757A (en)
WO (1) WO2020204045A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SG10201905013VA (en) 2018-06-11 2020-01-30 Skyworks Solutions Inc Acoustic wave device with spinel layer
US11621690B2 (en) 2019-02-26 2023-04-04 Skyworks Solutions, Inc. Method of manufacturing acoustic wave device with multi-layer substrate including ceramic
US20230361752A1 (en) * 2020-02-28 2023-11-09 Tohoku University Acoustic wave device
CN117013984A (en) * 2023-08-21 2023-11-07 天通瑞宏科技有限公司 Bonding wafer and film surface acoustic wave device

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07101434B2 (en) * 1988-09-20 1995-11-01 株式会社テック Product data reader
JPH07283682A (en) * 1994-04-13 1995-10-27 Murata Mfg Co Ltd Surface acoustic wave resonator filter
US6642813B1 (en) * 1999-10-15 2003-11-04 Sumitomo Electric Industries, Ltd. Surface acoustic wave device utilizing a ZnO layer and a diamond layer
WO2010016192A1 (en) * 2008-08-08 2010-02-11 株式会社村田製作所 Acoustic wave device
DE112010003229B4 (en) * 2009-07-17 2015-07-30 Murata Manufacturing Co., Ltd. Surface acoustic wave device
JP2013214789A (en) * 2010-07-30 2013-10-17 Murata Mfg Co Ltd Manufacturing method of acoustic wave device
WO2012086441A1 (en) * 2010-12-24 2012-06-28 株式会社村田製作所 Elastic wave device and production method thereof
WO2014054580A1 (en) 2012-10-05 2014-04-10 株式会社村田製作所 Elastic surface wave device

Also Published As

Publication number Publication date
GB202114590D0 (en) 2021-11-24
WO2020204045A1 (en) 2020-10-08
US20220200566A1 (en) 2022-06-23
DE112020001723T5 (en) 2021-12-16
JPWO2020204045A1 (en) 2020-10-08
GB2596956A8 (en) 2022-08-03
GB2596956B (en) 2023-08-23
KR20210145804A (en) 2021-12-02
TW202044757A (en) 2020-12-01
CN113678372A (en) 2021-11-19
GB2596956A (en) 2022-01-12

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