SG10201913568SA - Acoustic wave device with transverse mode suppression - Google Patents

Acoustic wave device with transverse mode suppression

Info

Publication number
SG10201913568SA
SG10201913568SA SG10201913568SA SG10201913568SA SG10201913568SA SG 10201913568S A SG10201913568S A SG 10201913568SA SG 10201913568S A SG10201913568S A SG 10201913568SA SG 10201913568S A SG10201913568S A SG 10201913568SA SG 10201913568S A SG10201913568S A SG 10201913568SA
Authority
SG
Singapore
Prior art keywords
acoustic wave
wave device
transverse mode
mode suppression
suppression
Prior art date
Application number
SG10201913568SA
Inventor
Rei Goto
Koji Seo
Keiichi Maki
Original Assignee
Skyworks Solutions Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Skyworks Solutions Inc filed Critical Skyworks Solutions Inc
Publication of SG10201913568SA publication Critical patent/SG10201913568SA/en

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02818—Means for compensation or elimination of undesirable effects
    • H03H9/02889—Means for compensation or elimination of undesirable effects of influence of mass loading
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02228—Guided bulk acoustic wave devices or Lamb wave devices having interdigital transducers situated in parallel planes on either side of a piezoelectric layer
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02818—Means for compensation or elimination of undesirable effects
    • H03H9/02834—Means for compensation or elimination of undesirable effects of temperature influence
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14517—Means for weighting
    • H03H9/14529—Distributed tap
    • H03H9/14532—Series weighting; Transverse weighting
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14544—Transducers of particular shape or position
    • H03H9/1457—Transducers having different finger widths
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/173—Air-gaps
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/175—Acoustic mirrors
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/25—Constructional features of resonators using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H03H9/6423—Means for obtaining a particular transfer characteristic
    • H03H9/6433—Coupled resonator filters
    • H03H9/6483—Ladder SAW filters
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H03H9/6489—Compensation of undesirable effects

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
SG10201913568SA 2018-12-28 2019-12-27 Acoustic wave device with transverse mode suppression SG10201913568SA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US201862785919P 2018-12-28 2018-12-28

Publications (1)

Publication Number Publication Date
SG10201913568SA true SG10201913568SA (en) 2020-07-29

Family

ID=71124317

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10201913568SA SG10201913568SA (en) 2018-12-28 2019-12-27 Acoustic wave device with transverse mode suppression

Country Status (3)

Country Link
US (2) US11368137B2 (en)
JP (1) JP2020109957A (en)
SG (1) SG10201913568SA (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11451212B2 (en) 2019-06-19 2022-09-20 Skyworks Solutions, Inc. Acoustic wave resonator with transverse spurious mode for filter steepness
US11705883B2 (en) 2019-10-24 2023-07-18 Skyworks Solutions, Inc. Acoustic wave resonator with mass loading strip for suppression of transverse mode
CN112217490B (en) * 2020-10-22 2021-09-14 展讯通信（上海）有限公司 Laminated temperature compensation type surface acoustic wave resonator and packaging method
WO2022134195A1 (en) * 2020-12-23 2022-06-30 杭州左蓝微电子技术有限公司 Surface acoustic wave resonator and manufacturing method therefor
CN112886938B (en) * 2020-12-23 2022-04-26 杭州左蓝微电子技术有限公司 Surface acoustic wave resonator capable of suppressing transverse mode and manufacturing method thereof
US20220271733A1 (en) * 2021-02-22 2022-08-25 Skyworks Solutions, Inc. Acoustic wave device with multi-layer interdigital transducer electrode
JP2022171054A (en) * 2021-04-30 2022-11-11 太陽誘電株式会社 Acoustic wave resonator, filter, and multiplexer
CN117321915A (en) * 2021-05-17 2023-12-29 株式会社村田制作所 Piezoelectric bulk wave device
US20230016884A1 (en) * 2021-07-15 2023-01-19 Skyworks Solutions, Inc. Multilayer piezoelectric substrate device with partially recessed passivation layer
WO2023003005A1 (en) * 2021-07-21 2023-01-26 株式会社村田製作所 Elastic wave device
CN117981221A (en) * 2021-09-21 2024-05-03 株式会社村田制作所 Elastic wave device
JP7364196B2 (en) * 2021-09-24 2023-10-18 三安ジャパンテクノロジー株式会社 Acoustic wave devices, modules
US20230107728A1 (en) * 2021-10-04 2023-04-06 Skyworks Solutions, Inc. Stacked acoustic wave device assembly
WO2023058767A1 (en) * 2021-10-08 2023-04-13 株式会社村田製作所 Elastic wave device
WO2023090172A1 (en) * 2021-11-18 2023-05-25 株式会社村田製作所 Elastic wave device
WO2023140354A1 (en) * 2022-01-21 2023-07-27 株式会社村田製作所 Elastic wave device and filter device
CN114679146B (en) * 2022-03-29 2024-10-01 北京航天微电科技有限公司 Preparation method of temperature compensation filter, temperature compensation filter and electronic equipment
WO2023229049A1 (en) * 2022-05-26 2023-11-30 株式会社村田製作所 Elastic wave device and filter device
WO2024043346A1 (en) * 2022-08-26 2024-02-29 株式会社村田製作所 Acoustic wave device
CN115149922B (en) * 2022-09-01 2022-12-09 阿尔伯达(苏州)科技有限公司 Structure for inhibiting transverse parasitic mode of acoustic coupling filter
WO2024070893A1 (en) * 2022-09-29 2024-04-04 株式会社村田製作所 Elastic wave device
CN115296642B (en) * 2022-10-08 2023-03-24 深圳新声半导体有限公司 Surface acoustic wave resonator structure, forming method thereof and filter
CN116208119B (en) * 2023-04-19 2023-07-14 深圳新声半导体有限公司 Surface acoustic wave device and method for manufacturing the same
CN116979926B (en) * 2023-09-01 2023-12-22 深圳新声半导体有限公司 Surface acoustic wave resonator device, method of manufacturing the same, and filter
CN117424579B (en) * 2023-12-13 2024-06-25 深圳新声半导体有限公司 Surface acoustic wave resonator device, method of manufacturing the same, and filter

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US7576471B1 (en) 2007-09-28 2009-08-18 Triquint Semiconductor, Inc. SAW filter operable in a piston mode
US8294331B2 (en) 2009-09-22 2012-10-23 Triquint Semiconductor, Inc. Acoustic wave guide device and method for minimizing trimming effects and piston mode instabilities
WO2011103813A1 (en) 2010-02-26 2011-09-01 Xintec Inc. Chip package and fabrication method thereof
WO2012132238A1 (en) * 2011-03-25 2012-10-04 Panasonic Corporation Acoustic wave device with reduced higher order transverse modes
EP3022841A1 (en) 2013-07-18 2016-05-25 Epcos AG Electroacoustic transducer with improved suppression of unwanted modes
JP6686027B2 (en) 2014-12-16 2020-04-22 スナップトラック・インコーポレーテッド Electroacoustic transducer with improved suppression of unwanted modes
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US10469050B2 (en) 2016-08-19 2019-11-05 Qorvo Us, Inc. Guided acoustic wave device

Also Published As

Publication number Publication date
US11368137B2 (en) 2022-06-21
US20200212876A1 (en) 2020-07-02
JP2020109957A (en) 2020-07-16
US20220286105A1 (en) 2022-09-08

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