SG11202110634VA - Sputtering target and method for manufacturing sputtering target - Google Patents
Sputtering target and method for manufacturing sputtering targetInfo
- Publication number
- SG11202110634VA SG11202110634VA SG11202110634VA SG11202110634VA SG11202110634VA SG 11202110634V A SG11202110634V A SG 11202110634VA SG 11202110634V A SG11202110634V A SG 11202110634VA SG 11202110634V A SG11202110634V A SG 11202110634VA SG 11202110634V A SG11202110634V A SG 11202110634VA
- Authority
- SG
- Singapore
- Prior art keywords
- sputtering target
- manufacturing
- target
- manufacturing sputtering
- sputtering
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/3414—Targets
- H01J37/3426—Material
- H01J37/3429—Plural materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/10—Sintering only
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C1/00—Making non-ferrous alloys
- C22C1/04—Making non-ferrous alloys by powder metallurgy
- C22C1/05—Mixtures of metal powder with non-metallic powder
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C19/00—Alloys based on nickel or cobalt
- C22C19/07—Alloys based on nickel or cobalt based on cobalt
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C30/00—Alloys containing less than 50% by weight of each constituent
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C32/00—Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ
- C22C32/001—Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ with only oxides
- C22C32/0015—Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ with only oxides with only single oxides as main non-metallic constituents
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C32/00—Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ
- C22C32/001—Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ with only oxides
- C22C32/0015—Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ with only oxides with only single oxides as main non-metallic constituents
- C22C32/0026—Matrix based on Ni, Co, Cr or alloys thereof
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C5/00—Alloys based on noble metals
- C22C5/04—Alloys based on a platinum group metal
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F2301/00—Metallic composition of the powder or its coating
- B22F2301/15—Nickel or cobalt
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F2301/00—Metallic composition of the powder or its coating
- B22F2301/25—Noble metals, i.e. Ag Au, Ir, Os, Pd, Pt, Rh, Ru
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F2998/00—Supplementary information concerning processes or compositions relating to powder metallurgy
- B22F2998/10—Processes characterised by the sequence of their steps
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C2202/00—Physical properties
- C22C2202/02—Magnetic
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Structural Engineering (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019069393 | 2019-03-29 | ||
PCT/JP2019/037143 WO2020202604A1 (ja) | 2019-03-29 | 2019-09-20 | スパッタリングターゲット及びスパッタリングターゲットの製造方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
SG11202110634VA true SG11202110634VA (en) | 2021-10-28 |
Family
ID=72668468
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG11202110634VA SG11202110634VA (en) | 2019-03-29 | 2019-09-20 | Sputtering target and method for manufacturing sputtering target |
Country Status (6)
Country | Link |
---|---|
US (1) | US20220189750A1 (zh) |
JP (1) | JP7176102B2 (zh) |
CN (1) | CN113692457A (zh) |
SG (1) | SG11202110634VA (zh) |
TW (1) | TWI797385B (zh) |
WO (1) | WO2020202604A1 (zh) |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5192993B2 (ja) * | 2008-11-13 | 2013-05-08 | 昭和電工株式会社 | 磁性層の形成方法 |
JP2012117147A (ja) * | 2010-11-12 | 2012-06-21 | Jx Nippon Mining & Metals Corp | コバルト酸化物が残留したスパッタリングターゲット |
WO2014178310A1 (ja) * | 2013-04-30 | 2014-11-06 | Jx日鉱日石金属株式会社 | 焼結体、同焼結体からなる磁気記録膜形成用スパッタリングターゲット |
-
2019
- 2019-09-20 SG SG11202110634VA patent/SG11202110634VA/en unknown
- 2019-09-20 US US17/598,473 patent/US20220189750A1/en active Pending
- 2019-09-20 CN CN201980095022.1A patent/CN113692457A/zh active Pending
- 2019-09-20 JP JP2021511085A patent/JP7176102B2/ja active Active
- 2019-09-20 WO PCT/JP2019/037143 patent/WO2020202604A1/ja active Application Filing
- 2019-09-26 TW TW108134841A patent/TWI797385B/zh active
Also Published As
Publication number | Publication date |
---|---|
US20220189750A1 (en) | 2022-06-16 |
CN113692457A (zh) | 2021-11-23 |
TWI797385B (zh) | 2023-04-01 |
TW202104136A (zh) | 2021-02-01 |
WO2020202604A1 (ja) | 2020-10-08 |
JP7176102B2 (ja) | 2022-11-21 |
JPWO2020202604A1 (zh) | 2020-10-08 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
SG11202009091YA (en) | Sputtering target member and method for manufacturing same | |
EP3196334A4 (en) | Ag alloy sputtering target and ag alloy film manufacturing method | |
EP3604611A4 (en) | CATHODIC SPRAY TARGET AND METHOD OF MANUFACTURING THE SAME | |
EP3467142A4 (en) | SPRAYING TARGET AND PROCESS FOR PRODUCING THE SAME | |
EP3211116A4 (en) | Magnetic-material sputtering target and method for producing same | |
EP3211117A4 (en) | Copper alloy sputtering target and method for manufacturing same | |
EP3770441A4 (en) | COMPRESSOR AND ITS MANUFACTURING PROCESS | |
EP3871549A4 (en) | SHOE AND METHOD OF MANUFACTURING THE SHOE | |
EP3926057A4 (en) | HIGH MN STEEL AND METHOD OF PRODUCTION THEREOF | |
EP3369842A4 (en) | CATHODIC SPUTTER TARGET AND METHOD FOR PRODUCING THE SAME | |
EP3050999A4 (en) | Sputtering target and sputtering target manufacturing method | |
SG11201706280XA (en) | Cr-Ti ALLOY SPUTTERING TARGET MATERIAL AND METHOD FOR PRODUCING SAME | |
EP3101153A4 (en) | Cu-Ga ALLOY SPUTTERING TARGET AND METHOD FOR PRODUCING SAME | |
SG10201912807WA (en) | Iron-platinum-based sputtering target and method for manufacturing the same | |
EP3604610A4 (en) | PRODUCTION PROCESS FOR CYLINDRICAL CATHODIC SPRAY TARGET AND CYLINDRICAL CATHODIC SPRAY TARGET | |
KR102348514B9 (ko) | 스퍼터용 쉴드 및 그 제조 방법 | |
EP3415658A4 (en) | CATHODIC SPUTTER TARGET, AND METHOD OF MANUFACTURING THE SAME | |
EP4006197A4 (en) | SPUTTER TARGET | |
EP3722455A4 (en) | GOLD SPRAY TARGET AND ITS PRODUCTION PROCESS | |
EP3199662A4 (en) | Sputtering target and method for manufacturing same | |
EP3722454A4 (en) | GOLD SPRAY TARGET PRODUCTION PROCESS AND GOLD FILM PRODUCTION PROCESS | |
SG11202011221SA (en) | Sputtering target and method for manufacturing sputtering target | |
EP3418422A4 (en) | Ti-Nb ALLOY SPRAY TARGET AND METHOD FOR MANUFACTURING THE SAME | |
EP3612661A4 (en) | PROFILED SPRAY TARGET AND ITS MANUFACTURING PROCESS | |
SG11202102956TA (en) | Sputtering target and method for producing same |