SG11202109010VA - Transfer device and ceiling carrier - Google Patents

Transfer device and ceiling carrier

Info

Publication number
SG11202109010VA
SG11202109010VA SG11202109010VA SG11202109010VA SG11202109010VA SG 11202109010V A SG11202109010V A SG 11202109010VA SG 11202109010V A SG11202109010V A SG 11202109010VA SG 11202109010V A SG11202109010V A SG 11202109010VA SG 11202109010V A SG11202109010V A SG 11202109010VA
Authority
SG
Singapore
Prior art keywords
transfer device
ceiling carrier
ceiling
carrier
transfer
Prior art date
Application number
SG11202109010VA
Inventor
Makoto Kobayashi
Keiichiro Suriki
Original Assignee
Murata Machinery Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Machinery Ltd filed Critical Murata Machinery Ltd
Publication of SG11202109010VA publication Critical patent/SG11202109010VA/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67276—Production flow monitoring, e.g. for increasing throughput
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67363—Closed carriers specially adapted for containing substrates other than wafers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733—Overhead conveying
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G43/00—Control devices, e.g. for safety, warning or fault-correcting

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Automation & Control Theory (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Chain Conveyers (AREA)
  • Intermediate Stations On Conveyors (AREA)
SG11202109010VA 2019-02-26 2019-12-20 Transfer device and ceiling carrier SG11202109010VA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019033197 2019-02-26
PCT/JP2019/050215 WO2020174846A1 (en) 2019-02-26 2019-12-20 Transfer device and ceiling carrier

Publications (1)

Publication Number Publication Date
SG11202109010VA true SG11202109010VA (en) 2021-09-29

Family

ID=72239186

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11202109010VA SG11202109010VA (en) 2019-02-26 2019-12-20 Transfer device and ceiling carrier

Country Status (8)

Country Link
US (1) US11735454B2 (en)
EP (1) EP3932831A4 (en)
JP (1) JP7120434B2 (en)
CN (1) CN113454001B (en)
IL (1) IL285606A (en)
SG (1) SG11202109010VA (en)
TW (1) TWI818152B (en)
WO (1) WO2020174846A1 (en)

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08162385A (en) * 1994-12-01 1996-06-21 Nikon Corp Stage device and driving method thereof
JPH09272605A (en) * 1996-04-03 1997-10-21 Kito Corp Running controller for stacker crane
JPH11349280A (en) * 1998-06-05 1999-12-21 Shinko Electric Co Ltd Suspended conveying device
JP2000038218A (en) * 1998-07-23 2000-02-08 Shinko Electric Co Ltd Moving device and moving method for article
JP2000099151A (en) * 1998-09-21 2000-04-07 Murata Mach Ltd Carrier system
JP2001088909A (en) * 1999-09-17 2001-04-03 Komatsu Forklift Co Ltd Brakeing control device for stacker crane of automated storage and retrieval warehouse
US20050105997A1 (en) * 2003-09-11 2005-05-19 Englhardt Eric A. Methods and apparatus for carriers suitable for use in high-speed/high-acceleration transport systems
TW200524803A (en) * 2003-11-13 2005-08-01 Applied Materials Inc Stabilizing substrate carriers during overhead transport
US7168553B2 (en) * 2003-11-13 2007-01-30 Applied Materials, Inc. Dynamically balanced substrate carrier handler
JP4172477B2 (en) * 2005-08-17 2008-10-29 村田機械株式会社 How to implement pattern on actual machine
JP4807424B2 (en) * 2009-03-17 2011-11-02 村田機械株式会社 Ceiling transfer system and article transfer method
JP5961856B2 (en) * 2012-10-24 2016-08-02 住友重機械搬送システム株式会社 Center of gravity position detection apparatus, center of gravity position detection method, and program
JP6477439B2 (en) * 2015-11-17 2019-03-06 株式会社ダイフク Goods transport equipment
JP6471702B2 (en) * 2016-01-12 2019-02-20 株式会社ダイフク Article conveying device
JP6344410B2 (en) 2016-02-19 2018-06-20 村田機械株式会社 Ceiling transport vehicle
JP6819224B2 (en) * 2016-10-31 2021-01-27 株式会社ダイフク Transport vehicle
JP2019131374A (en) * 2018-01-31 2019-08-08 株式会社不二越 Traveling truck

Also Published As

Publication number Publication date
WO2020174846A1 (en) 2020-09-03
TW202039338A (en) 2020-11-01
EP3932831A4 (en) 2022-11-16
US20220157631A1 (en) 2022-05-19
JP7120434B2 (en) 2022-08-17
IL285606A (en) 2021-09-30
CN113454001A (en) 2021-09-28
CN113454001B (en) 2023-04-04
JPWO2020174846A1 (en) 2021-12-23
US11735454B2 (en) 2023-08-22
TWI818152B (en) 2023-10-11
EP3932831A1 (en) 2022-01-05

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