SG11202105251RA - Locking device for supplying chemical, and automatic chemical supply apparatus including same - Google Patents
Locking device for supplying chemical, and automatic chemical supply apparatus including sameInfo
- Publication number
- SG11202105251RA SG11202105251RA SG11202105251RA SG11202105251RA SG11202105251RA SG 11202105251R A SG11202105251R A SG 11202105251RA SG 11202105251R A SG11202105251R A SG 11202105251RA SG 11202105251R A SG11202105251R A SG 11202105251RA SG 11202105251R A SG11202105251R A SG 11202105251RA
- Authority
- SG
- Singapore
- Prior art keywords
- chemical
- locking device
- apparatus including
- supply apparatus
- including same
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Quick-Acting Or Multi-Walled Pipe Joints (AREA)
- Infusion, Injection, And Reservoir Apparatuses (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020180162311A KR102005957B1 (ko) | 2018-12-14 | 2018-12-14 | 케미컬 공급을 위한 록킹장치 및 이를 구비한 케미컬 자동공급장치 |
| PCT/KR2019/000814 WO2020122310A1 (ko) | 2018-12-14 | 2019-01-21 | 케미컬 공급을 위한 록킹장치 및 이를 구비한 케미컬 자동공급장치 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SG11202105251RA true SG11202105251RA (en) | 2021-06-29 |
Family
ID=67615625
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SG11202105251RA SG11202105251RA (en) | 2018-12-14 | 2019-01-21 | Locking device for supplying chemical, and automatic chemical supply apparatus including same |
Country Status (4)
| Country | Link |
|---|---|
| KR (1) | KR102005957B1 (ko) |
| CN (1) | CN113169100B (ko) |
| SG (1) | SG11202105251RA (ko) |
| WO (1) | WO2020122310A1 (ko) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102311339B1 (ko) * | 2020-02-06 | 2021-10-13 | 호산테크 주식회사 | 케미컬 이송용 자동 접속장치 |
| KR102249036B1 (ko) * | 2020-10-19 | 2021-05-07 | (주)에스티아이 | 케미컬 필터 교체장치 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR0141985B1 (ko) * | 1994-08-11 | 1998-07-15 | 공희택 | 고순도 케미칼 이송용 호스의 자동연결장치 |
| KR20010053914A (ko) * | 1999-12-02 | 2001-07-02 | 윤종용 | 케미컬 이송 장치 |
| KR100984073B1 (ko) * | 2009-11-30 | 2010-09-28 | 주식회사 피에쓰링크 | 승강장 스크린 도어 시스템의 록킹장치 |
| US8936482B2 (en) * | 2011-11-30 | 2015-01-20 | GM Global Technology Operations LLC | High voltage safety lock sensing—single sensor linear actuator |
| KR101692787B1 (ko) * | 2015-05-12 | 2017-01-05 | 현대중공업 주식회사 | 차단기 |
| KR101572537B1 (ko) * | 2015-06-15 | 2015-11-27 | 주식회사 에이치에스티 | 케미컬탱크롤리와 acqc 유닛간의 자동 체결 시스템 |
| KR101894482B1 (ko) * | 2016-06-17 | 2018-09-03 | 김태형 | 케미컬을 이송하는 자동 청정 접속장치의 자동 삽입 시스템 |
| KR20180002239A (ko) * | 2016-06-29 | 2018-01-08 | 김태형 | 케미컬을 이송하는 자동 청정 접속장치의 커넥터 폐쇄장치 |
-
2018
- 2018-12-14 KR KR1020180162311A patent/KR102005957B1/ko active IP Right Grant
-
2019
- 2019-01-21 WO PCT/KR2019/000814 patent/WO2020122310A1/ko active Application Filing
- 2019-01-21 CN CN201980081420.8A patent/CN113169100B/zh active Active
- 2019-01-21 SG SG11202105251RA patent/SG11202105251RA/en unknown
Also Published As
| Publication number | Publication date |
|---|---|
| WO2020122310A1 (ko) | 2020-06-18 |
| CN113169100B (zh) | 2024-03-29 |
| CN113169100A (zh) | 2021-07-23 |
| KR102005957B1 (ko) | 2019-08-01 |
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