SG11202100982SA - Method for processing chemical liquid - Google Patents

Method for processing chemical liquid

Info

Publication number
SG11202100982SA
SG11202100982SA SG11202100982SA SG11202100982SA SG11202100982SA SG 11202100982S A SG11202100982S A SG 11202100982SA SG 11202100982S A SG11202100982S A SG 11202100982SA SG 11202100982S A SG11202100982S A SG 11202100982SA SG 11202100982S A SG11202100982S A SG 11202100982SA
Authority
SG
Singapore
Prior art keywords
chemical liquid
processing chemical
processing
liquid
chemical
Prior art date
Application number
SG11202100982SA
Inventor
Marcia Cole-Yocom
Bryan Hinzie
Michael Barker
Jack Helzer
Shen-Ping Huang
Pejman Ahmadiannamini
Yuan Chen
Original Assignee
Fujifilm Electronic Materials Usa Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujifilm Electronic Materials Usa Inc filed Critical Fujifilm Electronic Materials Usa Inc
Publication of SG11202100982SA publication Critical patent/SG11202100982SA/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
    • B01D61/02—Reverse osmosis; Hyperfiltration ; Nanofiltration
    • B01D61/027—Nanofiltration
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D15/00—Separating processes involving the treatment of liquids with solid sorbents; Apparatus therefor
    • B01D15/08—Selective adsorption, e.g. chromatography
    • B01D15/10—Selective adsorption, e.g. chromatography characterised by constructional or operational features
    • B01D15/20—Selective adsorption, e.g. chromatography characterised by constructional or operational features relating to the conditioning of the sorbent material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D15/00—Separating processes involving the treatment of liquids with solid sorbents; Apparatus therefor
    • B01D15/08—Selective adsorption, e.g. chromatography
    • B01D15/26—Selective adsorption, e.g. chromatography characterised by the separation mechanism
    • B01D15/36—Selective adsorption, e.g. chromatography characterised by the separation mechanism involving ionic interaction
    • B01D15/361—Ion-exchange
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D65/00—Accessories or auxiliary operations, in general, for separation processes or apparatus using semi-permeable membranes
    • B01D65/02—Membrane cleaning or sterilisation ; Membrane regeneration
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/06—Organic material
    • B01D71/30—Polyalkenyl halides
    • B01D71/32—Polyalkenyl halides containing fluorine atoms
    • B01D71/36—Polytetrafluoroethene
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D15/00—Separating processes involving the treatment of liquids with solid sorbents; Apparatus therefor
    • B01D15/08—Selective adsorption, e.g. chromatography
    • B01D15/10—Selective adsorption, e.g. chromatography characterised by constructional or operational features
    • B01D15/18—Selective adsorption, e.g. chromatography characterised by constructional or operational features relating to flow patterns
    • B01D15/1864—Selective adsorption, e.g. chromatography characterised by constructional or operational features relating to flow patterns using two or more columns
    • B01D15/1871—Selective adsorption, e.g. chromatography characterised by constructional or operational features relating to flow patterns using two or more columns placed in series
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2311/00—Details relating to membrane separation process operations and control
    • B01D2311/02—Specific process operations before starting the membrane separation process
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2311/00—Details relating to membrane separation process operations and control
    • B01D2311/26—Further operations combined with membrane separation processes
    • B01D2311/2623—Ion-Exchange
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2311/00—Details relating to membrane separation process operations and control
    • B01D2311/26—Further operations combined with membrane separation processes
    • B01D2311/2626—Absorption or adsorption
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2321/00—Details relating to membrane cleaning, regeneration, sterilization or to the prevention of fouling
    • B01D2321/16—Use of chemical agents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2325/00—Details relating to properties of membranes
    • B01D2325/02—Details relating to pores or porosity of the membranes
    • B01D2325/0283—Pore size
    • B01D2325/02832—1-10 nm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2325/00—Details relating to properties of membranes
    • B01D2325/02—Details relating to pores or porosity of the membranes
    • B01D2325/0283—Pore size
    • B01D2325/02833—Pore size more than 10 and up to 100 nm

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Water Supply & Treatment (AREA)
  • Nanotechnology (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
SG11202100982SA 2018-08-21 2019-08-21 Method for processing chemical liquid SG11202100982SA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201862720890P 2018-08-21 2018-08-21
PCT/US2019/047367 WO2020041388A1 (en) 2018-08-21 2019-08-21 Method for processing chemical liquid

Publications (1)

Publication Number Publication Date
SG11202100982SA true SG11202100982SA (en) 2021-02-25

Family

ID=69587012

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11202100982SA SG11202100982SA (en) 2018-08-21 2019-08-21 Method for processing chemical liquid

Country Status (9)

Country Link
US (1) US11541358B2 (en)
EP (1) EP3840876A4 (en)
JP (1) JP2021533986A (en)
KR (1) KR20210044786A (en)
CN (1) CN112638517A (en)
IL (1) IL280551A (en)
SG (1) SG11202100982SA (en)
TW (1) TW202019551A (en)
WO (1) WO2020041388A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023223803A1 (en) * 2022-05-19 2023-11-23 信越化学工業株式会社 Method for producing aqueous solution of purified aminosilanol compound and aminosiloxane compound, and composition for etching

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4778532A (en) * 1985-06-24 1988-10-18 Cfm Technologies Limited Partnership Process and apparatus for treating wafers with process fluids
US5733441A (en) * 1996-06-27 1998-03-31 United Microelectronics Corporation Pre-wet system for a filter
JP3673393B2 (en) * 1998-03-09 2005-07-20 オルガノ株式会社 Regeneration method of ion adsorption membrane for ultrapure water production and ultrapure water production method
JP2001353424A (en) * 2000-06-14 2001-12-25 Fuji Photo Film Co Ltd Filtration method of wafer washing liquid for semiconductor integrated circuit
JP3761457B2 (en) * 2001-12-04 2006-03-29 Ｎｅｃエレクトロニクス株式会社 Chemical processing equipment for semiconductor substrates
JP2004330056A (en) * 2003-05-07 2004-11-25 Ebara Corp Filter cartridge for electronic element substrate surface treatment liquid
SG189051A1 (en) * 2010-09-27 2013-05-31 Tama Chemicals Co Ltd Refining method for alkaline treatment fluid for semiconductor substrate and refining device
JP5762860B2 (en) * 2011-07-15 2015-08-12 オルガノ株式会社 Method and apparatus for purifying alcohol
KR101715811B1 (en) * 2013-11-12 2017-03-13 주식회사 아모그린텍 Ion exchange membrane
US9360758B2 (en) * 2013-12-06 2016-06-07 Taiwan Semiconductor Manufacturing Company, Ltd. Semiconductor device process filter and method
JP7084683B2 (en) * 2015-02-23 2022-06-15 東京応化工業株式会社 Liquid purification method, chemical or cleaning liquid manufacturing method, filter media, and filter device
TWI822658B (en) * 2016-09-02 2023-11-21 日商富士軟片股份有限公司 Method for purifying organic solvent and purification device of organic solvent

Also Published As

Publication number Publication date
IL280551A (en) 2021-03-25
US11541358B2 (en) 2023-01-03
EP3840876A1 (en) 2021-06-30
KR20210044786A (en) 2021-04-23
TW202019551A (en) 2020-06-01
CN112638517A (en) 2021-04-09
JP2021533986A (en) 2021-12-09
US20200061544A1 (en) 2020-02-27
WO2020041388A1 (en) 2020-02-27
EP3840876A4 (en) 2022-06-08

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