SG11202009969VA - Inline particle sensor - Google Patents

Inline particle sensor

Info

Publication number
SG11202009969VA
SG11202009969VA SG11202009969VA SG11202009969VA SG11202009969VA SG 11202009969V A SG11202009969V A SG 11202009969VA SG 11202009969V A SG11202009969V A SG 11202009969VA SG 11202009969V A SG11202009969V A SG 11202009969VA SG 11202009969V A SG11202009969V A SG 11202009969VA
Authority
SG
Singapore
Prior art keywords
particle sensor
inline particle
inline
sensor
particle
Prior art date
Application number
SG11202009969VA
Inventor
Felix J Schuda
Ferris J Chen
Original Assignee
Cyberoptics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cyberoptics Corp filed Critical Cyberoptics Corp
Publication of SG11202009969VA publication Critical patent/SG11202009969VA/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/02—Investigating particle size or size distribution
    • G01N15/0205—Investigating particle size or size distribution by optical means
    • G01N15/0211—Investigating a scatter or diffraction pattern
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/22—Devices for withdrawing samples in the gaseous state
    • G01N1/2247—Sampling from a flowing stream of gas
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10—Investigating individual particles
    • G01N15/14—Optical investigation techniques, e.g. flow cytometry
    • G01N15/1404—Handling flow, e.g. hydrodynamic focusing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10—Investigating individual particles
    • G01N15/14—Optical investigation techniques, e.g. flow cytometry
    • G01N15/1434—Optical arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10—Investigating individual particles
    • G01N15/14—Optical investigation techniques, e.g. flow cytometry
    • G01N15/1456—Optical investigation techniques, e.g. flow cytometry without spatial resolution of the texture or inner structure of the particle, e.g. processing of pulse signals
    • G01N15/1459—Optical investigation techniques, e.g. flow cytometry without spatial resolution of the texture or inner structure of the particle, e.g. processing of pulse signals the analysis being performed on a sample stream
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/33—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using ultraviolet light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N2015/0042—Investigating dispersion of solids
    • G01N2015/0046—Investigating dispersion of solids in gas, e.g. smoke
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/02—Investigating particle size or size distribution
    • G01N15/0205—Investigating particle size or size distribution by optical means
    • G01N2015/0238—Single particle scatter
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10—Investigating individual particles
    • G01N15/14—Optical investigation techniques, e.g. flow cytometry
    • G01N2015/1486—Counting the particles

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Dispersion Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Biomedical Technology (AREA)
  • Molecular Biology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
SG11202009969VA 2018-04-11 2019-04-10 Inline particle sensor SG11202009969VA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201862655903P 2018-04-11 2018-04-11
PCT/US2019/026773 WO2019199958A1 (en) 2018-04-11 2019-04-10 Inline particle sensor

Publications (1)

Publication Number Publication Date
SG11202009969VA true SG11202009969VA (en) 2020-11-27

Family

ID=68161489

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11202009969VA SG11202009969VA (en) 2018-04-11 2019-04-10 Inline particle sensor

Country Status (8)

Country Link
US (1) US10801945B2 (en)
JP (1) JP7455756B2 (en)
KR (2) KR102499008B1 (en)
CN (1) CN111989559B (en)
IL (1) IL277849B2 (en)
SG (1) SG11202009969VA (en)
TW (1) TWI734094B (en)
WO (1) WO2019199958A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3068396B1 (en) * 2017-06-30 2021-11-26 Continental Automotive France DIGITAL TYPE HIGH PRESSURE PUMP CONTROL PROCESS
US11733144B2 (en) 2020-12-14 2023-08-22 Caterpillar Inc. Convertible housing assembly for a particle sensor

Family Cites Families (37)

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US4528451A (en) * 1982-10-19 1985-07-09 Varian Associates, Inc. Gap control system for localized vacuum processing
US5041361A (en) * 1988-08-08 1991-08-20 Midwest Research Institute Oxygen ion-beam microlithography
US5083865A (en) * 1990-05-11 1992-01-28 Applied Materials, Inc. Particle monitor system and method
CA2035703A1 (en) * 1991-01-22 1992-07-23 Pedro Lilienfeld System and method for determining and printing airborne particle concentration
US5262841A (en) * 1991-10-16 1993-11-16 Tsi Incorporated Vacuum particle detector
US5271264A (en) * 1991-11-27 1993-12-21 Applied Materials, Inc. Method of in-situ particle monitoring in vacuum systems
US5255089A (en) * 1992-03-26 1993-10-19 International Business Machines Corporation Portable particle detector assembly
US5426501A (en) * 1993-01-06 1995-06-20 Laser Sensor Technology, Inc. Apparatus and method for particle analysis
US5459569A (en) * 1993-04-21 1995-10-17 Particle Measuring Systems, Inc. Nonintrusive modular particle detecting device
US5436465A (en) * 1993-05-13 1995-07-25 High Yield Technology, Inc. Modular particle monitor for vacuum process equipment
US5501113A (en) * 1993-11-08 1996-03-26 Pacific Scientific Company Particle measuring system with sonically measured flow rate
US6125789A (en) * 1998-01-30 2000-10-03 Applied Materials, Inc. Increasing the sensitivity of an in-situ particle monitor
JPH11304688A (en) * 1998-04-16 1999-11-05 Tokyo Electron Ltd Gas exhaust system for particle monitor
US7530877B1 (en) * 1999-06-03 2009-05-12 Micron Technology, Inc. Semiconductor processor systems, a system configured to provide a semiconductor workpiece process fluid
US7515264B2 (en) * 1999-06-15 2009-04-07 Tokyo Electron Limited Particle-measuring system and particle-measuring method
JP4320924B2 (en) * 1999-06-15 2009-08-26 東京エレクトロン株式会社 Particle measuring device and processing device
JP2002057143A (en) * 2000-08-07 2002-02-22 Hitachi Ltd Floating foreign matter detector
US7024950B2 (en) * 2000-11-30 2006-04-11 Texas Instruments Incorporated Method for intelligent sampling of particulates in exhaust lines
CA2439242C (en) * 2003-09-03 2008-01-29 Photon Control Inc. Optical flow meter for measuring gases and liquids in pipelines
US7002682B2 (en) * 2004-02-13 2006-02-21 Hach Ultra Analytics, Inc. Method and apparatus for operating a laser in an extinction-type optical particle detector
CN101189502A (en) * 2005-06-06 2008-05-28 粒子监测系统有限公司 Particle counter with improved image sensor array
JP5142175B2 (en) 2005-07-07 2013-02-13 日本化薬株式会社 Epoxy resin, photosensitive resin and photosensitive resin composition
US7667839B2 (en) * 2006-03-30 2010-02-23 Particle Measuring Systems, Inc. Aerosol particle sensor with axial fan
JP2008232756A (en) * 2007-03-19 2008-10-02 Shimadzu Corp Particle size distribution measuring device
US7948621B2 (en) * 2007-06-28 2011-05-24 Perry Equipment Corporation Systems and methods for remote monitoring of contaminants in fluids
US20100201984A1 (en) * 2009-02-11 2010-08-12 Cyberoptics Semiconductor, Inc. In-line high pressure particle sensing system
US7973923B2 (en) * 2009-04-27 2011-07-05 Endress+Hauser Conducta Inc. Multi-port inline flow cell for use in monitoring multiple parameters in a sanitary process line
KR101159762B1 (en) * 2010-01-06 2012-06-28 (주)에이치시티 Paticle Measurement Apparatus
CN101852712B (en) * 2010-05-11 2012-11-14 北京交通大学 Device and method for detecting optical detector working point of particle detector
JP5537487B2 (en) * 2011-04-12 2014-07-02 日本特殊陶業株式会社 Particle detection system
US20150063982A1 (en) * 2013-09-01 2015-03-05 Particles Plus, Inc. Multi-stage inflow turbine pump for particle counters
JP6177438B2 (en) 2013-09-25 2017-08-09 ハリバートン エナジー サヴィシーズ インコーポレイテッド System and method for real time measurement of gas content in drilling fluid
US9618450B2 (en) * 2013-09-27 2017-04-11 Ecolab USA, Inc. Multi-channel fluorometric sensor and method of using same
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Also Published As

Publication number Publication date
JP2021521433A (en) 2021-08-26
US10801945B2 (en) 2020-10-13
KR102597198B1 (en) 2023-11-02
CN111989559A (en) 2020-11-24
JP7455756B2 (en) 2024-03-26
IL277849A (en) 2020-11-30
US20190317008A1 (en) 2019-10-17
CN111989559B (en) 2024-07-02
WO2019199958A1 (en) 2019-10-17
TWI734094B (en) 2021-07-21
TW202005212A (en) 2020-01-16
KR102499008B1 (en) 2023-02-10
KR20220137170A (en) 2022-10-11
IL277849B1 (en) 2023-12-01
KR20210000717A (en) 2021-01-05
IL277849B2 (en) 2024-04-01
EP3775837A1 (en) 2021-02-17

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