SG11202006924QA - Powder for coating an etch chamber - Google Patents

Powder for coating an etch chamber

Info

Publication number
SG11202006924QA
SG11202006924QA SG11202006924QA SG11202006924QA SG11202006924QA SG 11202006924Q A SG11202006924Q A SG 11202006924QA SG 11202006924Q A SG11202006924Q A SG 11202006924QA SG 11202006924Q A SG11202006924Q A SG 11202006924QA SG 11202006924Q A SG11202006924Q A SG 11202006924QA
Authority
SG
Singapore
Prior art keywords
powder
coating
etch chamber
etch
chamber
Prior art date
Application number
SG11202006924QA
Inventor
Alain Allimant
Howard Wallar
Original Assignee
Saint Gobain Ct Recherches
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Saint Gobain Ct Recherches filed Critical Saint Gobain Ct Recherches
Publication of SG11202006924QA publication Critical patent/SG11202006924QA/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
    • C01G27/00—Compounds of hafnium
    • C01G27/02—Oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
    • C23C4/10—Oxides, borides, carbides, nitrides or silicides; Mixtures thereof
    • C23C4/11—Oxides
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01F—COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM, CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THE RARE-EARTH METALS
    • C01F17/00—Compounds of rare earth metals
    • C01F17/20—Compounds containing only rare earth metals as the metal element
    • C01F17/206—Compounds containing only rare earth metals as the metal element oxide or hydroxide being the only anion
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01F—COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM, CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THE RARE-EARTH METALS
    • C01F17/00—Compounds of rare earth metals
    • C01F17/30—Compounds containing rare earth metals and at least one element other than a rare earth metal, oxygen or hydrogen, e.g. La4S3Br6
    • C01F17/32—Compounds containing rare earth metals and at least one element other than a rare earth metal, oxygen or hydrogen, e.g. La4S3Br6 oxide or hydroxide being the only anion, e.g. NaCeO2 or MgxCayEuO
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B1/00—Preparing the batches
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/10—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on aluminium oxide
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/48—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/50—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on rare-earth compounds
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/50—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on rare-earth compounds
    • C04B35/505—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on rare-earth compounds based on yttrium oxide
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
    • C23C4/10—Oxides, borides, carbides, nitrides or silicides; Mixtures thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32458—Vessel
    • H01J37/32477—Vessel characterised by the means for protecting vessels or internal parts, e.g. coatings
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2002/00—Crystal-structural characteristics
    • C01P2002/30—Three-dimensional structures
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2002/00—Crystal-structural characteristics
    • C01P2002/30—Three-dimensional structures
    • C01P2002/34—Three-dimensional structures perovskite-type (ABO3)
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/50—Agglomerated particles
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/51—Particles with a specific particle size distribution
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/51—Particles with a specific particle size distribution
    • C01P2004/52—Particles with a specific particle size distribution highly monodisperse size distribution
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/54—Particles characterised by their aspect ratio, i.e. the ratio of sizes in the longest to the shortest dimension
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/60—Particles characterised by their size
    • C01P2004/61—Micrometer sized, i.e. from 1-100 micrometer
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/60—Particles characterised by their size
    • C01P2004/62—Submicrometer sized, i.e. from 0.1-1 micrometer
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2006/00—Physical properties of inorganic compounds
    • C01P2006/12—Surface area
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2006/00—Physical properties of inorganic compounds
    • C01P2006/14—Pore volume
SG11202006924QA 2018-01-31 2019-01-31 Powder for coating an etch chamber SG11202006924QA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1850821A FR3077287B1 (en) 2018-01-31 2018-01-31 POWDER FOR ENGRAVING CHAMBER COATING
PCT/EP2019/052438 WO2019149854A1 (en) 2018-01-31 2019-01-31 Powder for coating an etch chamber

Publications (1)

Publication Number Publication Date
SG11202006924QA true SG11202006924QA (en) 2020-08-28

Family

ID=62597595

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11202006924QA SG11202006924QA (en) 2018-01-31 2019-01-31 Powder for coating an etch chamber

Country Status (9)

Country Link
US (1) US11731883B2 (en)
EP (1) EP3746406A1 (en)
JP (2) JP2021513001A (en)
KR (2) KR20200122310A (en)
CN (1) CN111670164B (en)
FR (1) FR3077287B1 (en)
MX (1) MX2020007729A (en)
SG (1) SG11202006924QA (en)
WO (1) WO2019149854A1 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3077286B1 (en) * 2018-01-31 2022-08-12 Saint Gobain Ct Recherches ENVIRONMENTAL BARRIER
CN112501541A (en) * 2020-11-12 2021-03-16 苏州艾美科新材料技术有限公司 Composite nano material and corresponding novel nano coating
KR102421398B1 (en) * 2021-11-01 2022-07-15 (주)코미코 Manufacturing method for high-density YF3 coating layer by HVOF and high-density YF3 coating layer manufactured through the same
CN113173779B (en) * 2021-04-29 2023-07-21 江西工陶院精细陶瓷有限公司 Alumina filler particles, preparation method thereof and preparation method of alumina filler balls
KR102416127B1 (en) * 2021-11-01 2022-07-05 (주)코미코 Manufacturing method for spherical YOF-based powder and spherical YOF-based powder manufactured through the same and YOF-based coating using the same
US20230407434A1 (en) * 2022-06-15 2023-12-21 Shine Technologies, Llc Methods and Systems for the Reduction of Rare Earth Metal Oxides

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE60127035T2 (en) * 2000-06-29 2007-11-08 Shin-Etsu Chemical Co., Ltd. Thermal spray coating process and rare earth oxide powders therefor
US6916534B2 (en) 2001-03-08 2005-07-12 Shin-Etsu Chemical Co., Ltd. Thermal spray spherical particles, and sprayed components
JP4231990B2 (en) * 2001-03-21 2009-03-04 信越化学工業株式会社 Rare earth oxide spray particles and method for producing the same, thermal spray member and corrosion resistant member
JP4560387B2 (en) * 2004-11-30 2010-10-13 株式会社フジミインコーポレーテッド Thermal spray powder, thermal spraying method and thermal spray coating
TWI262110B (en) * 2005-03-04 2006-09-21 Foxconn Tech Co Ltd Method of making porous structure
GB2430671A (en) 2005-09-30 2007-04-04 Fujimi Inc Thermal spray powder including yttria
DE602006007780D1 (en) * 2005-10-21 2009-08-27 Sulzer Metco Us Inc Process for the production of highly pure flowable metal oxide powder by plasma melting
JP2008115407A (en) 2006-10-31 2008-05-22 Fujimi Inc Thermal-spraying powder and method for depositing sprayed coating
FR2943209B1 (en) 2009-03-12 2013-03-08 Saint Gobain Ct Recherches PLASMA TORCH WITH LATERAL INJECTOR
DE102009026655B3 (en) * 2009-06-03 2011-06-30 Linde Aktiengesellschaft, 80331 Method of making a metal matrix composite, metal matrix composite and its use
JP5417248B2 (en) * 2010-04-15 2014-02-12 新日鉄住金マテリアルズ株式会社 Method for producing spherical alumina powder
KR101808859B1 (en) * 2010-04-15 2017-12-13 신닛테츠스미킹 마테리알즈 가부시키가이샤 Method for producing spherical alumina powder
US20130288037A1 (en) * 2012-04-27 2013-10-31 Applied Materials, Inc. Plasma spray coating process enhancement for critical chamber components
FR2998561B1 (en) * 2012-11-29 2014-11-21 Saint Gobain Ct Recherches HIGH PURITY POWDER FOR THERMAL PROJECTION
FR2999019A1 (en) * 2012-11-30 2014-06-06 Saint Gobain Ct Recherches USE OF A SILICA-BASED POWDER FOR THE MANUFACTURE OF A LITHIUM-ION BATTERY SEPARATION ELEMENT
JP2016065302A (en) * 2014-09-17 2016-04-28 東京エレクトロン株式会社 Component for plasma treatment apparatus and manufacturing method of the component

Also Published As

Publication number Publication date
KR20240036112A (en) 2024-03-19
JP2021513001A (en) 2021-05-20
JP2024054107A (en) 2024-04-16
US20210115548A1 (en) 2021-04-22
MX2020007729A (en) 2021-01-15
FR3077287A1 (en) 2019-08-02
FR3077287B1 (en) 2023-09-22
WO2019149854A1 (en) 2019-08-08
CN111670164B (en) 2023-03-10
KR20200122310A (en) 2020-10-27
EP3746406A1 (en) 2020-12-09
CN111670164A (en) 2020-09-15
US11731883B2 (en) 2023-08-22

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