GB201905620D0 - Plasma etcher - Google Patents

Plasma etcher

Info

Publication number
GB201905620D0
GB201905620D0 GBGB1905620.9A GB201905620A GB201905620D0 GB 201905620 D0 GB201905620 D0 GB 201905620D0 GB 201905620 A GB201905620 A GB 201905620A GB 201905620 D0 GB201905620 D0 GB 201905620D0
Authority
GB
United Kingdom
Prior art keywords
plasma etcher
etcher
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GBGB1905620.9A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Gencoa Ltd
Original Assignee
Gencoa Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gencoa Ltd filed Critical Gencoa Ltd
Priority to GBGB1905620.9A priority Critical patent/GB201905620D0/en
Publication of GB201905620D0 publication Critical patent/GB201905620D0/en
Ceased legal-status Critical Current

Links

GBGB1905620.9A 2019-04-22 2019-04-22 Plasma etcher Ceased GB201905620D0 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GBGB1905620.9A GB201905620D0 (en) 2019-04-22 2019-04-22 Plasma etcher

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB1905620.9A GB201905620D0 (en) 2019-04-22 2019-04-22 Plasma etcher

Publications (1)

Publication Number Publication Date
GB201905620D0 true GB201905620D0 (en) 2019-06-05

Family

ID=66810376

Family Applications (1)

Application Number Title Priority Date Filing Date
GBGB1905620.9A Ceased GB201905620D0 (en) 2019-04-22 2019-04-22 Plasma etcher

Country Status (1)

Country Link
GB (1) GB201905620D0 (en)

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)