GB201905620D0 - Plasma etcher - Google Patents
Plasma etcherInfo
- Publication number
- GB201905620D0 GB201905620D0 GBGB1905620.9A GB201905620A GB201905620D0 GB 201905620 D0 GB201905620 D0 GB 201905620D0 GB 201905620 A GB201905620 A GB 201905620A GB 201905620 D0 GB201905620 D0 GB 201905620D0
- Authority
- GB
- United Kingdom
- Prior art keywords
- plasma etcher
- etcher
- plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB1905620.9A GB201905620D0 (en) | 2019-04-22 | 2019-04-22 | Plasma etcher |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB1905620.9A GB201905620D0 (en) | 2019-04-22 | 2019-04-22 | Plasma etcher |
Publications (1)
Publication Number | Publication Date |
---|---|
GB201905620D0 true GB201905620D0 (en) | 2019-06-05 |
Family
ID=66810376
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GBGB1905620.9A Ceased GB201905620D0 (en) | 2019-04-22 | 2019-04-22 | Plasma etcher |
Country Status (1)
Country | Link |
---|---|
GB (1) | GB201905620D0 (en) |
-
2019
- 2019-04-22 GB GBGB1905620.9A patent/GB201905620D0/en not_active Ceased
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
AT | Applications terminated before publication under section 16(1) |