SG11202006652PA - Semiconductor equipment - Google Patents

Semiconductor equipment

Info

Publication number
SG11202006652PA
SG11202006652PA SG11202006652PA SG11202006652PA SG11202006652PA SG 11202006652P A SG11202006652P A SG 11202006652PA SG 11202006652P A SG11202006652P A SG 11202006652PA SG 11202006652P A SG11202006652P A SG 11202006652PA SG 11202006652P A SG11202006652P A SG 11202006652PA
Authority
SG
Singapore
Prior art keywords
semiconductor equipment
semiconductor
equipment
Prior art date
Application number
SG11202006652PA
Inventor
Leichao Zhao
Chunlei Li
Hong Ji
Haifeng Qin
Fang Zhang
Yunfeng Lan
Yongfei Wang
Hongbiao Wang
Lihui Wen
Henan Zhang
Kuanmao Wang
Jinguo Zheng
Yujie Yang
Original Assignee
Beijing Naura Microelectronics Equipment Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from CN201810043867.3A external-priority patent/CN108461417A/en
Priority claimed from CN201820074885.3U external-priority patent/CN207818535U/en
Application filed by Beijing Naura Microelectronics Equipment Co Ltd filed Critical Beijing Naura Microelectronics Equipment Co Ltd
Publication of SG11202006652PA publication Critical patent/SG11202006652PA/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
SG11202006652PA 2018-01-17 2018-11-08 Semiconductor equipment SG11202006652PA (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CN201810043867.3A CN108461417A (en) 2018-01-17 2018-01-17 Semiconductor equipment
CN201820074885.3U CN207818535U (en) 2018-01-17 2018-01-17 Semiconductor equipment
PCT/CN2018/114600 WO2019140989A1 (en) 2018-01-17 2018-11-08 Semiconductor equipment

Publications (1)

Publication Number Publication Date
SG11202006652PA true SG11202006652PA (en) 2020-08-28

Family

ID=67301264

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11202006652PA SG11202006652PA (en) 2018-01-17 2018-11-08 Semiconductor equipment

Country Status (2)

Country Link
SG (1) SG11202006652PA (en)
WO (1) WO2019140989A1 (en)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7566900B2 (en) * 2005-08-31 2009-07-28 Applied Materials, Inc. Integrated metrology tools for monitoring and controlling large area substrate processing chambers
US20100162955A1 (en) * 2008-12-31 2010-07-01 Lawrence Chung-Lai Lei Systems and methods for substrate processing
US20110097878A1 (en) * 2009-10-28 2011-04-28 Applied Materials, Inc. Chamber for pecvd
CN207818535U (en) * 2018-01-17 2018-09-04 北京北方华创微电子装备有限公司 Semiconductor equipment
CN108461417A (en) * 2018-01-17 2018-08-28 北京北方华创微电子装备有限公司 Semiconductor equipment
CN108281414A (en) * 2018-01-17 2018-07-13 北京北方华创微电子装备有限公司 A kind of capacitance and preparation method thereof, semiconductor equipment

Also Published As

Publication number Publication date
WO2019140989A1 (en) 2019-07-25

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