SG11201806899XA - Conveyance system - Google Patents

Conveyance system

Info

Publication number
SG11201806899XA
SG11201806899XA SG11201806899XA SG11201806899XA SG11201806899XA SG 11201806899X A SG11201806899X A SG 11201806899XA SG 11201806899X A SG11201806899X A SG 11201806899XA SG 11201806899X A SG11201806899X A SG 11201806899XA SG 11201806899X A SG11201806899X A SG 11201806899XA
Authority
SG
Singapore
Prior art keywords
rails
travel
stop position
transfer
transfer part
Prior art date
Application number
SG11201806899XA
Inventor
Takashi Suzuki
Original Assignee
Murata Machinery Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Machinery Ltd filed Critical Murata Machinery Ltd
Publication of SG11201806899XA publication Critical patent/SG11201806899XA/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J5/00—Manipulators mounted on wheels or on carriages
    • B25J5/007—Manipulators mounted on wheels or on carriages mounted on wheels
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67727—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/104—Programme-controlled manipulators characterised by positioning means for manipulator elements with cables, chains or ribbons
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0457—Storage devices mechanical with suspended load carriers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0464—Storage devices mechanical with access from above
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67736—Loading to or unloading from a conveyor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0478—Storage devices mechanical for matrix-arrangements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0297—Wafer cassette
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733—Overhead conveying

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Robotics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Non-Mechanical Conveyors (AREA)
  • Warehouses Or Storage Devices (AREA)

Abstract

FP0914-00SG-MRT 35 A conveyance system 100 includes: a travel rail 4 having a plurality of first rails 9 and a plurality of second rails 11, the first rails 9 and the second rails 11 being disposed in a grid pattern on a same plane; and a plurality of vehicles 8 each having a travel part 24 configured to 5 travel on the travel rail 4 in the first direction and the second direction and a transfer part 26 including a holder 46A configured to hold the carrier 50 and an elevator 45 configured to elevate and lower the holder 46A, in which the travel rail 4 is disposed such that each of the vehicles 8 is accessible to a first stop position in which the transfer part 26 is 10 arranged immediately above each of the transfer ports of a first processing device group performing processing of a certain process and such that the vehicle 8 is accessible to a second stop position in which the transfer part 26 is arranged immediately above each of the transfer ports of a second processing device group performing processing of a 15 process different from the certain process from the first stop position.
SG11201806899XA 2016-03-03 2017-01-24 Conveyance system SG11201806899XA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016041532 2016-03-03
PCT/JP2017/002313 WO2017150005A1 (en) 2016-03-03 2017-01-24 Conveyance system

Publications (1)

Publication Number Publication Date
SG11201806899XA true SG11201806899XA (en) 2018-09-27

Family

ID=59742859

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201806899XA SG11201806899XA (en) 2016-03-03 2017-01-24 Conveyance system

Country Status (8)

Country Link
US (1) US10497594B2 (en)
EP (1) EP3424844A4 (en)
JP (1) JP7054379B2 (en)
KR (2) KR20180121582A (en)
CN (1) CN108698757B (en)
SG (1) SG11201806899XA (en)
TW (1) TWI729078B (en)
WO (1) WO2017150005A1 (en)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB201509921D0 (en) * 2015-06-08 2015-07-22 Ocado Innovation Ltd Object storage, handling and retrieving system and method
US11476141B2 (en) 2016-08-26 2022-10-18 Murata Machinery, Ltd. Rail-guided trolley system, and rail-guided trolley
NO346327B1 (en) 2017-05-16 2022-06-07 Autostore Tech As Automated storage and retrieval system
EP4371908A2 (en) * 2017-05-16 2024-05-22 Autostore Technology AS Automated storage and retrieval system
NO20180586A1 (en) * 2018-04-25 2019-10-28 Autostore Tech As Charging system for container handling vehicles and method of charging a power supply
EP3431418B8 (en) * 2017-07-20 2020-04-01 Mikhail Voloskov Shuttle for use in a three-dimensional warehouse system
JP6906754B2 (en) * 2017-10-31 2021-07-21 村田機械株式会社 Transport system
NO345129B1 (en) * 2017-11-23 2020-10-12 Autostore Tech As Automated storage and retrieval system and a method of operating the same.
CN107792593B (en) * 2017-12-03 2023-12-22 金胜昔 Stereoscopic warehouse plane storage and transportation unit with cargo space capable of moving in four directions
NO20180409A1 (en) * 2018-03-23 2019-09-24 Autostore Tech As Automated storage and retrieval system comprising container identification means and methods of identyfying a container or a vehicle
GB201804867D0 (en) * 2018-03-27 2018-05-09 Ocado Innovation Ltd A transporting device
CN108584264B (en) * 2018-05-03 2020-05-08 华中科技大学无锡研究院 Two-way mutual storage device and system
NO345231B1 (en) * 2018-05-31 2020-11-16 Autostore Tech As An automated storage and retrieval system comprising a storage container lift Assembly and a method thereof.
JP6969512B2 (en) * 2018-07-05 2021-11-24 株式会社ダイフク Goods transport device
US11952213B2 (en) * 2018-11-06 2024-04-09 Murata Machinery, Ltd. Ceiling suspended shelf
NO20181419A1 (en) * 2018-11-06 2020-05-07 Autostore Tech As Container handling vehicle with an open top, and method of handling product items into storage container carried by the vehicle
CN112908191B (en) * 2019-12-04 2023-04-07 深圳蓝普科技有限公司 Automatic maintenance system for positioning device and splicing display device
NO345896B1 (en) * 2020-01-31 2021-10-04 Autostore Tech As System and method for performing measurements while containers are being handled by container handling vehicles
GB202003054D0 (en) * 2020-03-03 2020-04-15 Ocado Innovation Ltd A grid framework structure
US20230399171A1 (en) 2020-11-13 2023-12-14 Murata Machinery, Ltd. Traveling vehicle system
WO2022112166A1 (en) * 2020-11-30 2022-06-02 Autostore Technology AS A remotely operated vehicle for handling a storage container on a rail system of an automated storage and retrieval system
CN113753456A (en) * 2021-01-05 2021-12-07 北京京东乾石科技有限公司 Container storage and taking vehicle, container storage and taking system and container storage and taking method
CN115799139B (en) * 2023-01-17 2023-05-12 苏州桔云科技有限公司 Wafer transmission device with buffer memory function

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NO972004D0 (en) * 1997-04-30 1997-04-30 Hatteland Electronic As Jacob Method for organizing flow of goods for a horizontally layered and deep-stacked inventory with disparate components, as well as transfer equipment for standardized containers for the purpose
JP3731701B2 (en) * 1997-12-26 2006-01-05 株式会社ダイフク Goods storage equipment
JP3761012B2 (en) * 1998-01-09 2006-03-29 株式会社ダイフク Goods storage facility
JPH11214471A (en) * 1998-01-23 1999-08-06 Nec Corp Work conveying method and work processor
US6321138B1 (en) * 2000-09-15 2001-11-20 Woodson Incorporated Storage and retrieval system with automated order make up
JP2007017326A (en) * 2005-07-08 2007-01-25 Siemens Kk Position detection method for highly precisely positioning self-running mobile object and mechanism thereof
JP2007217079A (en) * 2006-02-14 2007-08-30 Asyst Shinko Inc Turntable
JP2009057117A (en) * 2007-08-29 2009-03-19 Sharp Corp Carrying control system, carrying control method, and carrying control program
DE102009017241B4 (en) * 2009-04-09 2016-12-01 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. storage system
JP5429570B2 (en) * 2010-03-08 2014-02-26 株式会社ダイフク Goods transport equipment
JP5229363B2 (en) 2010-11-04 2013-07-03 村田機械株式会社 Transport system and transport method
JP5527619B2 (en) * 2011-11-24 2014-06-18 株式会社ダイフク Ceiling-mounted goods transport equipment
JP5630661B2 (en) * 2011-12-19 2014-11-26 株式会社ダイフク Ceiling-mounted goods transport equipment
HUE054036T2 (en) * 2012-05-11 2021-08-30 Ocado Innovation Ltd Storage systems and methods for retrieving units from a storage system
JP2013237511A (en) * 2012-05-14 2013-11-28 Murata Machinery Ltd Transfer device for cage truck
JP2014190114A (en) * 2013-03-28 2014-10-06 Daifuku Co Ltd Travel path structure of carrying travel body
JP6094331B2 (en) * 2013-03-29 2017-03-15 株式会社ダイフク Goods transport equipment
CN203294644U (en) * 2013-05-17 2013-11-20 昆明欧迈科技有限公司 Intensive bidirectional shuttle vehicle automatic storage and retrieval warehouse logistics device
GB201310784D0 (en) * 2013-06-17 2013-07-31 Ocado Ltd Systems and Methods for Order Processing
GB201314313D0 (en) 2013-08-09 2013-09-25 Ocado Ltd Apparatus for retrieving units from a storage system
GB201404870D0 (en) * 2014-03-18 2014-04-30 Ocado Ltd Robotic service device and handling method
JP6160711B2 (en) 2014-01-07 2017-07-12 村田機械株式会社 Transfer device and control method of transfer device
US9415934B2 (en) * 2014-05-14 2016-08-16 Murata Machinery, Ltd. Transport system and transport method
GB201409883D0 (en) * 2014-06-03 2014-07-16 Ocado Ltd Methods, systems, and apparatus for controlling movement of transporting devices
WO2016029205A1 (en) 2014-08-22 2016-02-25 Bec Companies, Inc. Overhead guide track systems for automated material handling
EP3192751B1 (en) 2014-09-10 2021-06-16 Murata Machinery, Ltd. Temporary storage system, conveyance system using same, and temporary storage method
CN105059811B (en) * 2015-07-27 2017-12-26 南京航空航天大学 A kind of warehousing system and its control method

Also Published As

Publication number Publication date
US10497594B2 (en) 2019-12-03
JPWO2017150005A1 (en) 2018-12-06
WO2017150005A1 (en) 2017-09-08
EP3424844A1 (en) 2019-01-09
EP3424844A4 (en) 2019-10-30
TW201732991A (en) 2017-09-16
US20190019707A1 (en) 2019-01-17
TWI729078B (en) 2021-06-01
KR20200096709A (en) 2020-08-12
CN108698757B (en) 2020-11-24
KR20180121582A (en) 2018-11-07
JP7054379B2 (en) 2022-04-13
KR102165426B1 (en) 2020-10-14
CN108698757A (en) 2018-10-23

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