SG11201805604PA - Ozone supply device and ozone supply method - Google Patents
Ozone supply device and ozone supply methodInfo
- Publication number
- SG11201805604PA SG11201805604PA SG11201805604PA SG11201805604PA SG11201805604PA SG 11201805604P A SG11201805604P A SG 11201805604PA SG 11201805604P A SG11201805604P A SG 11201805604PA SG 11201805604P A SG11201805604P A SG 11201805604PA SG 11201805604P A SG11201805604P A SG 11201805604PA
- Authority
- SG
- Singapore
- Prior art keywords
- ozone supply
- adsorption tower
- ozonized gas
- adsorbent
- unit
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
- C01B13/10—Preparation of ozone
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
- B01D53/0454—Controlling adsorption
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
- B01D53/047—Pressure swing adsorption
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
- B01D2253/10—Inorganic adsorbents
- B01D2253/106—Silica or silicates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2256/00—Main component in the product gas stream after treatment
- B01D2256/14—Ozone
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2259/00—Type of treatment
- B01D2259/40—Further details for adsorption processes and devices
- B01D2259/40007—Controlling pressure or temperature swing adsorption
- B01D2259/40009—Controlling pressure or temperature swing adsorption using sensors or gas analysers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2259/00—Type of treatment
- B01D2259/45—Gas separation or purification devices adapted for specific applications
- B01D2259/4525—Gas separation or purification devices adapted for specific applications for storage and dispensing systems
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Analytical Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Inorganic Chemistry (AREA)
- Oxygen, Ozone, And Oxides In General (AREA)
- Separation Of Gases By Adsorption (AREA)
Abstract
6060 60 / 60 6060 60 This ozone supply device includes an ozone generator (2), an adsorption tower (3), a standby unit (7), a pressure reducing device (8), an ozone supply unit (9), a low-temperature coolant circulator (5), and a control unit 5 (10) which causes a generated ozonized gas to be adsorbed to a cooled adsorbent (4) and desorbs the ozonized gas adsorbed to the adsorbent (4), thereby concentrating the ozonized gas, wherein the control unit (10) performs control so that the pressure in the adsorption tower (3) in a standby state where 10 the ozonized gas desorbed from the adsorbent (4) in the adsorption tower (3) is caused to stand by in the standby unit (7) becomes lower than the pressure in the adsorption tower (3) in the adsorption.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016013893 | 2016-01-28 | ||
PCT/JP2016/083678 WO2017130523A1 (en) | 2016-01-28 | 2016-11-14 | Ozone supply device and ozone supply method |
Publications (1)
Publication Number | Publication Date |
---|---|
SG11201805604PA true SG11201805604PA (en) | 2018-08-30 |
Family
ID=59398013
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG11201805604PA SG11201805604PA (en) | 2016-01-28 | 2016-11-14 | Ozone supply device and ozone supply method |
Country Status (5)
Country | Link |
---|---|
US (1) | US20190092637A1 (en) |
JP (1) | JP6184645B1 (en) |
CN (1) | CN108473306B (en) |
SG (1) | SG11201805604PA (en) |
WO (1) | WO2017130523A1 (en) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6632463B2 (en) * | 2016-04-28 | 2020-01-22 | 岩谷産業株式会社 | Ozone gas concentration method and ozone gas concentration device |
JP6814971B2 (en) * | 2017-08-28 | 2021-01-20 | パナソニックIpマネジメント株式会社 | Concentration estimation method |
JP6607337B1 (en) * | 2019-06-03 | 2019-11-20 | 三菱電機株式会社 | Ozone supply device and ozone supply method |
CN112473345B (en) * | 2020-10-23 | 2021-08-24 | 三河市清源绿创环境技术股份有限公司 | Gas generating system |
CN116457072A (en) * | 2020-12-15 | 2023-07-18 | 三菱电机株式会社 | Ozone supply device and ozone supply method |
CN117615991A (en) * | 2021-07-21 | 2024-02-27 | 三菱电机株式会社 | Ozone supply plan creation device, ozone supply system, and ozone supply plan creation method |
WO2023238275A1 (en) * | 2022-06-08 | 2023-12-14 | 三菱電機株式会社 | Ozone supply device and ozone supply method |
WO2024190530A1 (en) * | 2023-03-14 | 2024-09-19 | 株式会社明電舎 | Substrate cleaning device, substrate cleaning method, and semiconductor device manufacturing method |
WO2024190529A1 (en) * | 2023-03-14 | 2024-09-19 | 株式会社明電舎 | Ozone water supply device and ozone water supply method |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1143307A (en) * | 1997-07-24 | 1999-02-16 | Mitsubishi Electric Corp | Apparatus for producing ozone |
JP2001248794A (en) * | 2000-03-02 | 2001-09-14 | Kansai Electric Power Co Inc:The | Method and device for storing ozone |
JP3837280B2 (en) * | 2000-09-01 | 2006-10-25 | 岩谷産業株式会社 | High concentration ozone gas supply method and apparatus |
JP4545481B2 (en) * | 2004-04-28 | 2010-09-15 | 三菱電機株式会社 | Ozone supply device |
JP4373990B2 (en) * | 2006-03-17 | 2009-11-25 | 三菱電機株式会社 | Ozone production equipment |
JP4948962B2 (en) * | 2006-10-16 | 2012-06-06 | 住友重機械工業株式会社 | High concentration ozone water production apparatus and high concentration ozone water production method |
US7588749B2 (en) * | 2007-03-29 | 2009-09-15 | Minimus Spine, Inc. | Apparatus, method and system for delivering oxygen-ozone |
JP2010257998A (en) * | 2007-11-26 | 2010-11-11 | Nikon Corp | Reflective projection optical system, exposure apparatus, and method of manufacturing device |
KR101185708B1 (en) * | 2007-11-30 | 2012-09-24 | 도시바 미쓰비시덴키 산교시스템 가부시키가이샤 | Apparatus for producing high-concentration ozone gas and method of producing high-concentration ozone gas |
KR20100087194A (en) * | 2007-11-30 | 2010-08-03 | 도시바 미쓰비시덴키 산교시스템 가부시키가이샤 | Ozone concentrator |
JP5020151B2 (en) * | 2008-04-09 | 2012-09-05 | 三菱電機株式会社 | Ozone production apparatus and ozone production method |
JP5189033B2 (en) * | 2009-06-17 | 2013-04-24 | 三菱電機株式会社 | Ozone supply method |
JP4734664B1 (en) * | 2010-09-17 | 2011-07-27 | 田中貴金属工業株式会社 | Electrode for electrolysis, anode for electrolysis of ozone, anode for electrolysis of persulfate, and anode for chromium electrooxidation |
CN101988205A (en) * | 2010-10-23 | 2011-03-23 | 徐伟钧 | Method for providing high-concentration ozone at startup moment of electrolytic ozone machine |
EP2747789B1 (en) * | 2011-08-25 | 2018-09-19 | Tersano Inc. | Treatment of water to extend half-life of ozone |
JP5888908B2 (en) * | 2011-09-09 | 2016-03-22 | 岩谷産業株式会社 | Concentration method of ozone gas |
SG11201404583PA (en) * | 2012-04-05 | 2014-11-27 | Mitsubishi Electric Corp | Ozone-generating system and ozone generation method |
-
2016
- 2016-11-14 US US15/772,593 patent/US20190092637A1/en not_active Abandoned
- 2016-11-14 SG SG11201805604PA patent/SG11201805604PA/en unknown
- 2016-11-14 JP JP2017511969A patent/JP6184645B1/en active Active
- 2016-11-14 WO PCT/JP2016/083678 patent/WO2017130523A1/en active Application Filing
- 2016-11-14 CN CN201680076340.XA patent/CN108473306B/en active Active
Also Published As
Publication number | Publication date |
---|---|
WO2017130523A1 (en) | 2017-08-03 |
CN108473306B (en) | 2022-04-01 |
JPWO2017130523A1 (en) | 2018-02-01 |
US20190092637A1 (en) | 2019-03-28 |
JP6184645B1 (en) | 2017-08-23 |
CN108473306A (en) | 2018-08-31 |
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