SG11201805604PA - Ozone supply device and ozone supply method - Google Patents

Ozone supply device and ozone supply method

Info

Publication number
SG11201805604PA
SG11201805604PA SG11201805604PA SG11201805604PA SG11201805604PA SG 11201805604P A SG11201805604P A SG 11201805604PA SG 11201805604P A SG11201805604P A SG 11201805604PA SG 11201805604P A SG11201805604P A SG 11201805604PA SG 11201805604P A SG11201805604P A SG 11201805604PA
Authority
SG
Singapore
Prior art keywords
ozone supply
adsorption tower
ozonized gas
adsorbent
unit
Prior art date
Application number
SG11201805604PA
Inventor
Yusuke Nakagawa
Yoko Matsuura
Noboru Wada
Yasuhiro Nakamura
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Publication of SG11201805604PA publication Critical patent/SG11201805604PA/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
    • C01B13/10—Preparation of ozone
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B01D53/0454—Controlling adsorption
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B01D53/047—Pressure swing adsorption
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/10—Inorganic adsorbents
    • B01D2253/106—Silica or silicates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2256/00—Main component in the product gas stream after treatment
    • B01D2256/14—Ozone
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/40—Further details for adsorption processes and devices
    • B01D2259/40007—Controlling pressure or temperature swing adsorption
    • B01D2259/40009—Controlling pressure or temperature swing adsorption using sensors or gas analysers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/45—Gas separation or purification devices adapted for specific applications
    • B01D2259/4525—Gas separation or purification devices adapted for specific applications for storage and dispensing systems

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Inorganic Chemistry (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
  • Separation Of Gases By Adsorption (AREA)

Abstract

6060 60 / 60 6060 60 This ozone supply device includes an ozone generator (2), an adsorption tower (3), a standby unit (7), a pressure reducing device (8), an ozone supply unit (9), a low-temperature coolant circulator (5), and a control unit 5 (10) which causes a generated ozonized gas to be adsorbed to a cooled adsorbent (4) and desorbs the ozonized gas adsorbed to the adsorbent (4), thereby concentrating the ozonized gas, wherein the control unit (10) performs control so that the pressure in the adsorption tower (3) in a standby state where 10 the ozonized gas desorbed from the adsorbent (4) in the adsorption tower (3) is caused to stand by in the standby unit (7) becomes lower than the pressure in the adsorption tower (3) in the adsorption.
SG11201805604PA 2016-01-28 2016-11-14 Ozone supply device and ozone supply method SG11201805604PA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016013893 2016-01-28
PCT/JP2016/083678 WO2017130523A1 (en) 2016-01-28 2016-11-14 Ozone supply device and ozone supply method

Publications (1)

Publication Number Publication Date
SG11201805604PA true SG11201805604PA (en) 2018-08-30

Family

ID=59398013

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201805604PA SG11201805604PA (en) 2016-01-28 2016-11-14 Ozone supply device and ozone supply method

Country Status (5)

Country Link
US (1) US20190092637A1 (en)
JP (1) JP6184645B1 (en)
CN (1) CN108473306B (en)
SG (1) SG11201805604PA (en)
WO (1) WO2017130523A1 (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6632463B2 (en) * 2016-04-28 2020-01-22 岩谷産業株式会社 Ozone gas concentration method and ozone gas concentration device
JP6814971B2 (en) * 2017-08-28 2021-01-20 パナソニックＩｐマネジメント株式会社 Concentration estimation method
JP6607337B1 (en) * 2019-06-03 2019-11-20 三菱電機株式会社 Ozone supply device and ozone supply method
CN112473345B (en) * 2020-10-23 2021-08-24 三河市清源绿创环境技术股份有限公司 Gas generating system
CN116457072A (en) * 2020-12-15 2023-07-18 三菱电机株式会社 Ozone supply device and ozone supply method
CN117615991A (en) * 2021-07-21 2024-02-27 三菱电机株式会社 Ozone supply plan creation device, ozone supply system, and ozone supply plan creation method
WO2023238275A1 (en) * 2022-06-08 2023-12-14 三菱電機株式会社 Ozone supply device and ozone supply method
WO2024190530A1 (en) * 2023-03-14 2024-09-19 株式会社明電舎 Substrate cleaning device, substrate cleaning method, and semiconductor device manufacturing method
WO2024190529A1 (en) * 2023-03-14 2024-09-19 株式会社明電舎 Ozone water supply device and ozone water supply method

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JPH1143307A (en) * 1997-07-24 1999-02-16 Mitsubishi Electric Corp Apparatus for producing ozone
JP2001248794A (en) * 2000-03-02 2001-09-14 Kansai Electric Power Co Inc:The Method and device for storing ozone
JP3837280B2 (en) * 2000-09-01 2006-10-25 岩谷産業株式会社 High concentration ozone gas supply method and apparatus
JP4545481B2 (en) * 2004-04-28 2010-09-15 三菱電機株式会社 Ozone supply device
JP4373990B2 (en) * 2006-03-17 2009-11-25 三菱電機株式会社 Ozone production equipment
JP4948962B2 (en) * 2006-10-16 2012-06-06 住友重機械工業株式会社 High concentration ozone water production apparatus and high concentration ozone water production method
US7588749B2 (en) * 2007-03-29 2009-09-15 Minimus Spine, Inc. Apparatus, method and system for delivering oxygen-ozone
JP2010257998A (en) * 2007-11-26 2010-11-11 Nikon Corp Reflective projection optical system, exposure apparatus, and method of manufacturing device
KR101185708B1 (en) * 2007-11-30 2012-09-24 도시바 미쓰비시덴키 산교시스템 가부시키가이샤 Apparatus for producing high-concentration ozone gas and method of producing high-concentration ozone gas
KR20100087194A (en) * 2007-11-30 2010-08-03 도시바 미쓰비시덴키 산교시스템 가부시키가이샤 Ozone concentrator
JP5020151B2 (en) * 2008-04-09 2012-09-05 三菱電機株式会社 Ozone production apparatus and ozone production method
JP5189033B2 (en) * 2009-06-17 2013-04-24 三菱電機株式会社 Ozone supply method
JP4734664B1 (en) * 2010-09-17 2011-07-27 田中貴金属工業株式会社 Electrode for electrolysis, anode for electrolysis of ozone, anode for electrolysis of persulfate, and anode for chromium electrooxidation
CN101988205A (en) * 2010-10-23 2011-03-23 徐伟钧 Method for providing high-concentration ozone at startup moment of electrolytic ozone machine
EP2747789B1 (en) * 2011-08-25 2018-09-19 Tersano Inc. Treatment of water to extend half-life of ozone
JP5888908B2 (en) * 2011-09-09 2016-03-22 岩谷産業株式会社 Concentration method of ozone gas
SG11201404583PA (en) * 2012-04-05 2014-11-27 Mitsubishi Electric Corp Ozone-generating system and ozone generation method

Also Published As

Publication number Publication date
WO2017130523A1 (en) 2017-08-03
CN108473306B (en) 2022-04-01
JPWO2017130523A1 (en) 2018-02-01
US20190092637A1 (en) 2019-03-28
JP6184645B1 (en) 2017-08-23
CN108473306A (en) 2018-08-31

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