SG11201804695VA - Process for reducing the structuring time of ordered films of block copolymer - Google Patents
Process for reducing the structuring time of ordered films of block copolymerInfo
- Publication number
- SG11201804695VA SG11201804695VA SG11201804695VA SG11201804695VA SG11201804695VA SG 11201804695V A SG11201804695V A SG 11201804695VA SG 11201804695V A SG11201804695V A SG 11201804695VA SG 11201804695V A SG11201804695V A SG 11201804695VA SG 11201804695V A SG11201804695V A SG 11201804695VA
- Authority
- SG
- Singapore
- Prior art keywords
- reducing
- block copolymer
- ordered films
- structuring time
- structuring
- Prior art date
Links
Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F2/00—Processes of polymerisation
- C08F2/04—Polymerisation in solution
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F212/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by an aromatic carbocyclic ring
- C08F212/02—Monomers containing only one unsaturated aliphatic radical
- C08F212/04—Monomers containing only one unsaturated aliphatic radical containing one ring
- C08F212/06—Hydrocarbons
- C08F212/08—Styrene
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F297/00—Macromolecular compounds obtained by successively polymerising different monomer systems using a catalyst of the ionic or coordination type without deactivating the intermediate polymer
- C08F297/02—Macromolecular compounds obtained by successively polymerising different monomer systems using a catalyst of the ionic or coordination type without deactivating the intermediate polymer using a catalyst of the anionic type
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F297/00—Macromolecular compounds obtained by successively polymerising different monomer systems using a catalyst of the ionic or coordination type without deactivating the intermediate polymer
- C08F297/02—Macromolecular compounds obtained by successively polymerising different monomer systems using a catalyst of the ionic or coordination type without deactivating the intermediate polymer using a catalyst of the anionic type
- C08F297/026—Macromolecular compounds obtained by successively polymerising different monomer systems using a catalyst of the ionic or coordination type without deactivating the intermediate polymer using a catalyst of the anionic type polymerising acrylic acid, methacrylic acid or derivatives thereof
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F4/00—Polymerisation catalysts
- C08F4/42—Metals; Metal hydrides; Metallo-organic compounds; Use thereof as catalyst precursors
- C08F4/44—Metals; Metal hydrides; Metallo-organic compounds; Use thereof as catalyst precursors selected from light metals, zinc, cadmium, mercury, copper, silver, gold, boron, gallium, indium, thallium, rare earths or actinides
- C08F4/60—Metals; Metal hydrides; Metallo-organic compounds; Use thereof as catalyst precursors selected from light metals, zinc, cadmium, mercury, copper, silver, gold, boron, gallium, indium, thallium, rare earths or actinides together with refractory metals, iron group metals, platinum group metals, manganese, rhenium technetium or compounds thereof
- C08F4/607—Catalysts containing a specific non-metal or metal-free compound
- C08F4/609—Catalysts containing a specific non-metal or metal-free compound organic
- C08F4/6097—Catalysts containing a specific non-metal or metal-free compound organic containing phosphorus
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L53/00—Compositions of block copolymers containing at least one sequence of a polymer obtained by reactions only involving carbon-to-carbon unsaturated bonds; Compositions of derivatives of such polymers
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F2438/00—Living radical polymerisation
- C08F2438/03—Use of a di- or tri-thiocarbonylthio compound, e.g. di- or tri-thioester, di- or tri-thiocarbamate, or a xanthate as chain transfer agent, e.g . Reversible Addition Fragmentation chain Transfer [RAFT] or Macromolecular Design via Interchange of Xanthates [MADIX]
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L2203/00—Applications
- C08L2203/16—Applications used for films
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1562776A FR3045642A1 (en) | 2015-12-18 | 2015-12-18 | METHOD FOR REDUCING THE STRUCTURING TIME OF ORDINATED BLOCK COPOLYMER FILMS |
PCT/EP2016/081373 WO2017103062A1 (en) | 2015-12-18 | 2016-12-16 | Process for reducing the structuring time of ordered films of block copolymer |
Publications (1)
Publication Number | Publication Date |
---|---|
SG11201804695VA true SG11201804695VA (en) | 2018-07-30 |
Family
ID=55451375
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG11201804695VA SG11201804695VA (en) | 2015-12-18 | 2016-12-16 | Process for reducing the structuring time of ordered films of block copolymer |
Country Status (9)
Country | Link |
---|---|
US (1) | US20190002684A1 (en) |
EP (1) | EP3391142A1 (en) |
JP (1) | JP2019500457A (en) |
KR (1) | KR20180096711A (en) |
CN (1) | CN108475009A (en) |
FR (1) | FR3045642A1 (en) |
SG (1) | SG11201804695VA (en) |
TW (1) | TW201736451A (en) |
WO (1) | WO2017103062A1 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR3045644A1 (en) * | 2015-12-18 | 2017-06-23 | Arkema France | PROCESS FOR OBTAINING THICK ORDERED FILMS AND HIGH PERIODS COMPRISING A BLOCK COPOLYMER |
FR3045645B1 (en) * | 2015-12-18 | 2019-07-05 | Arkema France | METHOD OF REDUCING DEFECTS IN ORDINATED BLOCK COPOLYMER FILM |
FR3045643A1 (en) * | 2015-12-18 | 2017-06-23 | Arkema France | METHOD FOR ENHANCING THE CRITICAL DIMENSIONAL UNIFORMITY OF ORDINATED BLOCK COPOLYMER FILMS |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8193285B2 (en) * | 2006-05-16 | 2012-06-05 | Nippon Soda Co., Ltd. | Block copolymers |
US8398868B2 (en) * | 2009-05-19 | 2013-03-19 | International Business Machines Corporation | Directed self-assembly of block copolymers using segmented prepatterns |
JP2010283928A (en) * | 2009-06-02 | 2010-12-16 | Kuraray Co Ltd | Polymer transducer |
US8349203B2 (en) * | 2009-09-04 | 2013-01-08 | International Business Machines Corporation | Method of forming self-assembled patterns using block copolymers, and articles thereof |
US8304493B2 (en) * | 2010-08-20 | 2012-11-06 | Micron Technology, Inc. | Methods of forming block copolymers |
US9580534B2 (en) * | 2011-07-29 | 2017-02-28 | Wisconsin Alumni Research Foundation | Block copolymer materials for directed assembly of thin films |
FR2983773B1 (en) * | 2011-12-09 | 2014-10-24 | Arkema France | PROCESS FOR PREPARING SURFACES |
JP5894445B2 (en) * | 2012-01-23 | 2016-03-30 | 東京エレクトロン株式会社 | Etching method and etching apparatus |
US8513356B1 (en) * | 2012-02-10 | 2013-08-20 | Dow Global Technologies Llc | Diblock copolymer blend composition |
US9005877B2 (en) * | 2012-05-15 | 2015-04-14 | Tokyo Electron Limited | Method of forming patterns using block copolymers and articles thereof |
US9012545B2 (en) * | 2012-08-31 | 2015-04-21 | Rohm And Haas Electronic Materials Llc | Composition and method for preparing pattern on a substrate |
CN104918984A (en) * | 2012-10-31 | 2015-09-16 | 陶氏环球技术有限责任公司 | Nanocomposites of copolymers and dielectric materials |
FR3008413B1 (en) * | 2013-07-11 | 2015-08-07 | Arkema France | PROCESS FOR PERPENDICULAR ORIENTATION OF NANODOMAINES OF BLOCK COPOLYMERS USING STATISTICAL OR GRADIENT COPOLYMERS WHERE THE MONOMERS ARE AT LEAST DIFFERENT FROM THOSE PRESENT SPECIFICALLY IN EACH BLOCK OF BLOCK COPOLYMER |
FR3008986B1 (en) * | 2013-07-25 | 2016-12-30 | Arkema France | METHOD OF CONTROLLING THE PERIOD CHARACTERIZING THE MORPHOLOGY OBTAINED FROM A MIXTURE OF BLOCK COPOLYMER AND (CO) POLYMER FROM ONE OF THE BLOCKS |
FR3014877B1 (en) * | 2013-12-17 | 2017-03-31 | Arkema France | METHOD FOR NANOSTRUCTURING A BLOCK COPOLYMER FILM FROM A NON-STRUCTURED BLOCK COPOLYMER BASED ON STYRENE AND METHYL METHACRYLATE, AND NANOSTRUCTURE BLOCK COPOLYMER FILM |
KR102364329B1 (en) * | 2014-01-16 | 2022-02-17 | 브레우어 사이언스, 인코포레이션 | High-chi block copolymers for directed self-assembly |
FR3022249B1 (en) * | 2014-06-11 | 2018-01-19 | Arkema France | METHOD FOR CONTROLLING THE PERIOD OF A NANOSTRUCTUE BLOCK COPOLYMER FILM BASED ON STYRENE AND METHYL METHACRYLATE, AND NANOSTRUCTURE BLOCK COPOLYMER FILM |
FR3045645B1 (en) * | 2015-12-18 | 2019-07-05 | Arkema France | METHOD OF REDUCING DEFECTS IN ORDINATED BLOCK COPOLYMER FILM |
FR3045644A1 (en) * | 2015-12-18 | 2017-06-23 | Arkema France | PROCESS FOR OBTAINING THICK ORDERED FILMS AND HIGH PERIODS COMPRISING A BLOCK COPOLYMER |
FR3045643A1 (en) * | 2015-12-18 | 2017-06-23 | Arkema France | METHOD FOR ENHANCING THE CRITICAL DIMENSIONAL UNIFORMITY OF ORDINATED BLOCK COPOLYMER FILMS |
-
2015
- 2015-12-18 FR FR1562776A patent/FR3045642A1/en active Pending
-
2016
- 2016-12-16 EP EP16822647.0A patent/EP3391142A1/en not_active Withdrawn
- 2016-12-16 CN CN201680073419.7A patent/CN108475009A/en active Pending
- 2016-12-16 WO PCT/EP2016/081373 patent/WO2017103062A1/en active Application Filing
- 2016-12-16 JP JP2018530786A patent/JP2019500457A/en active Pending
- 2016-12-16 KR KR1020187020656A patent/KR20180096711A/en not_active Application Discontinuation
- 2016-12-16 US US16/061,912 patent/US20190002684A1/en not_active Abandoned
- 2016-12-16 TW TW105141868A patent/TW201736451A/en unknown
- 2016-12-16 SG SG11201804695VA patent/SG11201804695VA/en unknown
Also Published As
Publication number | Publication date |
---|---|
CN108475009A (en) | 2018-08-31 |
KR20180096711A (en) | 2018-08-29 |
WO2017103062A1 (en) | 2017-06-22 |
US20190002684A1 (en) | 2019-01-03 |
FR3045642A1 (en) | 2017-06-23 |
JP2019500457A (en) | 2019-01-10 |
EP3391142A1 (en) | 2018-10-24 |
TW201736451A (en) | 2017-10-16 |
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