SG11201708865PA - Magnetoresistance effect element - Google Patents

Magnetoresistance effect element

Info

Publication number
SG11201708865PA
SG11201708865PA SG11201708865PA SG11201708865PA SG11201708865PA SG 11201708865P A SG11201708865P A SG 11201708865PA SG 11201708865P A SG11201708865P A SG 11201708865PA SG 11201708865P A SG11201708865P A SG 11201708865PA SG 11201708865P A SG11201708865P A SG 11201708865PA
Authority
SG
Singapore
Prior art keywords
effect element
magnetoresistance effect
magnetoresistance
effect
Prior art date
Application number
SG11201708865PA
Inventor
Takuya Seino
Kazumasa Nishimura
Toshikazu Irisawa
Saki Shibuichi
Original Assignee
Canon Anelva Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Anelva Corp filed Critical Canon Anelva Corp
Publication of SG11201708865PA publication Critical patent/SG11201708865PA/en

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N50/00Galvanomagnetic devices
    • H10N50/10Magnetoresistive devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00Arrangements or instruments for measuring magnetic variables
    • G01R33/02Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09Magnetoresistive devices
    • G01R33/098Magnetoresistive devices comprising tunnel junctions, e.g. tunnel magnetoresistance sensors
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C11/00Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/02Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
    • G11C11/16Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
    • G11C11/161Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect details concerning the memory cell structure, e.g. the layers of the ferromagnetic memory cell
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00Thin magnetic films, e.g. of one-domain structure
    • H01F10/32Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
    • H01F10/3227Exchange coupling via one or more magnetisable ultrathin or granular films
    • H01F10/3231Exchange coupling via one or more magnetisable ultrathin or granular films via a non-magnetic spacer
    • H01F10/3236Exchange coupling via one or more magnetisable ultrathin or granular films via a non-magnetic spacer made of a noble metal, e.g.(Co/Pt) n multilayers having perpendicular anisotropy
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00Thin magnetic films, e.g. of one-domain structure
    • H01F10/32Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
    • H01F10/324Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer
    • H01F10/3268Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer the exchange coupling being asymmetric, e.g. by use of additional pinning, by using antiferromagnetic or ferromagnetic coupling interface, i.e. so-called spin-valve [SV] structure, e.g. NiFe/Cu/NiFe/FeMn
    • H01F10/3272Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer the exchange coupling being asymmetric, e.g. by use of additional pinning, by using antiferromagnetic or ferromagnetic coupling interface, i.e. so-called spin-valve [SV] structure, e.g. NiFe/Cu/NiFe/FeMn by use of anti-parallel coupled [APC] ferromagnetic layers, e.g. artificial ferrimagnets [AFI], artificial [AAF] or synthetic [SAF] anti-ferromagnets
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N50/00Galvanomagnetic devices
    • H10N50/01Manufacture or treatment
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N50/00Galvanomagnetic devices
    • H10N50/80Constructional details
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N50/00Galvanomagnetic devices
    • H10N50/80Constructional details
    • H10N50/85Magnetic active materials
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00Thin magnetic films, e.g. of one-domain structure
    • H01F10/32Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
    • H01F10/324Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer
    • H01F10/3286Spin-exchange coupled multilayers having at least one layer with perpendicular magnetic anisotropy

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Hall/Mr Elements (AREA)
SG11201708865PA 2015-05-22 2016-01-14 Magnetoresistance effect element SG11201708865PA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2015104341 2015-05-22
PCT/JP2016/000158 WO2016189772A1 (en) 2015-05-22 2016-01-14 Magnetoresistive effect element

Publications (1)

Publication Number Publication Date
SG11201708865PA true SG11201708865PA (en) 2017-11-29

Family

ID=57393088

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201708865PA SG11201708865PA (en) 2015-05-22 2016-01-14 Magnetoresistance effect element

Country Status (6)

Country Link
US (1) US9853207B2 (en)
KR (1) KR101800237B1 (en)
DE (1) DE112016002318B4 (en)
SG (1) SG11201708865PA (en)
TW (1) TWI632711B (en)
WO (1) WO2016189772A1 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5848494B1 (en) 2015-02-02 2016-01-27 キヤノンアネルバ株式会社 Method for manufacturing perpendicular magnetization type MTJ element
WO2018139276A1 (en) * 2017-01-24 2018-08-02 国立大学法人東北大学 Method for producing tunnel magnetoresistive element
US10255935B2 (en) * 2017-07-21 2019-04-09 Applied Materials, Inc. Magnetic tunnel junctions suitable for high temperature thermal processing
US10388853B2 (en) * 2017-12-29 2019-08-20 Spin Memory, Inc. Magnetic memory having a pinning synthetic antiferromagnetic structure (SAF) with cobalt over platinum (Pt/Co) bilayers
KR101993186B1 (en) 2018-12-04 2019-06-27 이용근 Shut type continuous packing machine
KR102632986B1 (en) * 2019-10-01 2024-02-05 에스케이하이닉스 주식회사 Electronic device
CN116243222B (en) * 2023-03-16 2023-09-29 珠海多创科技有限公司 Magnetoresistive device, manufacturing method thereof and magnetic sensing device

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4444241B2 (en) 2005-10-19 2010-03-31 株式会社東芝 Magnetoresistive element, magnetic random access memory, electronic card and electronic device
US20130134032A1 (en) 2008-06-25 2013-05-30 Canon Anelva Corporation Method of fabricating and apparatus of fabricating tunnel magnetic resistive element
WO2009157064A1 (en) 2008-06-25 2009-12-30 キヤノンアネルバ株式会社 Method and equipment for manufacturing tunnel magnetoresistive element
WO2011081203A1 (en) 2009-12-28 2011-07-07 キヤノンアネルバ株式会社 Method for manufacturing a magnetoresistive element
US8946837B2 (en) * 2011-07-04 2015-02-03 Kabushiki Kaisha Toshiba Semiconductor storage device with magnetoresistive element
US8871365B2 (en) * 2012-02-28 2014-10-28 Headway Technologies, Inc. High thermal stability reference structure with out-of-plane aniotropy to magnetic device applications
JP5836163B2 (en) * 2012-03-08 2015-12-24 ルネサスエレクトロニクス株式会社 Magnetic memory cell and method for manufacturing magnetic memory cell
JP6244617B2 (en) 2012-09-28 2017-12-13 ソニー株式会社 Storage element, storage device, magnetic head
SG11201504875UA (en) 2012-12-20 2015-07-30 Canon Anelva Corp Method for manufacturing magnetoresistance effect element
JP6016946B2 (en) 2012-12-20 2016-10-26 キヤノンアネルバ株式会社 Oxidation treatment apparatus, oxidation method, and electronic device manufacturing method
WO2015072140A1 (en) 2013-11-18 2015-05-21 キヤノンアネルバ株式会社 Magnetoresistive-element manufacturing method
US9379314B2 (en) * 2013-12-17 2016-06-28 Qualcomm Incorporated Hybrid synthetic antiferromagnetic layer for perpendicular magnetic tunnel junction (MTJ)
JP6095806B2 (en) 2014-02-14 2017-03-15 キヤノンアネルバ株式会社 Tunnel magnetoresistive element manufacturing method and sputtering apparatus
JP5848494B1 (en) 2015-02-02 2016-01-27 キヤノンアネルバ株式会社 Method for manufacturing perpendicular magnetization type MTJ element

Also Published As

Publication number Publication date
US20160380187A1 (en) 2016-12-29
DE112016002318T5 (en) 2018-03-08
KR101800237B1 (en) 2017-11-22
TWI632711B (en) 2018-08-11
US9853207B2 (en) 2017-12-26
WO2016189772A1 (en) 2016-12-01
TW201705564A (en) 2017-02-01
KR20170013206A (en) 2017-02-06
DE112016002318B4 (en) 2021-01-14

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