SG11201705363RA - Six-degree-of-freedom linear motor - Google Patents

Six-degree-of-freedom linear motor

Info

Publication number
SG11201705363RA
SG11201705363RA SG11201705363RA SG11201705363RA SG11201705363RA SG 11201705363R A SG11201705363R A SG 11201705363RA SG 11201705363R A SG11201705363R A SG 11201705363RA SG 11201705363R A SG11201705363R A SG 11201705363RA SG 11201705363R A SG11201705363R A SG 11201705363RA
Authority
SG
Singapore
Prior art keywords
degree
linear motor
freedom linear
freedom
motor
Prior art date
Application number
SG11201705363RA
Other languages
English (en)
Inventor
Lin Zhang
Subing Duan
Hai Xia
Liwei Wu
Original Assignee
Shanghai Micro Electronics Equipment (Group) Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shanghai Micro Electronics Equipment (Group) Co Ltd filed Critical Shanghai Micro Electronics Equipment (Group) Co Ltd
Publication of SG11201705363RA publication Critical patent/SG11201705363RA/en

Links

Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K41/00Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02Linear motors; Sectional motors
    • H02K41/03Synchronous motors; Motors moving step by step; Reluctance motors
    • H02K41/031Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K1/00Details of the magnetic circuit
    • H02K1/06Details of the magnetic circuit characterised by the shape, form or construction
    • H02K1/22Rotating parts of the magnetic circuit
    • H02K1/27Rotor cores with permanent magnets
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K2201/00Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
    • H02K2201/18Machines moving with multiple degrees of freedom
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K2213/00Specific aspects, not otherwise provided for and not covered by codes H02K2201/00 - H02K2211/00
    • H02K2213/03Machines characterised by numerical values, ranges, mathematical expressions or similar information

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Linear Motors (AREA)
SG11201705363RA 2014-12-30 2015-12-29 Six-degree-of-freedom linear motor SG11201705363RA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201410857405.7A CN105811730B (zh) 2014-12-30 2014-12-30 一种六自由度直线电机
PCT/CN2015/099380 WO2016107539A1 (zh) 2014-12-30 2015-12-29 一种六自由度直线电机

Publications (1)

Publication Number Publication Date
SG11201705363RA true SG11201705363RA (en) 2017-08-30

Family

ID=56284279

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201705363RA SG11201705363RA (en) 2014-12-30 2015-12-29 Six-degree-of-freedom linear motor

Country Status (7)

Country Link
US (1) US10651717B2 (ja)
JP (1) JP6410945B2 (ja)
KR (1) KR101986925B1 (ja)
CN (1) CN105811730B (ja)
SG (1) SG11201705363RA (ja)
TW (1) TWI558071B (ja)
WO (1) WO2016107539A1 (ja)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107786058B (zh) * 2016-08-30 2020-04-10 上海微电子装备(集团)股份有限公司 直线电机
CN108336884B (zh) * 2017-01-19 2020-07-21 广东极迅精密仪器有限公司 位移装置
CA3070769A1 (en) 2017-07-27 2019-01-31 Hyperloop Technologies, Inc. Augmented permanent magnet system
CN109462320A (zh) * 2018-11-02 2019-03-12 安徽大学 双层反向倾斜绕组无铁芯永磁同步直线电机
KR102326970B1 (ko) * 2019-01-30 2021-11-16 명남수 전자기 기계용 권선 배열과 이를 이용한 이동 전자기 기계
AT523217A1 (de) * 2019-11-27 2021-06-15 B & R Ind Automation Gmbh Transporteinrichtung
JP7499172B2 (ja) 2020-12-29 2024-06-13 株式会社日立ハイテク 搬送装置、検体分析システム、および検体前処理装置
CN112713685B (zh) * 2021-01-11 2022-07-12 光华临港工程应用技术研发(上海)有限公司 一种轮毂电机
CN116317226B (zh) * 2023-03-02 2024-04-02 果栗智造(上海)技术股份有限公司 定子模组及输送装置

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JP4399984B2 (ja) * 1998-03-13 2010-01-20 株式会社ニコン リニアモータ製造方法、リニアモータ、該リニアモータを備えたステージ装置、および露光装置
TWI248718B (en) * 1999-09-02 2006-02-01 Koninkl Philips Electronics Nv Displacement device
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JP2003189589A (ja) * 2001-12-21 2003-07-04 Canon Inc 可動磁石型リニアモータ、露光装置及びデバイス製造方法
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US9755493B2 (en) * 2012-07-31 2017-09-05 Shanghai Micro Electronics Equipment (Group) Co., Ltd. Linear motor and stage apparatus
CN103580444B (zh) * 2012-07-31 2017-02-22 上海微电子装备有限公司 直线电机
CN103618429A (zh) * 2013-12-09 2014-03-05 东南大学 一种永磁直线电机及由其构成的电机模组

Also Published As

Publication number Publication date
TWI558071B (zh) 2016-11-11
TW201633671A (zh) 2016-09-16
JP2018500873A (ja) 2018-01-11
CN105811730A (zh) 2016-07-27
WO2016107539A1 (zh) 2016-07-07
CN105811730B (zh) 2018-06-29
JP6410945B2 (ja) 2018-10-24
KR101986925B1 (ko) 2019-06-07
US20170373580A1 (en) 2017-12-28
KR20170100009A (ko) 2017-09-01
US10651717B2 (en) 2020-05-12

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