SG11201604064RA - Sealing thermosetting-resin sheet and hollow-package manufacturing method - Google Patents

Sealing thermosetting-resin sheet and hollow-package manufacturing method

Info

Publication number
SG11201604064RA
SG11201604064RA SG11201604064RA SG11201604064RA SG11201604064RA SG 11201604064R A SG11201604064R A SG 11201604064RA SG 11201604064R A SG11201604064R A SG 11201604064RA SG 11201604064R A SG11201604064R A SG 11201604064RA SG 11201604064R A SG11201604064R A SG 11201604064RA
Authority
SG
Singapore
Prior art keywords
hollow
resin sheet
package manufacturing
sealing thermosetting
thermosetting
Prior art date
Application number
SG11201604064RA
Inventor
Eiji Toyoda
Takashi Habu
Tomoaki Ichikawa
yusaku Shimizu
Original Assignee
Nitto Denko Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=53198835&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=SG11201604064R(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Nitto Denko Corp filed Critical Nitto Denko Corp
Publication of SG11201604064RA publication Critical patent/SG11201604064RA/en

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L24/28Structure, shape, material or disposition of the layer connectors prior to the connecting process
    • H01L24/29Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56Encapsulations, e.g. encapsulation layers, coatings
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    • H01L23/29Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
    • H01L23/293Organic, e.g. plastic
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    • H01L24/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L24/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L24/32Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
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    • H01L24/81Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
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    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
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    • H01L2224/131Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
    • H01L2224/13138Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
    • H01L2224/13144Gold [Au] as principal constituent
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    • H01L2224/16245Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
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    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
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    • H01L2224/29001Core members of the layer connector
    • H01L2224/29099Material
    • H01L2224/29195Material with a principal constituent of the material being a gas not provided for in groups H01L2224/291 - H01L2224/29191
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    • H01L2224/32Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321Disposition
    • H01L2224/32151Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32225Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
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    • H01ELECTRIC ELEMENTS
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    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321Disposition
    • H01L2224/32151Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32245Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
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    • H01L2224/732Location after the connecting process
    • H01L2224/73201Location after the connecting process on the same surface
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    • H01L2224/73204Bump and layer connectors the bump connector being embedded into the layer connector
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    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/81Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
    • H01L2224/812Applying energy for connecting
    • H01L2224/81201Compression bonding
    • H01L2224/81205Ultrasonic bonding
    • H01L2224/81207Thermosonic bonding
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    • H01L2224/93Batch processes
    • H01L2224/95Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
    • H01L2224/97Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
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    • H01L23/29Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
    • H01L23/293Organic, e.g. plastic
    • H01L23/295Organic, e.g. plastic containing a filler
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    • H01L23/3107Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
    • H01L23/3121Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation
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    • H01L24/10Bump connectors ; Manufacturing methods related thereto
    • H01L24/12Structure, shape, material or disposition of the bump connectors prior to the connecting process
    • H01L24/13Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
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    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/10Bump connectors ; Manufacturing methods related thereto
    • H01L24/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L24/16Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
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    • H01L24/93Batch processes
    • H01L24/95Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
    • H01L24/97Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
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    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/146Mixed devices
    • H01L2924/1461MEMS
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    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/153Connection portion
    • H01L2924/1531Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
    • H01L2924/15311Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
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    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation
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    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation
    • H01L2924/182Disposition
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/08Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02Details
    • H03H9/05Holders; Supports
    • H03H9/10Mounting in enclosures
    • H03H9/1064Mounting in enclosures for surface acoustic wave [SAW] devices
    • H03H9/1085Mounting in enclosures for surface acoustic wave [SAW] devices the enclosure being defined by a non-uniform sealing mass covering the non-active sides of the BAW device
SG11201604064RA 2013-11-28 2014-11-07 Sealing thermosetting-resin sheet and hollow-package manufacturing method SG11201604064RA (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2013246332 2013-11-28
JP2013246348 2013-11-28
JP2013246340 2013-11-28
JP2014038388 2014-02-28
PCT/JP2014/079535 WO2015079887A1 (en) 2013-11-28 2014-11-07 Sealing thermosetting-resin sheet and hollow-package manufacturing method

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Publication Number Publication Date
SG11201604064RA true SG11201604064RA (en) 2016-07-28

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JP (1) JP6431340B2 (en)
CN (1) CN105917462B (en)
SG (1) SG11201604064RA (en)
TW (1) TW201522591A (en)
WO (1) WO2015079887A1 (en)

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JP6180159B2 (en) * 2013-04-04 2017-08-16 デクセリアルズ株式会社 Anisotropic conductive film, connection method, and joined body
CN108476589B (en) * 2016-01-13 2021-10-26 太阳油墨制造株式会社 Dry film and printed circuit board
CN110546232B (en) * 2017-04-28 2022-05-31 昭和电工材料株式会社 Sealing film, sealing structure, and method for producing sealing structure
EP3690932A4 (en) 2017-09-29 2021-02-17 Nagase ChemteX Corporation Method for producing mounting structure, and sheet used in same
EP3706164A4 (en) * 2017-10-31 2021-08-11 Nagase ChemteX Corporation Method for producing package structure and sheet used in same
JP6718106B2 (en) * 2017-12-14 2020-07-08 ナガセケムテックス株式会社 Manufacturing method of mounting structure
JP6997654B2 (en) * 2018-03-08 2022-01-17 日東電工株式会社 Sealing sheet
JP7268970B2 (en) * 2018-07-03 2023-05-08 日東電工株式会社 Sealing sheet and method for producing electronic element device
JP7166091B2 (en) * 2018-07-03 2022-11-07 日東電工株式会社 Sealing sheet and method for producing electronic element device
JP2020098861A (en) * 2018-12-18 2020-06-25 日東電工株式会社 Adhesive film, adhesive film with dicing tape, and semiconductor device manufacturing method
WO2021010207A1 (en) * 2019-07-12 2021-01-21 日東電工株式会社 Resin sheet for sealing

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JPH08120054A (en) * 1994-10-27 1996-05-14 Matsushita Electric Works Ltd Epoxy resin composition for sealing and semiconductor device
JPH1050899A (en) * 1996-08-06 1998-02-20 Nitto Denko Corp Semiconductor device
JP5035580B2 (en) * 2001-06-28 2012-09-26 ナガセケムテックス株式会社 Surface acoustic wave device and manufacturing method thereof
JP4225162B2 (en) * 2003-08-18 2009-02-18 日立化成工業株式会社 Sealing film
US8138580B2 (en) * 2007-09-19 2012-03-20 Toray Industries, Inc. Adhesive composition for electronic components, and adhesive sheet for electronic components using the same
WO2014013697A1 (en) * 2012-07-16 2014-01-23 株式会社デンソー Electronic device and method for manufacturing same

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TW201522591A (en) 2015-06-16
CN105917462A (en) 2016-08-31
JP6431340B2 (en) 2018-11-28
WO2015079887A1 (en) 2015-06-04
JP2015179814A (en) 2015-10-08
CN105917462B (en) 2019-10-15

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