SG11201604061VA - Method for slicing workpiece - Google Patents

Method for slicing workpiece

Info

Publication number
SG11201604061VA
SG11201604061VA SG11201604061VA SG11201604061VA SG11201604061VA SG 11201604061V A SG11201604061V A SG 11201604061VA SG 11201604061V A SG11201604061V A SG 11201604061VA SG 11201604061V A SG11201604061V A SG 11201604061VA SG 11201604061V A SG11201604061V A SG 11201604061VA
Authority
SG
Singapore
Prior art keywords
slicing
workpiece
slicing workpiece
Prior art date
Application number
SG11201604061VA
Inventor
Keiichi Kanbayashi
Original Assignee
Shinetsu Handotai Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinetsu Handotai Kk filed Critical Shinetsu Handotai Kk
Publication of SG11201604061VA publication Critical patent/SG11201604061VA/en

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/04Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
    • B28D5/045Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23DPLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
    • B23D57/00Sawing machines or sawing devices not covered by one of the preceding groups B23D45/00 - B23D55/00
    • B23D57/0007Sawing machines or sawing devices not covered by one of the preceding groups B23D45/00 - B23D55/00 using saw wires
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23DPLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
    • B23D61/00Tools for sawing machines or sawing devices; Clamping devices for these tools
    • B23D61/18Sawing tools of special type, e.g. wire saw strands, saw blades or saw wire equipped with diamonds or other abrasive particles in selected individual positions
    • B23D61/185Saw wires; Saw cables; Twisted saw strips
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00Other grinding machines or devices
    • B24B27/06Grinders for cutting-off
    • B24B27/0633Grinders for cutting-off using a cutting wire
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D7/00Accessories specially adapted for use with machines or devices of the preceding groups
    • B28D7/02Accessories specially adapted for use with machines or devices of the preceding groups for removing or laying dust, e.g. by spraying liquids; for cooling work
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02002Preparing wafers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
SG11201604061VA 2013-11-21 2014-10-27 Method for slicing workpiece SG11201604061VA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2013240679A JP5994766B2 (en) 2013-11-21 2013-11-21 Work cutting method
PCT/JP2014/005413 WO2015075869A1 (en) 2013-11-21 2014-10-27 Workpiece cutting method

Publications (1)

Publication Number Publication Date
SG11201604061VA true SG11201604061VA (en) 2016-07-28

Family

ID=53179164

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201604061VA SG11201604061VA (en) 2013-11-21 2014-10-27 Method for slicing workpiece

Country Status (8)

Country Link
US (1) US10029392B2 (en)
JP (1) JP5994766B2 (en)
KR (1) KR102100839B1 (en)
CN (1) CN105636742B (en)
DE (1) DE112014004799B4 (en)
SG (1) SG11201604061VA (en)
TW (1) TWI568558B (en)
WO (1) WO2015075869A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6493243B2 (en) * 2016-02-15 2019-04-03 株式会社Sumco Wafer manufacturing method
JP6222393B1 (en) * 2017-03-21 2017-11-01 信越半導体株式会社 Ingot cutting method
WO2018203448A1 (en) * 2017-05-02 2018-11-08 信越半導体株式会社 Workpiece cutting method and joining member
CN112692704A (en) * 2020-12-14 2021-04-23 浙江英洛华磁业有限公司 Method for processing magnetic material by utilizing linear cutting

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH691292A5 (en) * 1995-10-03 2001-06-29 Hct Shaping Systems Sa Wire sawing device equipped with a wire management system allowing the use of wire coils of very great length.
JP3106416B2 (en) 1996-09-20 2000-11-06 株式会社東京精密 Wire running control method for wire saw
JP3375877B2 (en) * 1997-02-28 2003-02-10 株式会社日平トヤマ Wire saw
JP2000042896A (en) * 1998-07-24 2000-02-15 Tokyo Seimitsu Co Ltd Cutting method for wire saw
US6328027B1 (en) 1999-11-11 2001-12-11 Cti, Inc. Method for precision cutting of soluble scintillator materials
CN1203966C (en) * 2001-10-17 2005-06-01 株式会社新王磁材 Cutting method using wire saw, wire saw device, and method of mfg. rareearth magnet
CN2597171Y (en) 2003-02-16 2004-01-07 周文敏 Microcomputer controlled crystal linear cutting machine
JP5072204B2 (en) * 2005-08-31 2012-11-14 信越半導体株式会社 Method and wire saw apparatus for improving nanotopography of wafer surface
EP2165805A4 (en) * 2007-06-27 2014-02-12 Mitsubishi Electric Corp Multi-wire saw and method of cutting ingot
DE112008003339B4 (en) * 2007-12-19 2022-02-24 Shin-Etsu Handotai Co., Ltd. Method of cutting a workpiece using a wire saw
CN102791427B (en) * 2010-02-08 2015-05-13 东洋先进机床有限公司 Wire saw
TWI488725B (en) 2010-02-11 2015-06-21 Toyo Advanced Tech Co Cutting method and wire sawing by wire saw
JP5639858B2 (en) 2010-11-19 2014-12-10 Sumco Techxiv株式会社 Ingot cutting method
KR101230268B1 (en) * 2010-11-23 2013-02-06 한국생산기술연구원 Tension control system for wire saw machine
CN102179880A (en) * 2011-03-30 2011-09-14 苏州市汇峰机械设备厂 Multi-wire cutting machine
JP2013129046A (en) * 2011-12-22 2013-07-04 Shin Etsu Handotai Co Ltd Workpiece cutting method
CN102528954B (en) * 2012-02-10 2014-11-26 长沙岱勒新材料科技有限公司 Method for cutting magnetic material by using diamond wires

Also Published As

Publication number Publication date
JP2015100853A (en) 2015-06-04
US20160250776A1 (en) 2016-09-01
TW201536499A (en) 2015-10-01
KR102100839B1 (en) 2020-04-14
CN105636742B (en) 2017-06-23
US10029392B2 (en) 2018-07-24
WO2015075869A1 (en) 2015-05-28
TWI568558B (en) 2017-02-01
DE112014004799B4 (en) 2024-02-08
JP5994766B2 (en) 2016-09-21
KR20160088865A (en) 2016-07-26
DE112014004799T5 (en) 2016-07-21
CN105636742A (en) 2016-06-01

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