SG11201604061VA - Method for slicing workpiece - Google Patents
Method for slicing workpieceInfo
- Publication number
- SG11201604061VA SG11201604061VA SG11201604061VA SG11201604061VA SG11201604061VA SG 11201604061V A SG11201604061V A SG 11201604061VA SG 11201604061V A SG11201604061V A SG 11201604061VA SG 11201604061V A SG11201604061V A SG 11201604061VA SG 11201604061V A SG11201604061V A SG 11201604061VA
- Authority
- SG
- Singapore
- Prior art keywords
- slicing
- workpiece
- slicing workpiece
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
- B28D5/045—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
- B23D57/00—Sawing machines or sawing devices not covered by one of the preceding groups B23D45/00 - B23D55/00
- B23D57/0007—Sawing machines or sawing devices not covered by one of the preceding groups B23D45/00 - B23D55/00 using saw wires
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
- B23D61/00—Tools for sawing machines or sawing devices; Clamping devices for these tools
- B23D61/18—Sawing tools of special type, e.g. wire saw strands, saw blades or saw wire equipped with diamonds or other abrasive particles in selected individual positions
- B23D61/185—Saw wires; Saw cables; Twisted saw strips
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B27/00—Other grinding machines or devices
- B24B27/06—Grinders for cutting-off
- B24B27/0633—Grinders for cutting-off using a cutting wire
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D7/00—Accessories specially adapted for use with machines or devices of the preceding groups
- B28D7/02—Accessories specially adapted for use with machines or devices of the preceding groups for removing or laying dust, e.g. by spraying liquids; for cooling work
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02002—Preparing wafers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013240679A JP5994766B2 (en) | 2013-11-21 | 2013-11-21 | Work cutting method |
PCT/JP2014/005413 WO2015075869A1 (en) | 2013-11-21 | 2014-10-27 | Workpiece cutting method |
Publications (1)
Publication Number | Publication Date |
---|---|
SG11201604061VA true SG11201604061VA (en) | 2016-07-28 |
Family
ID=53179164
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG11201604061VA SG11201604061VA (en) | 2013-11-21 | 2014-10-27 | Method for slicing workpiece |
Country Status (8)
Country | Link |
---|---|
US (1) | US10029392B2 (en) |
JP (1) | JP5994766B2 (en) |
KR (1) | KR102100839B1 (en) |
CN (1) | CN105636742B (en) |
DE (1) | DE112014004799B4 (en) |
SG (1) | SG11201604061VA (en) |
TW (1) | TWI568558B (en) |
WO (1) | WO2015075869A1 (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6493243B2 (en) * | 2016-02-15 | 2019-04-03 | 株式会社Sumco | Wafer manufacturing method |
JP6222393B1 (en) * | 2017-03-21 | 2017-11-01 | 信越半導体株式会社 | Ingot cutting method |
WO2018203448A1 (en) * | 2017-05-02 | 2018-11-08 | 信越半導体株式会社 | Workpiece cutting method and joining member |
CN112692704A (en) * | 2020-12-14 | 2021-04-23 | 浙江英洛华磁业有限公司 | Method for processing magnetic material by utilizing linear cutting |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CH691292A5 (en) * | 1995-10-03 | 2001-06-29 | Hct Shaping Systems Sa | Wire sawing device equipped with a wire management system allowing the use of wire coils of very great length. |
JP3106416B2 (en) | 1996-09-20 | 2000-11-06 | 株式会社東京精密 | Wire running control method for wire saw |
JP3375877B2 (en) * | 1997-02-28 | 2003-02-10 | 株式会社日平トヤマ | Wire saw |
JP2000042896A (en) * | 1998-07-24 | 2000-02-15 | Tokyo Seimitsu Co Ltd | Cutting method for wire saw |
US6328027B1 (en) | 1999-11-11 | 2001-12-11 | Cti, Inc. | Method for precision cutting of soluble scintillator materials |
CN1203966C (en) * | 2001-10-17 | 2005-06-01 | 株式会社新王磁材 | Cutting method using wire saw, wire saw device, and method of mfg. rareearth magnet |
CN2597171Y (en) | 2003-02-16 | 2004-01-07 | 周文敏 | Microcomputer controlled crystal linear cutting machine |
JP5072204B2 (en) * | 2005-08-31 | 2012-11-14 | 信越半導体株式会社 | Method and wire saw apparatus for improving nanotopography of wafer surface |
EP2165805A4 (en) * | 2007-06-27 | 2014-02-12 | Mitsubishi Electric Corp | Multi-wire saw and method of cutting ingot |
DE112008003339B4 (en) * | 2007-12-19 | 2022-02-24 | Shin-Etsu Handotai Co., Ltd. | Method of cutting a workpiece using a wire saw |
CN102791427B (en) * | 2010-02-08 | 2015-05-13 | 东洋先进机床有限公司 | Wire saw |
TWI488725B (en) | 2010-02-11 | 2015-06-21 | Toyo Advanced Tech Co | Cutting method and wire sawing by wire saw |
JP5639858B2 (en) | 2010-11-19 | 2014-12-10 | Sumco Techxiv株式会社 | Ingot cutting method |
KR101230268B1 (en) * | 2010-11-23 | 2013-02-06 | 한국생산기술연구원 | Tension control system for wire saw machine |
CN102179880A (en) * | 2011-03-30 | 2011-09-14 | 苏州市汇峰机械设备厂 | Multi-wire cutting machine |
JP2013129046A (en) * | 2011-12-22 | 2013-07-04 | Shin Etsu Handotai Co Ltd | Workpiece cutting method |
CN102528954B (en) * | 2012-02-10 | 2014-11-26 | 长沙岱勒新材料科技有限公司 | Method for cutting magnetic material by using diamond wires |
-
2013
- 2013-11-21 JP JP2013240679A patent/JP5994766B2/en active Active
-
2014
- 2014-10-27 CN CN201480056205.XA patent/CN105636742B/en active Active
- 2014-10-27 KR KR1020167011408A patent/KR102100839B1/en active IP Right Grant
- 2014-10-27 WO PCT/JP2014/005413 patent/WO2015075869A1/en active Application Filing
- 2014-10-27 SG SG11201604061VA patent/SG11201604061VA/en unknown
- 2014-10-27 DE DE112014004799.6T patent/DE112014004799B4/en active Active
- 2014-10-27 US US15/027,157 patent/US10029392B2/en active Active
- 2014-11-10 TW TW103138920A patent/TWI568558B/en active
Also Published As
Publication number | Publication date |
---|---|
JP2015100853A (en) | 2015-06-04 |
US20160250776A1 (en) | 2016-09-01 |
TW201536499A (en) | 2015-10-01 |
KR102100839B1 (en) | 2020-04-14 |
CN105636742B (en) | 2017-06-23 |
US10029392B2 (en) | 2018-07-24 |
WO2015075869A1 (en) | 2015-05-28 |
TWI568558B (en) | 2017-02-01 |
DE112014004799B4 (en) | 2024-02-08 |
JP5994766B2 (en) | 2016-09-21 |
KR20160088865A (en) | 2016-07-26 |
DE112014004799T5 (en) | 2016-07-21 |
CN105636742A (en) | 2016-06-01 |
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