SG11201505012TA - Optical waveguide element and optical modulator - Google Patents
Optical waveguide element and optical modulatorInfo
- Publication number
- SG11201505012TA SG11201505012TA SG11201505012TA SG11201505012TA SG11201505012TA SG 11201505012T A SG11201505012T A SG 11201505012TA SG 11201505012T A SG11201505012T A SG 11201505012TA SG 11201505012T A SG11201505012T A SG 11201505012TA SG 11201505012T A SG11201505012T A SG 11201505012TA
- Authority
- SG
- Singapore
- Prior art keywords
- optical
- waveguide element
- modulator
- optical waveguide
- optical modulator
- Prior art date
Links
- 230000003287 optical effect Effects 0.000 title 2
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
- G02F1/025—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction in an optical waveguide structure
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/1228—Tapered waveguides, e.g. integrated spot-size transformers
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
- G02F1/225—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure
- G02F1/2257—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure the optical waveguides being made of semiconducting material
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12035—Materials
- G02B2006/12061—Silicon
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12083—Constructional arrangements
- G02B2006/12097—Ridge, rib or the like
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12133—Functions
- G02B2006/12159—Interferometer
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
- G02F1/0151—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction modulating the refractive index
- G02F1/0152—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction modulating the refractive index using free carrier effects, e.g. plasma effect
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
- G02F1/212—Mach-Zehnder type
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Optical Integrated Circuits (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012283964A JP5413865B1 (en) | 2012-12-27 | 2012-12-27 | Optical waveguide device and optical modulator |
PCT/JP2013/073828 WO2014103432A1 (en) | 2012-12-27 | 2013-09-04 | Optical waveguide element and optical modulator |
Publications (1)
Publication Number | Publication Date |
---|---|
SG11201505012TA true SG11201505012TA (en) | 2015-07-30 |
Family
ID=50202753
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG11201505012TA SG11201505012TA (en) | 2012-12-27 | 2013-09-04 | Optical waveguide element and optical modulator |
Country Status (5)
Country | Link |
---|---|
US (1) | US9448425B2 (en) |
JP (1) | JP5413865B1 (en) |
CN (1) | CN104885003B (en) |
SG (1) | SG11201505012TA (en) |
WO (1) | WO2014103432A1 (en) |
Families Citing this family (60)
Publication number | Priority date | Publication date | Assignee | Title |
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US9625746B2 (en) * | 2012-12-11 | 2017-04-18 | Acacia Communications, Inc. | Silicon depletion modulators with enhanced slab doping |
US9939666B2 (en) | 2013-06-06 | 2018-04-10 | Acacia Communications, Inc. | Silicon electro-optical modulator |
US10222677B2 (en) | 2014-02-24 | 2019-03-05 | Rockley Photonics Limited | Optoelectronic device |
GB2564158B (en) | 2017-07-05 | 2019-12-18 | Rockley Photonics Ltd | Optoelectronic device |
US10928659B2 (en) | 2014-02-24 | 2021-02-23 | Rockley Photonics Limited | Optoelectronic device |
US10216016B2 (en) * | 2014-07-25 | 2019-02-26 | Cornell University | Linear optical phase modulators |
JP6440819B2 (en) * | 2014-07-31 | 2018-12-19 | 華為技術有限公司Huawei Technologies Co.,Ltd. | Silicon-germanium electroabsorption modulator |
US10082623B2 (en) * | 2014-10-02 | 2018-09-25 | Nec Corporation | Rib type optical waveguide and optical multiplexer / demultiplexer using same |
FR3029301B1 (en) | 2014-12-01 | 2017-01-06 | Commissariat Energie Atomique | METHOD FOR PRODUCING A WAVEGUIDE INCLUDING SEMICONDUCTOR JUNCTION |
JP6494297B2 (en) * | 2015-01-20 | 2019-04-03 | 富士通株式会社 | Optical device |
US10921616B2 (en) | 2016-11-23 | 2021-02-16 | Rockley Photonics Limited | Optoelectronic device |
US10216059B2 (en) * | 2015-03-05 | 2019-02-26 | Rockley Photonics Limited | Waveguide modulator structures |
US10678115B2 (en) | 2015-03-05 | 2020-06-09 | Rockley Photonics Limited | Waveguide modulator structures |
US11150494B2 (en) | 2015-03-05 | 2021-10-19 | Rockley Photonics Limited | Waveguide modulator structures |
CN107533248A (en) * | 2015-03-05 | 2018-01-02 | 洛克利光子有限公司 | waveguide modulator structure |
CN107924024B (en) * | 2015-05-08 | 2020-10-16 | 华为技术有限公司 | Tapered waveguide and silicon-based chip |
WO2016194369A1 (en) * | 2015-06-02 | 2016-12-08 | 日本電信電話株式会社 | Semiconductor optical modulation element |
JP6062496B1 (en) * | 2015-06-26 | 2017-01-18 | 株式会社フジクラ | Optical waveguide device |
JP2017045012A (en) * | 2015-08-28 | 2017-03-02 | 日本電信電話株式会社 | Optical modulator |
JP6368289B2 (en) * | 2015-08-28 | 2018-08-01 | 日本電信電話株式会社 | Method for measuring pn junction position of optical modulator |
JP2017072807A (en) * | 2015-10-09 | 2017-04-13 | 株式会社フジクラ | Semiconductor optical waveguide, semiconductor optical modulator, and semiconductor optical modulation system |
JP2017090575A (en) * | 2015-11-05 | 2017-05-25 | 株式会社フジクラ | Optical multiplexing/demultiplexing element and optical modulator |
US10502895B2 (en) * | 2016-01-06 | 2019-12-10 | Elenion Technologies, Llc | Integrated on-chip polarizer |
US9810840B2 (en) * | 2016-01-06 | 2017-11-07 | Elenion Technologies Llc | Integrated on-chip polarizer |
US9915849B2 (en) * | 2016-02-08 | 2018-03-13 | Mitsubishi Electric Corporation | Optical modulator |
CN108780235B (en) * | 2016-03-18 | 2021-12-14 | 日本电信电话株式会社 | Optical modulator |
CN107290873A (en) * | 2016-04-01 | 2017-10-24 | 源杰科技股份有限公司 | Light modulator |
CN105974613B (en) * | 2016-07-15 | 2019-01-25 | 北京大学 | Electric light lumped modulator |
JP6870813B2 (en) * | 2016-08-17 | 2021-05-12 | 国立大学法人 東京大学 | MOS type optical modulator and its manufacturing method |
US10775650B2 (en) | 2016-08-29 | 2020-09-15 | Nippon Telegraph And Telephone Corporation | Optical modulator |
WO2018045300A1 (en) * | 2016-09-01 | 2018-03-08 | Luxtera, Inc. | Method and system for a vertical junction high-speed phase modulator |
US10228512B2 (en) | 2016-09-29 | 2019-03-12 | Oki Electric Industry Co., Ltd. | Wavelength filter |
JP6349364B2 (en) * | 2016-09-29 | 2018-06-27 | 沖電気工業株式会社 | Wavelength filter |
WO2018090382A1 (en) * | 2016-11-21 | 2018-05-24 | 华为技术有限公司 | Laser, optical line terminal, optical network unit, and passive optical network |
US11101256B2 (en) | 2016-11-23 | 2021-08-24 | Rockley Photonics Limited | Optical modulators |
EP3545357B1 (en) * | 2016-11-23 | 2023-06-14 | Rockley Photonics Limited | Optoelectronic device |
CN110325900B (en) | 2016-12-02 | 2023-11-17 | 洛克利光子有限公司 | Waveguide optoelectronic device |
US11036006B2 (en) | 2016-12-02 | 2021-06-15 | Rockley Photonics Limited | Waveguide device and method of doping a waveguide device |
JP6412969B2 (en) * | 2017-03-14 | 2018-10-24 | 沖電気工業株式会社 | Optical waveguide device |
US12100773B2 (en) * | 2017-05-15 | 2024-09-24 | Rockley Photonics Limited | Avalanche photodiode structure |
GB2562481B (en) * | 2017-05-15 | 2020-04-01 | Rockley Photonics Ltd | Germanium-based avalanche photodiode structure coupled to Si-waveguide |
JP6855323B2 (en) * | 2017-05-24 | 2021-04-07 | ルネサスエレクトロニクス株式会社 | Semiconductor device |
FR3069069A1 (en) * | 2017-07-11 | 2019-01-18 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | OPTICAL PHASE MODULATOR WITH SINUSOIDAL PN JUNCTION |
CN111051969B (en) * | 2017-09-11 | 2021-10-26 | 华为技术有限公司 | Phase modulator, manufacturing method thereof and silicon-based electro-optical modulator |
KR101944272B1 (en) * | 2017-09-13 | 2019-01-31 | 한국과학기술연구원 | Mid-ir light phase modulator and method for manufacturing the same |
JP6523573B1 (en) * | 2018-02-19 | 2019-06-05 | 三菱電機株式会社 | Semiconductor optical integrated device |
JP6922781B2 (en) * | 2018-02-22 | 2021-08-18 | 日本電信電話株式会社 | Light modulator |
CN108490650B (en) * | 2018-04-09 | 2020-04-24 | 中国科学院半导体研究所 | Periodic staggered waveguide structure, electro-optical modulation structure and MZI structure |
FR3085549B1 (en) * | 2018-08-31 | 2021-05-14 | St Microelectronics Crolles 2 Sas | WAVE GUIDE |
US11022825B2 (en) * | 2018-09-03 | 2021-06-01 | Ciena Corporation | Silicon photonics modulator using TM mode and with a modified rib geometry |
US11982919B2 (en) | 2018-12-06 | 2024-05-14 | Mitsubishi Electric Corporation | Mach-Zehnder type optical modulator |
JP2020095131A (en) * | 2018-12-12 | 2020-06-18 | 住友電気工業株式会社 | Optical modulator |
CN109683354B (en) * | 2019-01-15 | 2020-09-15 | 中国科学院半导体研究所 | Mid-infrared band modulator and preparation method thereof |
WO2021065578A1 (en) * | 2019-10-04 | 2021-04-08 | 国立大学法人東京工業大学 | Light modulation element |
US10852570B1 (en) * | 2019-10-16 | 2020-12-01 | Inphi Corporation | Dual-slab-layer low-loss silicon optical modulator |
CN111240055A (en) * | 2020-03-31 | 2020-06-05 | 亨通洛克利科技有限公司 | Integrated electro-optic modulator |
US11415820B2 (en) * | 2020-05-04 | 2022-08-16 | Taiwan Semiconductor Manufacturing Company, Ltd. | Waveguide structure |
WO2021248956A1 (en) * | 2020-06-10 | 2021-12-16 | 青岛海信宽带多媒体技术有限公司 | Optical module |
US11869991B2 (en) * | 2020-09-18 | 2024-01-09 | Taiwan Semiconductor Manufacturing Company Limited | Semiconductor device and method of making |
CN115437167B (en) * | 2022-11-09 | 2023-02-10 | 上海阿米芯光半导体有限责任公司 | Phase shifter structure, phase shifter and traveling wave electrode modulator thereof |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0720754B1 (en) | 1993-09-21 | 1997-11-19 | Bookham Technology Limited | An electro-optic device |
US7085443B1 (en) * | 2003-08-15 | 2006-08-01 | Luxtera, Inc. | Doping profiles in PN diode optical modulators |
US20060133754A1 (en) * | 2004-12-21 | 2006-06-22 | Vipulkumar Patel | Ultra low-loss CMOS compatible silicon waveguides |
US8362494B2 (en) * | 2007-08-08 | 2013-01-29 | Agency For Science, Technology And Research | Electro-optic device with novel insulating structure and a method for manufacturing the same |
US8149493B2 (en) * | 2008-09-06 | 2012-04-03 | Sifotonics Technologies (Usa) Inc. | Electro-optic silicon modulator |
US7747122B2 (en) * | 2008-09-30 | 2010-06-29 | Intel Corporation | Method and apparatus for high speed silicon optical modulation using PN diode |
JP5455955B2 (en) * | 2011-03-23 | 2014-03-26 | 株式会社東芝 | Ring light modulator |
SG11201401800PA (en) * | 2011-10-26 | 2014-09-26 | Fujikura Ltd | Optical element and mach-zehnder optical waveguide element |
KR102116977B1 (en) * | 2013-04-11 | 2020-05-29 | 삼성전자 주식회사 | Athermal optical modulator and method of manufacturing the same |
-
2012
- 2012-12-27 JP JP2012283964A patent/JP5413865B1/en not_active Expired - Fee Related
-
2013
- 2013-09-04 WO PCT/JP2013/073828 patent/WO2014103432A1/en active Application Filing
- 2013-09-04 SG SG11201505012TA patent/SG11201505012TA/en unknown
- 2013-09-04 CN CN201380067837.1A patent/CN104885003B/en not_active Expired - Fee Related
-
2015
- 2015-06-24 US US14/748,331 patent/US9448425B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP5413865B1 (en) | 2014-02-12 |
CN104885003A (en) | 2015-09-02 |
US9448425B2 (en) | 2016-09-20 |
CN104885003B (en) | 2018-04-03 |
WO2014103432A1 (en) | 2014-07-03 |
US20150293384A1 (en) | 2015-10-15 |
JP2014126728A (en) | 2014-07-07 |
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