SG11201407822VA - Device and method for separating, at least partially drying and inspecting electronic components - Google Patents

Device and method for separating, at least partially drying and inspecting electronic components

Info

Publication number
SG11201407822VA
SG11201407822VA SG11201407822VA SG11201407822VA SG11201407822VA SG 11201407822V A SG11201407822V A SG 11201407822VA SG 11201407822V A SG11201407822V A SG 11201407822VA SG 11201407822V A SG11201407822V A SG 11201407822VA SG 11201407822V A SG11201407822V A SG 11201407822VA
Authority
SG
Singapore
Prior art keywords
international
separating
electronic components
heating source
partially drying
Prior art date
Application number
SG11201407822VA
Inventor
Jurgen Hendrikus Gerhardus Huisstede
Original Assignee
Besi Netherlands Bv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Besi Netherlands Bv filed Critical Besi Netherlands Bv
Publication of SG11201407822VA publication Critical patent/SG11201407822VA/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B3/00—Drying solid materials or objects by processes involving the application of heat
    • F26B3/28—Drying solid materials or objects by processes involving the application of heat by radiation, e.g. from the sun
    • F26B3/283—Drying solid materials or objects by processes involving the application of heat by radiation, e.g. from the sun in combination with convection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
    • H01L21/67173—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers in-line arrangement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips, lead frames
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/6776—Continuous loading and unloading into and out of a processing chamber, e.g. transporting belts within processing chambers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Microbiology (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Drying Of Solid Materials (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Meat, Egg Or Seafood Products (AREA)

Abstract

(12) INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property Organization International Bureau (43) International Publication Date 9 January 2014 (09.01.2014) WIPOIPCT (10) International Publication Number WO 2014/007619 A1 (51) International Patent Classification: H01L 21/677 (2006.01) H01L 21/84 (2006.01) H01L 21/67 (2006.01) H01L 29/786 (2006.01) H01L 21/268 (2006.01) H01L 21/02 (2006.01) (21) International Application Number: (22) International Filing Date: (25) Filing Language: (26) Publication Language: PCT/NL2013/050486 3 July 2013 (03.07.2013) English (30) Priority Data: 2009147 6 July 2012 (06.07.2012) English NL (71) Applicant: BESI NETHERLANDS B.V. [NL/NL]; Ratio 6, NL-6921 RW Duiven (NL). (72) Inventor: HUISSTEDE, Jurgen Hendrikus Gerhardus; Oude Haaksbergerweg 18, NL-7471 LM Goor (NL). (74) Agent: VAN DEN HEUVEL, Ir. H.Th.; Julianaplein 4, NL-5211 BC's Hertogenbosch (NL). (81) Designated States (unless otherwise indicated, for every kind of national protection available)'. AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (84) Designated States (unless otherwise indicated, for every kind of regional protection available)'. ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG). Declarations under Rule 4.17 : — as to applicant's entitlement to apply for and be granted a patent (Rule 4.17(H)) Published: — with international search report (Art. 21(3)) (54) Title: DEVICE AND METHOD FOR SEPARATING, AT LEAST PARTIALLY DRYING AND INSPECTING ELECTRON­ IC COMPONENTS 32 31 40 41 45 o\ i-H l> o o Fig. 3 © CJ O & (57) Abstract: The invention relates to a device for separating, at least partially drying and inspecting electronic components, com­ prising: separating means, carrier a for the electronic components, heating source a for generating radiant heat, displacing means for displacing the carrier for the electronic components relative to the heating source, and visual inspection means. The heating source is configured to generate radiant heat in order to selectively heat and evaporate moisture present on the separated electronic compon - ents.
SG11201407822VA 2012-07-06 2013-07-03 Device and method for separating, at least partially drying and inspecting electronic components SG11201407822VA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL2009147A NL2009147C2 (en) 2012-07-06 2012-07-06 DEVICE AND METHOD FOR SEPARATING, AT LEAST PARTIAL DRYING AND INSPECTION OF ELECTRONIC COMPONENTS.
PCT/NL2013/050486 WO2014007619A1 (en) 2012-07-06 2013-07-03 Device and method for separating, at least partially drying and inspecting electronic components

Publications (1)

Publication Number Publication Date
SG11201407822VA true SG11201407822VA (en) 2014-12-30

Family

ID=46800349

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201407822VA SG11201407822VA (en) 2012-07-06 2013-07-03 Device and method for separating, at least partially drying and inspecting electronic components

Country Status (11)

Country Link
US (1) US9435584B2 (en)
KR (1) KR102354147B1 (en)
CN (1) CN104396001A (en)
DE (1) DE112013003413T5 (en)
MX (1) MX344327B (en)
MY (1) MY165968A (en)
NL (1) NL2009147C2 (en)
PH (1) PH12014502583B1 (en)
SG (1) SG11201407822VA (en)
TW (1) TWI614842B (en)
WO (1) WO2014007619A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL2009147C2 (en) * 2012-07-06 2014-01-07 Fico Bv DEVICE AND METHOD FOR SEPARATING, AT LEAST PARTIAL DRYING AND INSPECTION OF ELECTRONIC COMPONENTS.
CN108789892B (en) * 2018-07-26 2020-06-02 浙江贝盛新材料科技有限公司 Cutting production line of high-efficient type monocrystalline silicon piece
CN108943453B (en) * 2018-07-26 2020-05-22 浙江贝盛新材料科技有限公司 Texturing cutting device for producing monocrystalline silicon wafers
CN112338833A (en) * 2020-11-24 2021-02-09 夏爱成 Detect computer storage USB flash disk intelligence manufacture equipment of humidity

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02312233A (en) * 1989-05-26 1990-12-27 Mitsubishi Electric Corp Drying up process for semiconductor wafer
US5732476A (en) * 1992-02-10 1998-03-31 Pare; J.R. Jocelyn Microwave-assisted separations using volatiles, and apparatus therefor
KR20060113734A (en) * 2003-11-18 2006-11-02 쓰리엠 이노베이티브 프로퍼티즈 컴파니 Electroluminescent devices and methods of making electroluminescent devices including a color conversion element
JP2005191550A (en) * 2003-12-01 2005-07-14 Tokyo Ohka Kogyo Co Ltd Method for sticking substrates
US7974739B2 (en) * 2006-06-27 2011-07-05 Illinois Tool Works Inc. System and method having arm with cable passage through joint to infrared lamp
JP2008160011A (en) * 2006-12-26 2008-07-10 Tokyo Electron Ltd Substrate treating equipment
JP5404064B2 (en) * 2008-01-16 2014-01-29 株式会社半導体エネルギー研究所 Laser processing apparatus and semiconductor substrate manufacturing method
NL2001642C2 (en) * 2008-05-30 2009-12-01 Fico Bv Device and method for drying separated electronic components.
ITUD20080136A1 (en) * 2008-06-13 2009-12-14 Baccini S P A PLANT FOR PROCESSING PLATES FOR ELECTRONIC CIRCUITS
DE102008063229A1 (en) * 2008-12-19 2010-07-01 Dehn, Michael C. Felt material with barrier function and component made of felt
NL2005626C2 (en) * 2010-11-04 2012-05-07 Fico Bv CARRIER FOR SEPARATED ELECTRONIC COMPONENTS AND METHOD FOR VISUAL INSPECTION OF SEPARATED ELECTRONIC COMPONENTS.
NL2009147C2 (en) * 2012-07-06 2014-01-07 Fico Bv DEVICE AND METHOD FOR SEPARATING, AT LEAST PARTIAL DRYING AND INSPECTION OF ELECTRONIC COMPONENTS.
US8904668B2 (en) * 2012-10-11 2014-12-09 Eastman Kodak Company Applying heating liquid to remove moistening liquid

Also Published As

Publication number Publication date
TW201411779A (en) 2014-03-16
KR102354147B1 (en) 2022-01-24
DE112013003413T5 (en) 2015-03-26
KR20150035600A (en) 2015-04-06
CN104396001A (en) 2015-03-04
MX2014014608A (en) 2015-07-06
TWI614842B (en) 2018-02-11
MY165968A (en) 2018-05-18
US9435584B2 (en) 2016-09-06
NL2009147C2 (en) 2014-01-07
US20150143711A1 (en) 2015-05-28
PH12014502583A1 (en) 2015-01-21
MX344327B (en) 2016-12-13
PH12014502583B1 (en) 2015-01-21
WO2014007619A1 (en) 2014-01-09

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