SG111262A1 - Ultrasonic shower cleaning apparatus of double-side cleaning type - Google Patents

Ultrasonic shower cleaning apparatus of double-side cleaning type

Info

Publication number
SG111262A1
SG111262A1 SG200406200A SG200406200A SG111262A1 SG 111262 A1 SG111262 A1 SG 111262A1 SG 200406200 A SG200406200 A SG 200406200A SG 200406200 A SG200406200 A SG 200406200A SG 111262 A1 SG111262 A1 SG 111262A1
Authority
SG
Singapore
Prior art keywords
double
ultrasonic shower
cleaning apparatus
type
cleaning
Prior art date
Application number
SG200406200A
Other languages
English (en)
Inventor
Takahashi Seigo
Ohkawara Junpei
Suzuki Kazunari
Original Assignee
Kaijo Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kaijo Kk filed Critical Kaijo Kk
Publication of SG111262A1 publication Critical patent/SG111262A1/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/02—Cleaning by the force of jets or sprays
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B2203/00—Details of cleaning machines or methods involving the use or presence of liquid or steam
    • B08B2203/02—Details of machines or methods for cleaning by the force of jets or sprays
    • B08B2203/0288—Ultra or megasonic jets
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S134/00—Cleaning and liquid contact with solids
    • Y10S134/902—Semiconductor wafer
SG200406200A 2003-10-22 2004-10-19 Ultrasonic shower cleaning apparatus of double-side cleaning type SG111262A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003361542A JP3981064B2 (ja) 2003-10-22 2003-10-22 両面式超音波シャワー洗浄装置

Publications (1)

Publication Number Publication Date
SG111262A1 true SG111262A1 (en) 2005-05-30

Family

ID=34509945

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200406200A SG111262A1 (en) 2003-10-22 2004-10-19 Ultrasonic shower cleaning apparatus of double-side cleaning type

Country Status (5)

Country Link
US (1) US7422024B2 (zh)
JP (1) JP3981064B2 (zh)
CN (1) CN1319657C (zh)
SG (1) SG111262A1 (zh)
TW (1) TWI244946B (zh)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4691638B2 (ja) * 2005-07-13 2011-06-01 本多電子株式会社 超音波洗浄装置
US7942158B2 (en) * 2005-07-13 2011-05-17 Honda Electronics Co., Ltd. Ultrasonic edge washing apparatus
CN101912853B (zh) * 2010-09-03 2011-11-02 任保林 超声波脉冲水射流管壁除锈清洗装置
DE202010016908U1 (de) * 2010-12-22 2011-12-29 Trützschler Nonwovens Gmbh Vorrichtung zum Reinigen eines Düsenstreifens für Wasserstrahlvernadelungsanlagen
CN102041795B (zh) * 2011-01-17 2012-06-20 任保林 超声波脉冲射流交通标志线清洗车
CN104128285B (zh) * 2014-07-16 2016-08-24 深圳市华星光电技术有限公司 一种喷嘴清洁装置及其清洁方法
US9737914B2 (en) 2014-07-16 2017-08-22 Shenzhen China Star Optoelectronics Technology Co., Ltd. Nozzle cleaning device and method of using the same
CN106733920A (zh) * 2017-03-14 2017-05-31 江苏伟建工具科技有限公司 一种用于高速钢清洁烘干一体的超声波清洗机
CN108620239A (zh) * 2017-03-24 2018-10-09 北京淘氪科技有限公司 喷嘴及应用其的自清洗免维护静电净化系统
JP7364322B2 (ja) 2018-02-23 2023-10-18 株式会社荏原製作所 基板洗浄装置および基板洗浄方法
CN108993980A (zh) * 2018-10-29 2018-12-14 昆山裕磊机械设备有限公司 隧道式高效超声波清洗机
CN109107968A (zh) * 2018-10-29 2019-01-01 昆山裕磊机械设备有限公司 高效节水式超声波清洗方法
DE102020103292A1 (de) * 2020-02-10 2021-08-12 Umicore Ag & Co. Kg Verwendung von Ultraschall zur Reinigung von Wandflussfiltersubstraten
CN115533628A (zh) * 2022-09-09 2022-12-30 天津大学 基于液柱耦合方式的聚焦超声表面强化系统

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE405259B (sv) 1975-03-25 1978-11-27 Wennberg Ab C J Sett vid avstrykning, tvettning i motstrom och torkning av i nagot medium ytbehandlade foremal av material i langa lengder samt anordning for genomforande av forfarandet
US4326553A (en) 1980-08-28 1982-04-27 Rca Corporation Megasonic jet cleaner apparatus
DK157608C (da) 1986-08-14 1990-06-18 Ove Jensen Aggregat til rensning af fiskegarn
US4834124A (en) 1987-01-09 1989-05-30 Honda Electronics Co., Ltd. Ultrasonic cleaning device
JPH02246115A (ja) * 1989-03-17 1990-10-01 Hitachi Ltd 精密洗浄方法およびそれに用いる洗浄液ならびに乾燥方法
JPH05134398A (ja) 1991-11-15 1993-05-28 Seiko Epson Corp フオトマスクの洗浄装置及びフオトマスクの製造方法及び半導体装置の製造方法
CN1030043C (zh) * 1992-02-12 1995-10-18 住友特殊金属株式会社 超声波连续清洗装置
JPH07159980A (ja) * 1993-12-06 1995-06-23 Nikon Corp 基板洗浄装置
WO1995017971A1 (fr) 1993-12-24 1995-07-06 Toto Ltd. Appareil d'injection d'eau de rinçage et dispositif destine au lavage de la vaisselle et equipe d'un tel appareil
JP3369418B2 (ja) 1996-11-25 2003-01-20 大日本スクリーン製造株式会社 超音波振動子、超音波洗浄ノズル、超音波洗浄装置、基板洗浄装置、基板洗浄処理システムおよび超音波洗浄ノズル製造方法
JP3256198B2 (ja) 1999-06-23 2002-02-12 株式会社カイジョー 超音波シャワー洗浄装置
JP4481394B2 (ja) 1999-08-13 2010-06-16 株式会社荏原製作所 半導体基板の洗浄装置及びその洗浄方法
US6904637B2 (en) * 2001-10-03 2005-06-14 Applied Materials, Inc. Scrubber with sonic nozzle

Also Published As

Publication number Publication date
US20050087219A1 (en) 2005-04-28
JP2005125174A (ja) 2005-05-19
JP3981064B2 (ja) 2007-09-26
CN1608749A (zh) 2005-04-27
US7422024B2 (en) 2008-09-09
TWI244946B (en) 2005-12-11
CN1319657C (zh) 2007-06-06
TW200514630A (en) 2005-05-01

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