SG103816A1 - Adjustable and extended guide rings - Google Patents
Adjustable and extended guide ringsInfo
- Publication number
- SG103816A1 SG103816A1 SG200001837A SG200001837A SG103816A1 SG 103816 A1 SG103816 A1 SG 103816A1 SG 200001837 A SG200001837 A SG 200001837A SG 200001837 A SG200001837 A SG 200001837A SG 103816 A1 SG103816 A1 SG 103816A1
- Authority
- SG
- Singapore
- Prior art keywords
- adjustable
- guide rings
- extended guide
- extended
- rings
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/27—Work carriers
- B24B37/30—Work carriers for single side lapping of plane surfaces
- B24B37/32—Retaining rings
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/354,853 US6206768B1 (en) | 1999-07-29 | 1999-07-29 | Adjustable and extended guide rings |
Publications (1)
Publication Number | Publication Date |
---|---|
SG103816A1 true SG103816A1 (en) | 2004-05-26 |
Family
ID=23395178
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG200001837A SG103816A1 (en) | 1999-07-29 | 2000-03-30 | Adjustable and extended guide rings |
SG200402737A SG117491A1 (en) | 1999-07-29 | 2000-03-30 | Adjustable and extended guide rings |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG200402737A SG117491A1 (en) | 1999-07-29 | 2000-03-30 | Adjustable and extended guide rings |
Country Status (3)
Country | Link |
---|---|
US (2) | US6206768B1 (ja) |
JP (1) | JP2001044151A (ja) |
SG (2) | SG103816A1 (ja) |
Families Citing this family (32)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6244946B1 (en) | 1997-04-08 | 2001-06-12 | Lam Research Corporation | Polishing head with removable subcarrier |
US6666756B1 (en) * | 2000-03-31 | 2003-12-23 | Lam Research Corporation | Wafer carrier head assembly |
US7029381B2 (en) * | 2000-07-31 | 2006-04-18 | Aviza Technology, Inc. | Apparatus and method for chemical mechanical polishing of substrates |
TW577785B (en) * | 2000-07-31 | 2004-03-01 | Silicon Valley Group | Apparatus and method for chemical mechanical polishing of substrates |
US6652357B1 (en) * | 2000-09-22 | 2003-11-25 | Lam Research Corporation | Methods for controlling retaining ring and wafer head tilt for chemical mechanical polishing |
KR100470227B1 (ko) * | 2001-06-07 | 2005-02-05 | 두산디앤디 주식회사 | 화학기계적 연마장치의 캐리어 헤드 |
KR100416808B1 (ko) * | 2002-02-04 | 2004-01-31 | 삼성전자주식회사 | 반도체소자 제조용 씨엠피장치의 연마헤드 및 이를 구비한씨엠피장치 |
US6716299B1 (en) * | 2002-06-28 | 2004-04-06 | Lam Research Corporation | Profiled retaining ring for chemical mechanical planarization |
JP4490822B2 (ja) * | 2002-09-27 | 2010-06-30 | Sumco Techxiv株式会社 | 研磨装置およびウェーハ研磨方法 |
AU2003300375A1 (en) | 2002-10-11 | 2004-05-04 | Semplastics, L.L.C. | Retaining ring for use on a carrier of a polishing apparatus |
TW555148U (en) * | 2002-11-11 | 2003-09-21 | Nanya Technology Corp | Guide-ring disassembling device |
US6974371B2 (en) * | 2003-04-30 | 2005-12-13 | Applied Materials, Inc. | Two part retaining ring |
US6869348B1 (en) * | 2003-10-07 | 2005-03-22 | Strasbaugh | Retaining ring for wafer carriers |
US7063604B2 (en) * | 2004-03-05 | 2006-06-20 | Strasbaugh | Independent edge control for CMP carriers |
US20070010180A1 (en) * | 2005-07-06 | 2007-01-11 | Agere Systems, Inc. | Carrier employing snap-fitted membrane retainer |
US7530153B2 (en) * | 2005-09-21 | 2009-05-12 | Applied Materials, Inc. | Attaching components of a carrier head |
US7210991B1 (en) | 2006-04-03 | 2007-05-01 | Applied Materials, Inc. | Detachable retaining ring |
BRPI0713252C1 (pt) | 2006-07-14 | 2021-05-25 | Genentech Inc | processo para a recuperação de fator de crescimento endotelial vascular (vegf) recombinante reenovelado |
KR100814068B1 (ko) | 2007-03-30 | 2008-03-17 | 티아이씨덕흥 주식회사 | Cmp 장비의 웨이퍼 연마 헤드 |
JP5199691B2 (ja) * | 2008-02-13 | 2013-05-15 | 株式会社荏原製作所 | 研磨装置 |
KR100899336B1 (ko) | 2009-02-03 | 2009-05-27 | 지앤피테크놀로지 주식회사 | 화학적 기계적 연마 장치의 연마 헤드 |
US20110275216A1 (en) * | 2010-05-04 | 2011-11-10 | Macronix International Co., Ltd. | Two step chemical-mechanical polishing process |
US9272387B2 (en) * | 2011-04-13 | 2016-03-01 | Applied Materials, Inc. | Carrier head with shims |
US9393668B2 (en) * | 2012-07-12 | 2016-07-19 | Taiwan Semiconductor Manufacturing Company Limited | Polishing head with alignment gear |
KR200465446Y1 (ko) | 2012-09-09 | 2013-02-19 | 전용준 | 캐리어 헤드 하우징과 보유 링 간의 결합 상태 점검 기능을 갖는 화학 기계적 연마 장치의 캐리어 헤드 |
US10898987B2 (en) | 2015-06-01 | 2021-01-26 | Ebara Corporation | Table for holding workpiece and processing apparatus with the table |
JP6398939B2 (ja) * | 2015-10-07 | 2018-10-03 | 信越半導体株式会社 | テンプレートの測定方法及び評価方法 |
FR3055001B1 (fr) * | 2016-08-10 | 2022-04-01 | Safran Aircraft Engines | Systeme de changement de pas equipe de moyens de reglage du pas des pales et turbomachine correspondante |
CN110802507A (zh) * | 2019-11-11 | 2020-02-18 | 上海华力微电子有限公司 | 研磨头和化学机械研磨设备 |
CN111347345B (zh) * | 2020-04-16 | 2020-10-16 | 华海清科股份有限公司 | 一种用于化学机械抛光的保持环和承载头 |
CN111702656B (zh) * | 2020-07-04 | 2021-08-17 | 林燕 | 一种间距可控的化学机械研磨头 |
CN112757143B (zh) * | 2020-12-30 | 2022-11-25 | 上海理工大学 | 用于轴承外圈内滚道的可替换式气囊抛光装置 |
Family Cites Families (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5377451A (en) * | 1993-02-23 | 1995-01-03 | Memc Electronic Materials, Inc. | Wafer polishing apparatus and method |
US5624299A (en) * | 1993-12-27 | 1997-04-29 | Applied Materials, Inc. | Chemical mechanical polishing apparatus with improved carrier and method of use |
US5423716A (en) | 1994-01-05 | 1995-06-13 | Strasbaugh; Alan | Wafer-handling apparatus having a resilient membrane which holds wafer when a vacuum is applied |
JP2933488B2 (ja) * | 1994-08-10 | 1999-08-16 | 日本電気株式会社 | 研磨方法および研磨装置 |
JP3158934B2 (ja) * | 1995-02-28 | 2001-04-23 | 三菱マテリアル株式会社 | ウェーハ研磨装置 |
US5681215A (en) | 1995-10-27 | 1997-10-28 | Applied Materials, Inc. | Carrier head design for a chemical mechanical polishing apparatus |
US5569062A (en) * | 1995-07-03 | 1996-10-29 | Speedfam Corporation | Polishing pad conditioning |
US5876273A (en) | 1996-04-01 | 1999-03-02 | Kabushiki Kaisha Toshiba | Apparatus for polishing a wafer |
JP3183388B2 (ja) * | 1996-07-12 | 2001-07-09 | 株式会社東京精密 | 半導体ウェーハ研磨装置 |
JP3106418B2 (ja) * | 1996-07-30 | 2000-11-06 | 株式会社東京精密 | 研磨装置 |
US5851140A (en) | 1997-02-13 | 1998-12-22 | Integrated Process Equipment Corp. | Semiconductor wafer polishing apparatus with a flexible carrier plate |
US6244946B1 (en) * | 1997-04-08 | 2001-06-12 | Lam Research Corporation | Polishing head with removable subcarrier |
DE69813374T2 (de) * | 1997-05-28 | 2003-10-23 | Tokyo Seimitsu Co Ltd | Halbleiterscheibe Poliervorrichtung mit Halterring |
US5993302A (en) * | 1997-12-31 | 1999-11-30 | Applied Materials, Inc. | Carrier head with a removable retaining ring for a chemical mechanical polishing apparatus |
US5989104A (en) * | 1998-01-12 | 1999-11-23 | Speedfam-Ipec Corporation | Workpiece carrier with monopiece pressure plate and low gimbal point |
US6030275A (en) * | 1998-03-17 | 2000-02-29 | International Business Machines Corporation | Variable control of carrier curvature with direct feedback loop |
US6196904B1 (en) * | 1998-03-25 | 2001-03-06 | Ebara Corporation | Polishing apparatus |
US5985094A (en) * | 1998-05-12 | 1999-11-16 | Speedfam-Ipec Corporation | Semiconductor wafer carrier |
US6089960A (en) * | 1998-06-03 | 2000-07-18 | One Source Manufacturing | Semiconductor wafer polishing mechanism |
US6283828B1 (en) * | 1998-11-09 | 2001-09-04 | Tokyo Seimitsu Co., Ltd. | Wafer polishing apparatus |
US6089961A (en) * | 1998-12-07 | 2000-07-18 | Speedfam-Ipec Corporation | Wafer polishing carrier and ring extension therefor |
US6276998B1 (en) * | 1999-02-25 | 2001-08-21 | Applied Materials, Inc. | Padless substrate carrier |
US6368189B1 (en) * | 1999-03-03 | 2002-04-09 | Mitsubishi Materials Corporation | Apparatus and method for chemical-mechanical polishing (CMP) head having direct pneumatic wafer polishing pressure |
JP3294600B1 (ja) * | 2001-02-28 | 2002-06-24 | 不二越機械工業株式会社 | ウェーハの研磨装置 |
-
1999
- 1999-07-29 US US09/354,853 patent/US6206768B1/en not_active Expired - Fee Related
-
2000
- 2000-03-30 SG SG200001837A patent/SG103816A1/en unknown
- 2000-03-30 SG SG200402737A patent/SG117491A1/en unknown
- 2000-04-21 JP JP2000120246A patent/JP2001044151A/ja active Pending
-
2001
- 2001-03-14 US US09/804,725 patent/US6645057B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US6206768B1 (en) | 2001-03-27 |
US20010041521A1 (en) | 2001-11-15 |
JP2001044151A (ja) | 2001-02-16 |
SG117491A1 (en) | 2005-12-29 |
US6645057B2 (en) | 2003-11-11 |
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