SG10202009739UA - A nozzle and a substrate cleaning device - Google Patents

A nozzle and a substrate cleaning device

Info

Publication number
SG10202009739UA
SG10202009739UA SG10202009739UA SG10202009739UA SG10202009739UA SG 10202009739U A SG10202009739U A SG 10202009739UA SG 10202009739U A SG10202009739U A SG 10202009739UA SG 10202009739U A SG10202009739U A SG 10202009739UA SG 10202009739U A SG10202009739U A SG 10202009739UA
Authority
SG
Singapore
Prior art keywords
nozzle
cleaning device
substrate cleaning
substrate
cleaning
Prior art date
Application number
SG10202009739UA
Inventor
Yoichi Nakagawa
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Publication of SG10202009739UA publication Critical patent/SG10202009739UA/en

Links

SG10202009739UA 2019-10-04 2020-09-30 A nozzle and a substrate cleaning device SG10202009739UA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019183439 2019-10-04
JP2020139153A JP2021061389A (en) 2019-10-04 2020-08-20 Nozzle and substrate cleaning device

Publications (1)

Publication Number Publication Date
SG10202009739UA true SG10202009739UA (en) 2021-05-28

Family

ID=75381441

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10202009739UA SG10202009739UA (en) 2019-10-04 2020-09-30 A nozzle and a substrate cleaning device

Country Status (4)

Country Link
JP (1) JP2021061389A (en)
KR (1) KR20210040789A (en)
SG (1) SG10202009739UA (en)
TW (1) TW202120208A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114160500A (en) * 2021-11-29 2022-03-11 长江存储科技有限责任公司 Wafer cleaning device

Also Published As

Publication number Publication date
KR20210040789A (en) 2021-04-14
JP2021061389A (en) 2021-04-15
TW202120208A (en) 2021-06-01

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