SG10202008562RA - Cutting blade and manufacturing method of cutting blade - Google Patents

Cutting blade and manufacturing method of cutting blade

Info

Publication number
SG10202008562RA
SG10202008562RA SG10202008562RA SG10202008562RA SG10202008562RA SG 10202008562R A SG10202008562R A SG 10202008562RA SG 10202008562R A SG10202008562R A SG 10202008562RA SG 10202008562R A SG10202008562R A SG 10202008562RA SG 10202008562R A SG10202008562R A SG 10202008562RA
Authority
SG
Singapore
Prior art keywords
cutting blade
manufacturing
blade
cutting
Prior art date
Application number
SG10202008562RA
Inventor
Fukazawa Takashi
Hattori Shigeru
Original Assignee
Disco Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Disco Corp filed Critical Disco Corp
Publication of SG10202008562RA publication Critical patent/SG10202008562RA/en

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/02Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
    • B28D5/022Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67092Apparatus for mechanical treatment
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B26HAND CUTTING TOOLS; CUTTING; SEVERING
    • B26DCUTTING; DETAILS COMMON TO MACHINES FOR PERFORATING, PUNCHING, CUTTING-OUT, STAMPING-OUT OR SEVERING
    • B26D1/00Cutting through work characterised by the nature or movement of the cutting member or particular materials not otherwise provided for; Apparatus or machines therefor; Cutting members therefor
    • B26D1/0006Cutting members therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D5/00Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting only by their periphery; Bushings or mountings therefor
    • B24D5/12Cut-off wheels
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23DPLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
    • B23D65/00Making tools for sawing machines or sawing devices for use in cutting any kind of material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00Other grinding machines or devices
    • B24B27/06Grinders for cutting-off
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00Component parts such as frames, beds, carriages, headstocks
    • B24B41/06Work supports, e.g. adjustable steadies
    • B24B41/068Table-like supports for panels, sheets or the like
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D18/00Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
    • B24D18/0009Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for using moulds or presses
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3105After-treatment
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B26HAND CUTTING TOOLS; CUTTING; SEVERING
    • B26DCUTTING; DETAILS COMMON TO MACHINES FOR PERFORATING, PUNCHING, CUTTING-OUT, STAMPING-OUT OR SEVERING
    • B26D1/00Cutting through work characterised by the nature or movement of the cutting member or particular materials not otherwise provided for; Apparatus or machines therefor; Cutting members therefor
    • B26D1/0006Cutting members therefor
    • B26D2001/002Materials or surface treatments therefor, e.g. composite materials
SG10202008562RA 2019-09-12 2020-09-03 Cutting blade and manufacturing method of cutting blade SG10202008562RA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2019166094A JP2021041502A (en) 2019-09-12 2019-09-12 Cutting blade, manufacturing method for cutting blade and cutting method for wafer

Publications (1)

Publication Number Publication Date
SG10202008562RA true SG10202008562RA (en) 2021-04-29

Family

ID=74686219

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10202008562RA SG10202008562RA (en) 2019-09-12 2020-09-03 Cutting blade and manufacturing method of cutting blade

Country Status (7)

Country Link
US (1) US20210078204A1 (en)
JP (2) JP2021041502A (en)
KR (1) KR20210031603A (en)
CN (1) CN112476257A (en)
DE (1) DE102020211447A1 (en)
SG (1) SG10202008562RA (en)
TW (1) TW202111790A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20230178536A1 (en) * 2021-12-07 2023-06-08 Taiwan Semiconductor Manufacturing Co., Ltd. Trimming and Sawing Processes in the Formation of Wafer-Form Packages
TWI832179B (en) * 2022-03-22 2024-02-11 盛新材料科技股份有限公司 Wafer positioning fixture and wafer processing method using the same
CN116377416B (en) * 2023-03-08 2023-12-12 北京爱克瑞特金刚石工具有限公司 Scribing cutter and manufacturing method thereof

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6271102B1 (en) * 1998-02-27 2001-08-07 International Business Machines Corporation Method and system for dicing wafers, and semiconductor structures incorporating the products thereof
JP2001030175A (en) * 1999-07-21 2001-02-06 Asahi Diamond Industrial Co Ltd Super grinding particle cutter
EP1126003B1 (en) * 2000-02-16 2004-04-28 Mitsubishi Materials Corporation Resin bonded abrasive tool
JP2004188475A (en) 2002-12-13 2004-07-08 Disco Abrasive Syst Ltd Laser machining method
JP2005064230A (en) 2003-08-12 2005-03-10 Disco Abrasive Syst Ltd Dividing method of plate-shaped article
JP2007111827A (en) * 2005-10-20 2007-05-10 Read Co Ltd DIAMOND OR cBN GRINDING STONE, AND ITS MANUFACTURING METHOD
JP5395446B2 (en) * 2009-01-22 2014-01-22 ルネサスエレクトロニクス株式会社 Semiconductor device and manufacturing method of semiconductor device
JP6223237B2 (en) * 2014-03-07 2017-11-01 株式会社ディスコ Cutting equipment
JP2018094646A (en) * 2016-12-09 2018-06-21 株式会社ディスコ Cutting blade
JP6814663B2 (en) * 2017-03-01 2021-01-20 株式会社ディスコ Cutting method of work piece
JP7114169B2 (en) * 2018-02-14 2022-08-08 株式会社ディスコ Cutting blade shaping method

Also Published As

Publication number Publication date
CN112476257A (en) 2021-03-12
US20210078204A1 (en) 2021-03-18
TW202111790A (en) 2021-03-16
JP2024026699A (en) 2024-02-28
DE102020211447A1 (en) 2021-03-18
KR20210031603A (en) 2021-03-22
JP2021041502A (en) 2021-03-18

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