SG10202005193YA - Jig for attaching and detaching cleaning member - Google Patents

Jig for attaching and detaching cleaning member

Info

Publication number
SG10202005193YA
SG10202005193YA SG10202005193YA SG10202005193YA SG10202005193YA SG 10202005193Y A SG10202005193Y A SG 10202005193YA SG 10202005193Y A SG10202005193Y A SG 10202005193YA SG 10202005193Y A SG10202005193Y A SG 10202005193YA SG 10202005193Y A SG10202005193Y A SG 10202005193YA
Authority
SG
Singapore
Prior art keywords
jig
attaching
cleaning member
detaching
detaching cleaning
Prior art date
Application number
SG10202005193YA
Inventor
Tomoaki Fujimoto
Shuichi Suemasa
Tomoatsu Ishibashi
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Publication of SG10202005193YA publication Critical patent/SG10202005193YA/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H01L21/67046—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly scrubbing means, e.g. brushes
    • B08B1/12—
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Cleaning In General (AREA)
SG10202005193YA 2019-06-11 2020-06-02 Jig for attaching and detaching cleaning member SG10202005193YA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2019108375A JP7165104B2 (en) 2019-06-11 2019-06-11 Attachment/detachment jig for cleaning member

Publications (1)

Publication Number Publication Date
SG10202005193YA true SG10202005193YA (en) 2021-01-28

Family

ID=73743579

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10202005193YA SG10202005193YA (en) 2019-06-11 2020-06-02 Jig for attaching and detaching cleaning member

Country Status (3)

Country Link
US (1) US11524322B2 (en)
JP (1) JP7165104B2 (en)
SG (1) SG10202005193YA (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20220023992A1 (en) * 2020-07-23 2022-01-27 Changxin Memory Technologies, Inc. Replacing tool for sponge brush, method for installing sponge brush, and semiconductor chemical mechanical polishing apparatus
CN113877873B (en) * 2021-10-29 2023-06-13 河南英利特科技有限公司 New energy automobile main shaft retrieves belt cleaning device

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US74514A (en) * 1868-02-18 david gb
US1095054A (en) * 1913-08-26 1914-04-28 Robert Wiesenfeld Fish-tongs.
US1360114A (en) * 1920-05-06 1920-11-23 Kay Emily Grace Lifting-tongs
US1553734A (en) * 1924-06-28 1925-09-15 Payton L Wilson Tool for extracting frames from beehives
US1787331A (en) * 1929-11-25 1930-12-30 Donald R Wilson Nail tongs
US2016356A (en) * 1933-09-30 1935-10-08 Alberg Henry Tongs
US1974255A (en) * 1933-12-15 1934-09-18 William S Bechtold Bottle carrier
US2507368A (en) * 1947-02-24 1950-05-09 Arko Tool & Die Company Lifting tongs for concrete blocks
US2643151A (en) * 1950-06-27 1953-06-23 Tony R Zupancic Fisherman's pliers
US2997326A (en) * 1960-01-11 1961-08-22 Daum Horace Arthur Locking handle grip
US3384407A (en) * 1966-03-07 1968-05-21 Thrash James Andrews Home fireplace log carrier
US5588689A (en) * 1995-04-07 1996-12-31 Ochs; Eric W. Dental instrument holder
US5979961A (en) * 1998-01-26 1999-11-09 Carey Consulting, Inc. Tube bundle lifting device
JP4437194B2 (en) 2004-02-24 2010-03-24 芝浦メカトロニクス株式会社 Cleaning brush attachment / detachment jig
JP4903090B2 (en) 2007-06-14 2012-03-21 芝浦メカトロニクス株式会社 Brush cleaning device
JP6632900B2 (en) 2016-02-02 2020-01-22 株式会社荏原製作所 Substrate cleaning apparatus, cleaning tool and substrate processing apparatus, and method of removing, attaching and replacing cleaning tool
US10285384B2 (en) 2017-04-09 2019-05-14 Little Mule Bee Supply, Llc Bee frame extractor grip

Also Published As

Publication number Publication date
US11524322B2 (en) 2022-12-13
JP2020202300A (en) 2020-12-17
JP7165104B2 (en) 2022-11-02
US20200391258A1 (en) 2020-12-17

Similar Documents

Publication Publication Date Title
GB202110529D0 (en) Cleaning robot
SG11202012233SA (en) End effector and member mounting method
SG10202000778YA (en) Cleaning member attaching part, cleaning member assembly and substrate cleaning apparatus
GB202202254D0 (en) Inspection robot
GB2596910B (en) Holding assembly
IL269765A (en) Loose mode for robot
SG10202005193YA (en) Jig for attaching and detaching cleaning member
SG11202011792QA (en) End effector and member mounting method
GB201813583D0 (en) Cleaning robot
EP4019185A4 (en) Welding jig
SG11202111849UA (en) Toothbrush and device for attaching and/or detaching a toothbrush head
GB2588174B (en) A jig and use thereof
PL3756800T3 (en) Tool holder with elastic clamping
EP3998145A4 (en) Jig
GB201820156D0 (en) Universal jig
HUE056733T2 (en) Method for the purification of aniline
GB2571913B (en) Repositioning jig
GB2576024B (en) Socket holding frame assembly
HUE058944T2 (en) Method for the depletion of 2-methoxyethanol (moe)
EP3922366C0 (en) Cleaning jig
GB2584092B (en) Tool holding frame
GB2588808B (en) A jig
EP3812062C0 (en) Tool for joining components
ZA201907216B (en) Fishing jig
IL282841A (en) Automated gemstone detachment