SG10201804792XA - Method and apparatus for aligning and inspecting electronic components - Google Patents

Method and apparatus for aligning and inspecting electronic components

Info

Publication number
SG10201804792XA
SG10201804792XA SG10201804792XA SG10201804792XA SG10201804792XA SG 10201804792X A SG10201804792X A SG 10201804792XA SG 10201804792X A SG10201804792X A SG 10201804792XA SG 10201804792X A SG10201804792X A SG 10201804792XA SG 10201804792X A SG10201804792X A SG 10201804792XA
Authority
SG
Singapore
Prior art keywords
electronic components
inspection devices
inspecting
aligning
electronic component
Prior art date
Application number
SG10201804792XA
Inventor
Chi Wah Cheng
Kai Fung Lau
Hoi Shuen Tang
Original Assignee
Asm Tech Singapore Pte Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asm Tech Singapore Pte Ltd filed Critical Asm Tech Singapore Pte Ltd
Publication of SG10201804792XA publication Critical patent/SG10201804792XA/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • G01N21/9503—Wafer edge inspection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67271—Sorting devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/70—Determining position or orientation of objects or cameras
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H01L21/681—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/04—Batch operation; multisample devices
    • G01N2201/0415—Carrusel, sequential
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30108—Industrial image inspection
    • G06T2207/30148—Semiconductor; IC; Wafer

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Biochemistry (AREA)
  • Analytical Chemistry (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Quality & Reliability (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

METHOD AND APPARATUS FOR ALIGNING AND INSPECTING ELECTRONIC COMPONENTS 5 A method for automated alignment of electronic components with respect to one or more inspection devices for inspecting the electronic components, each electronic component having a plurality of side surfaces. The method comprises: positioning each electronic component relative to an imaging device; determining, by the imaging device, an angular offset and a linear offset between each side surface of 10 the electronic component and the one or more inspection devices; positioning each electronic component relative to the inspection devices; effecting alignment between each side surface and the one or more inspection devices in accordance with the respective angular and linear offsets; and inspecting each side surface after effecting alignment between the side surface and the inspection devices. 15 (Figure 6)
SG10201804792XA 2017-06-15 2018-06-05 Method and apparatus for aligning and inspecting electronic components SG10201804792XA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US15/623,458 US10338006B2 (en) 2017-06-15 2017-06-15 Method and apparatus for aligning and inspecting electronic components

Publications (1)

Publication Number Publication Date
SG10201804792XA true SG10201804792XA (en) 2019-01-30

Family

ID=64656522

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10201804792XA SG10201804792XA (en) 2017-06-15 2018-06-05 Method and apparatus for aligning and inspecting electronic components

Country Status (5)

Country Link
US (1) US10338006B2 (en)
CN (1) CN109119360B (en)
MY (1) MY184397A (en)
SG (1) SG10201804792XA (en)
TW (1) TWI730231B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7126285B1 (en) * 2021-09-17 2022-08-26 上野精機株式会社 electronic component processing equipment
CN116500063B (en) * 2023-06-27 2023-08-29 深圳市德斯戈智能科技有限公司 Wafer defect detection device capable of automatically aligning and system thereof

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008024457A (en) * 2006-07-22 2008-02-07 Tekkusu Iijii:Kk Carrying device
US9465383B2 (en) * 2013-06-27 2016-10-11 Asm Technology Singapore Pte Ltd Apparatus and method of using an imaging device for adjustment of at least one handling device for handling semiconductor components
TWI553763B (en) * 2014-01-23 2016-10-11 先進科技新加坡有限公司 A test handler that picks up electronic devices for testing and an orientation-changing apparatus for use in a test handler
JP5783652B2 (en) * 2014-06-04 2015-09-24 上野精機株式会社 Attitude correction device and electrical component inspection device
US9510460B2 (en) * 2014-09-17 2016-11-29 Asm Technology Singapore Pte Ltd Method for aligning electronic components
KR102662003B1 (en) * 2015-07-30 2024-04-29 램 리써치 코포레이션 Vision-based wafer notch position measurement
US10115620B2 (en) * 2015-08-31 2018-10-30 Asm Technology Singapore Pte Ltd Apparatus and method for adjustment of a handling device for handling electronic components
DE102015220746A1 (en) * 2015-10-23 2017-04-27 Ersa Gmbh Method and device for placing electronic components
US10473714B2 (en) * 2017-03-06 2019-11-12 Asm Technology Singapore Pte Ltd Method and apparatus for aligning electronic components

Also Published As

Publication number Publication date
MY184397A (en) 2021-04-01
TW201906061A (en) 2019-02-01
TWI730231B (en) 2021-06-11
US10338006B2 (en) 2019-07-02
US20180364180A1 (en) 2018-12-20
CN109119360A (en) 2019-01-01
CN109119360B (en) 2022-02-25

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