SG10201608779VA - Cleanspace fabricators for high technology manufacturing and assembly processing - Google Patents

Cleanspace fabricators for high technology manufacturing and assembly processing

Info

Publication number
SG10201608779VA
SG10201608779VA SG10201608779VA SG10201608779VA SG10201608779VA SG 10201608779V A SG10201608779V A SG 10201608779VA SG 10201608779V A SG10201608779V A SG 10201608779VA SG 10201608779V A SG10201608779V A SG 10201608779VA SG 10201608779V A SG10201608779V A SG 10201608779VA
Authority
SG
Singapore
Prior art keywords
high technology
assembly processing
technology manufacturing
cleanspace fabricators
cleanspace
Prior art date
Application number
SG10201608779VA
Inventor
Frederick A Flitsch
Original Assignee
Futrfab Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Futrfab Inc filed Critical Futrfab Inc
Publication of SG10201608779VA publication Critical patent/SG10201608779VA/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
    • H01L21/67178—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers vertical arrangement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/6719—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the processing chambers, e.g. modular processing chambers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
SG10201608779VA 2012-01-11 2013-01-09 Cleanspace fabricators for high technology manufacturing and assembly processing SG10201608779VA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US201261585368P 2012-01-11 2012-01-11

Publications (1)

Publication Number Publication Date
SG10201608779VA true SG10201608779VA (en) 2016-12-29

Family

ID=48781878

Family Applications (2)

Application Number Title Priority Date Filing Date
SG11201403183XA SG11201403183XA (en) 2012-01-11 2013-01-09 Cleanspace fabricators for high technology manufacturing and assembly processing
SG10201608779VA SG10201608779VA (en) 2012-01-11 2013-01-09 Cleanspace fabricators for high technology manufacturing and assembly processing

Family Applications Before (1)

Application Number Title Priority Date Filing Date
SG11201403183XA SG11201403183XA (en) 2012-01-11 2013-01-09 Cleanspace fabricators for high technology manufacturing and assembly processing

Country Status (6)

Country Link
KR (1) KR20140112020A (en)
CN (1) CN104081497B (en)
IL (1) IL233403A0 (en)
SG (2) SG11201403183XA (en)
TW (1) TWI608980B (en)
WO (1) WO2013106486A1 (en)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9059227B2 (en) * 2005-06-18 2015-06-16 Futrfab, Inc. Methods and apparatus for vertically orienting substrate processing tools in a clean space
US9339900B2 (en) * 2005-08-18 2016-05-17 Futrfab, Inc. Apparatus to support a cleanspace fabricator
US9457442B2 (en) * 2005-06-18 2016-10-04 Futrfab, Inc. Method and apparatus to support process tool modules in a cleanspace fabricator
US8229585B2 (en) * 2005-09-18 2012-07-24 Flitsch Frederick A Methods and apparatus for vertically orienting substrate processing tools in a clean space
US7513822B2 (en) * 2005-06-18 2009-04-07 Flitsch Frederick A Method and apparatus for a cleanspace fabricator
WO2007025199A2 (en) * 2005-08-26 2007-03-01 Flitsch Frederick A Multi-level cleanspace fabricator elevator system
US20110245964A1 (en) * 2010-04-06 2011-10-06 Sullivan Robert P Self Aligning Automated Material Handling System

Also Published As

Publication number Publication date
TWI608980B (en) 2017-12-21
TW201339074A (en) 2013-10-01
IL233403A0 (en) 2014-08-31
SG11201403183XA (en) 2014-09-26
CN104081497A (en) 2014-10-01
WO2013106486A1 (en) 2013-07-18
CN104081497B (en) 2017-02-22
KR20140112020A (en) 2014-09-22

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