IL233403A0 - Cleanspace fabricators for high technology manufacturing and assembly processing - Google Patents
Cleanspace fabricators for high technology manufacturing and assembly processingInfo
- Publication number
- IL233403A0 IL233403A0 IL233403A IL23340314A IL233403A0 IL 233403 A0 IL233403 A0 IL 233403A0 IL 233403 A IL233403 A IL 233403A IL 23340314 A IL23340314 A IL 23340314A IL 233403 A0 IL233403 A0 IL 233403A0
- Authority
- IL
- Israel
- Prior art keywords
- high technology
- assembly processing
- technology manufacturing
- cleanspace fabricators
- cleanspace
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
- H01L21/67178—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers vertical arrangement
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/6719—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the processing chambers, e.g. modular processing chambers
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201261585368P | 2012-01-11 | 2012-01-11 | |
| PCT/US2013/020904 WO2013106486A1 (en) | 2012-01-11 | 2013-01-09 | Cleanspace fabricators for high technology manufacturing and assembly processing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| IL233403A0 true IL233403A0 (en) | 2014-08-31 |
Family
ID=48781878
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| IL233403A IL233403A0 (en) | 2012-01-11 | 2014-06-26 | Cleanspace fabricators for high technology manufacturing and assembly processing |
Country Status (6)
| Country | Link |
|---|---|
| KR (1) | KR20140112020A (en) |
| CN (1) | CN104081497B (en) |
| IL (1) | IL233403A0 (en) |
| SG (2) | SG11201403183XA (en) |
| TW (1) | TWI608980B (en) |
| WO (1) | WO2013106486A1 (en) |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9059227B2 (en) * | 2005-06-18 | 2015-06-16 | Futrfab, Inc. | Methods and apparatus for vertically orienting substrate processing tools in a clean space |
| US9339900B2 (en) * | 2005-08-18 | 2016-05-17 | Futrfab, Inc. | Apparatus to support a cleanspace fabricator |
| US7513822B2 (en) * | 2005-06-18 | 2009-04-07 | Flitsch Frederick A | Method and apparatus for a cleanspace fabricator |
| US9457442B2 (en) * | 2005-06-18 | 2016-10-04 | Futrfab, Inc. | Method and apparatus to support process tool modules in a cleanspace fabricator |
| US7467024B2 (en) * | 2005-08-26 | 2008-12-16 | Flitsch Frederick A | Method and apparatus for an elevator system for a multilevel cleanspace fabricator |
| WO2007035423A2 (en) * | 2005-09-18 | 2007-03-29 | Flitsch Frederick A | Method and apparatus for vertically orienting substrate processing tools in a clean space |
| US20110245964A1 (en) * | 2010-04-06 | 2011-10-06 | Sullivan Robert P | Self Aligning Automated Material Handling System |
-
2013
- 2013-01-04 TW TW102100338A patent/TWI608980B/en active
- 2013-01-09 SG SG11201403183XA patent/SG11201403183XA/en unknown
- 2013-01-09 WO PCT/US2013/020904 patent/WO2013106486A1/en active Application Filing
- 2013-01-09 SG SG10201608779VA patent/SG10201608779VA/en unknown
- 2013-01-09 KR KR1020147019197A patent/KR20140112020A/en not_active Application Discontinuation
- 2013-01-09 CN CN201380005035.8A patent/CN104081497B/en active Active
-
2014
- 2014-06-26 IL IL233403A patent/IL233403A0/en unknown
Also Published As
| Publication number | Publication date |
|---|---|
| CN104081497B (en) | 2017-02-22 |
| TW201339074A (en) | 2013-10-01 |
| TWI608980B (en) | 2017-12-21 |
| CN104081497A (en) | 2014-10-01 |
| SG11201403183XA (en) | 2014-09-26 |
| SG10201608779VA (en) | 2016-12-29 |
| KR20140112020A (en) | 2014-09-22 |
| WO2013106486A1 (en) | 2013-07-18 |
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