SG10201608716QA - Extending lifetime of yttrium oxide as a plasma chamber material - Google Patents

Extending lifetime of yttrium oxide as a plasma chamber material

Info

Publication number
SG10201608716QA
SG10201608716QA SG10201608716QA SG10201608716QA SG10201608716QA SG 10201608716Q A SG10201608716Q A SG 10201608716QA SG 10201608716Q A SG10201608716Q A SG 10201608716QA SG 10201608716Q A SG10201608716Q A SG 10201608716QA SG 10201608716Q A SG10201608716Q A SG 10201608716QA
Authority
SG
Singapore
Prior art keywords
yttrium oxide
plasma chamber
chamber material
extending lifetime
lifetime
Prior art date
Application number
SG10201608716QA
Inventor
Hong Shih
Duane Outka
Shenjian Liu
John Daugherty
Original Assignee
Lam Res Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lam Res Corp filed Critical Lam Res Corp
Publication of SG10201608716QA publication Critical patent/SG10201608716QA/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32458—Vessel
    • H01J37/32467—Material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32458—Vessel
    • H01J37/32477—Vessel characterised by the means for protecting vessels or internal parts, e.g. coatings
    • H01J37/32495—Means for protecting the vessel against plasma
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49718—Repairing
    • Y10T29/49721—Repairing with disassembling
    • Y10T29/4973—Replacing of defective part

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Drying Of Semiconductors (AREA)
  • Coating By Spraying Or Casting (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Plasma Technology (AREA)
SG10201608716QA 2007-01-11 2008-01-03 Extending lifetime of yttrium oxide as a plasma chamber material SG10201608716QA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/652,048 US8097105B2 (en) 2007-01-11 2007-01-11 Extending lifetime of yttrium oxide as a plasma chamber material

Publications (1)

Publication Number Publication Date
SG10201608716QA true SG10201608716QA (en) 2016-12-29

Family

ID=39617144

Family Applications (3)

Application Number Title Priority Date Filing Date
SG2012000683A SG177952A1 (en) 2007-01-11 2008-01-03 Extending lifetime of yttrium oxide as a plasma chamber material
SG10201608716QA SG10201608716QA (en) 2007-01-11 2008-01-03 Extending lifetime of yttrium oxide as a plasma chamber material
SG10201405496YA SG10201405496YA (en) 2007-01-11 2008-01-03 Extending lifetime of yttrium oxide as a plasma chamber material

Family Applications Before (1)

Application Number Title Priority Date Filing Date
SG2012000683A SG177952A1 (en) 2007-01-11 2008-01-03 Extending lifetime of yttrium oxide as a plasma chamber material

Family Applications After (1)

Application Number Title Priority Date Filing Date
SG10201405496YA SG10201405496YA (en) 2007-01-11 2008-01-03 Extending lifetime of yttrium oxide as a plasma chamber material

Country Status (7)

Country Link
US (2) US8097105B2 (en)
JP (1) JP5363992B2 (en)
KR (3) KR101482504B1 (en)
CN (2) CN102005352B (en)
SG (3) SG177952A1 (en)
TW (2) TWI414634B (en)
WO (1) WO2008088670A1 (en)

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US8585844B2 (en) 2013-11-19
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TWI414634B (en) 2013-11-11
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CN101589455A (en) 2009-11-25
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US20080169588A1 (en) 2008-07-17
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CN101589455B (en) 2012-06-20

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