SG10201605902RA - Monitoring leveler concentrations in electroplating solutions - Google Patents

Monitoring leveler concentrations in electroplating solutions

Info

Publication number
SG10201605902RA
SG10201605902RA SG10201605902RA SG10201605902RA SG10201605902RA SG 10201605902R A SG10201605902R A SG 10201605902RA SG 10201605902R A SG10201605902R A SG 10201605902RA SG 10201605902R A SG10201605902R A SG 10201605902RA SG 10201605902R A SG10201605902R A SG 10201605902RA
Authority
SG
Singapore
Prior art keywords
electroplating solutions
leveler concentrations
monitoring
monitoring leveler
concentrations
Prior art date
Application number
SG10201605902RA
Inventor
Steven T Mayer
Original Assignee
Novellus Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Novellus Systems Inc filed Critical Novellus Systems Inc
Publication of SG10201605902RA publication Critical patent/SG10201605902RA/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D21/00—Processes for servicing or operating cells for electrolytic coating
    • C25D21/12—Process control or regulation
    • C25D21/14—Controlled addition of electrolyte components
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/413—Concentration cells using liquid electrolytes measuring currents or voltages in voltaic cells

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Molecular Biology (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analytical Chemistry (AREA)
  • Automation & Control Theory (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Electroplating And Plating Baths Therefor (AREA)
SG10201605902RA 2011-12-12 2012-12-11 Monitoring leveler concentrations in electroplating solutions SG10201605902RA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US201161569741P 2011-12-12 2011-12-12

Publications (1)

Publication Number Publication Date
SG10201605902RA true SG10201605902RA (en) 2016-09-29

Family

ID=48613119

Family Applications (2)

Application Number Title Priority Date Filing Date
SG10201605902RA SG10201605902RA (en) 2011-12-12 2012-12-11 Monitoring leveler concentrations in electroplating solutions
SG11201403033YA SG11201403033YA (en) 2011-12-12 2012-12-11 Monitoring leveler concentrations in electroplating solutions

Family Applications After (1)

Application Number Title Priority Date Filing Date
SG11201403033YA SG11201403033YA (en) 2011-12-12 2012-12-11 Monitoring leveler concentrations in electroplating solutions

Country Status (6)

Country Link
US (2) US9309605B2 (en)
JP (2) JP6170938B2 (en)
KR (1) KR102147003B1 (en)
MY (1) MY167318A (en)
SG (2) SG10201605902RA (en)
WO (1) WO2013090295A1 (en)

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CN114514340A (en) * 2019-07-26 2022-05-17 朗姆研究公司 Differential contrast plating for advanced packaging applications
KR102445229B1 (en) * 2019-09-30 2022-09-21 한국재료연구원 Measuring cell for concentration of additive breakdown product in plating solution
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Also Published As

Publication number Publication date
SG11201403033YA (en) 2014-09-26
JP2015501941A (en) 2015-01-19
JP6170938B2 (en) 2017-07-26
JP6491700B2 (en) 2019-03-27
US9309605B2 (en) 2016-04-12
WO2013090295A1 (en) 2013-06-20
KR102147003B1 (en) 2020-08-24
MY167318A (en) 2018-08-16
KR20140113947A (en) 2014-09-25
US20160186356A1 (en) 2016-06-30
US20130161203A1 (en) 2013-06-27
US9856574B2 (en) 2018-01-02
JP2018009984A (en) 2018-01-18

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