Classifications

• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
  • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
  • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
  • B65G1/02—Storage devices
  • B65G1/04—Storage devices mechanical
  • B65G1/0457—Storage devices mechanical with suspended load carriers
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B61—RAILWAYS
  • B61B—RAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
  • B61B3/00—Elevated railway systems with suspended vehicles
  • B61B3/02—Elevated railway systems with suspended vehicles with self-propelled vehicles
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B61—RAILWAYS
  • B61B—RAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
  • B61B13/00—Other railway systems
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B61—RAILWAYS
  • B61C—LOCOMOTIVES; MOTOR RAILCARS
  • B61C13/00—Locomotives or motor railcars characterised by their application to special systems or purposes
  • B61C13/04—Locomotives or motor railcars characterised by their application to special systems or purposes for elevated railways with rigid rails
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
  • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
  • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
  • H01L21/67733—Overhead conveying

Landscapes

• Engineering & Computer Science (AREA)
• Mechanical Engineering (AREA)
• Transportation (AREA)
• Manufacturing & Machinery (AREA)
• Condensed Matter Physics & Semiconductors (AREA)
• General Physics & Mathematics (AREA)
• Physics & Mathematics (AREA)
• Computer Hardware Design (AREA)
• Microelectronics & Electronic Packaging (AREA)
• Power Engineering (AREA)
• Platform Screen Doors And Railroad Systems (AREA)
• Carriers, Traveling Bodies, And Overhead Traveling Cranes (AREA)
• Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
• Railway Tracks (AREA)
• Warehouses Or Storage Devices (AREA)

Applications Claiming Priority (1)

Publications (1)

Family

ID=54209049

Family Applications (1)

Country Status (6)

Families Citing this family (8)

Family Cites Families (9)

• 2014
  • 2014-04-07 JP JP2014078280A patent/JP6225803B2/en active Active
  • 2014-12-26 TW TW103145606A patent/TWI622539B/en active
• 2015
  • 2015-01-29 KR KR1020150014211A patent/KR102309871B1/en active IP Right Grant
  • 2015-01-30 SG SG10201500733UA patent/SG10201500733UA/en unknown
  • 2015-02-16 CN CN201510083352.2A patent/CN104973390B/en active Active
  • 2015-03-10 US US14/643,177 patent/US9630632B2/en active Active

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