SG10201407581TA - Energy savings and global gas emissions monitoring - Google Patents

Energy savings and global gas emissions monitoring

Info

Publication number
SG10201407581TA
SG10201407581TA SG10201407581TA SG10201407581TA SG10201407581TA SG 10201407581T A SG10201407581T A SG 10201407581TA SG 10201407581T A SG10201407581T A SG 10201407581TA SG 10201407581T A SG10201407581T A SG 10201407581TA SG 10201407581T A SG10201407581T A SG 10201407581TA
Authority
SG
Singapore
Prior art keywords
energy savings
fab
sub
recover
gas emissions
Prior art date
Application number
SG10201407581TA
Inventor
Youssef A Loldj
Maxime Cayer
Jay J Jung
Shaun Crawford
Dana Tribula
Daniel O Clark
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of SG10201407581TA publication Critical patent/SG10201407581TA/en

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/04—Programme control other than numerical control, i.e. in sequence controllers or logic controllers
    • G05B19/042—Programme control other than numerical control, i.e. in sequence controllers or logic controllers using digital processors
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/04—Programme control other than numerical control, i.e. in sequence controllers or logic controllers
    • G05B19/045—Programme control other than numerical control, i.e. in sequence controllers or logic controllers using logic state machines, consisting only of a memory or a programmable logic device containing the logic for the controlled machine and in which the state of its outputs is dependent on the state of its inputs or part of its own output states, e.g. binary decision controllers, finite state controllers
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/20—Pc systems
    • G05B2219/23—Pc programming
    • G05B2219/23316—Standby, inactive, sleep or active, operation mode
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/20—Pc systems
    • G05B2219/26—Pc applications
    • G05B2219/2612—Data acquisition interface
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P80/00—Climate change mitigation technologies for sector-wide applications
    • Y02P80/10—Efficient use of energy, e.g. using compressed air or pressurized fluid as energy carrier

Abstract

ENERGY SAVINGS AND GLOBAL GAS EMISSIONS MONITORING Methods and apparatus for enhanced control, monitoring and recording of incoming chemical and power use, and emissions of electronic device manufacturing systems are provided. In some embodiments, integrated sub-fab system systems may monitor the energy usage of the sub-fab equipment. The tool can enter many different depths of energy savings modes such as idle (shallow energy savings where production equipment can recover to normal production with no quality or throughput impact in seconds), sleep (deeper energy savings where production equipment can recover in minutes), or hibernate (where production equipment may require hours to recover not to have impact on quality, or throughput) for the system. In some embodiments, the system may monitor and display all gas emissions in a sub-fab as well as the Semi S23 method reporting of C0 2 equivalent emission. The system may monitor effluent process gases and energy use from the process tool and sub-fab equipment. Figure 3C 20
SG10201407581TA 2009-11-16 2010-11-16 Energy savings and global gas emissions monitoring SG10201407581TA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US26172509P 2009-11-16 2009-11-16
US12/945,869 US9075408B2 (en) 2009-11-16 2010-11-14 Energy savings and global gas emissions monitoring and display

Publications (1)

Publication Number Publication Date
SG10201407581TA true SG10201407581TA (en) 2015-01-29

Family

ID=43992470

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10201407581TA SG10201407581TA (en) 2009-11-16 2010-11-16 Energy savings and global gas emissions monitoring

Country Status (6)

Country Link
US (1) US9075408B2 (en)
KR (2) KR20120116415A (en)
CN (1) CN102667643B (en)
SG (1) SG10201407581TA (en)
TW (1) TWI506387B (en)
WO (1) WO2011060418A2 (en)

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Also Published As

Publication number Publication date
US20110144791A1 (en) 2011-06-16
CN102667643B (en) 2016-01-13
CN102667643A (en) 2012-09-12
TWI506387B (en) 2015-11-01
US9075408B2 (en) 2015-07-07
WO2011060418A2 (en) 2011-05-19
TW201142557A (en) 2011-12-01
KR20120116415A (en) 2012-10-22
WO2011060418A3 (en) 2011-08-18
KR102197532B1 (en) 2020-12-31
KR20170143000A (en) 2017-12-28

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