SG10201403129WA - Inactive Gas Introducing Facility and Inactive Gas Introducing Method - Google Patents
Inactive Gas Introducing Facility and Inactive Gas Introducing MethodInfo
- Publication number
- SG10201403129WA SG10201403129WA SG10201403129WA SG10201403129WA SG10201403129WA SG 10201403129W A SG10201403129W A SG 10201403129WA SG 10201403129W A SG10201403129W A SG 10201403129WA SG 10201403129W A SG10201403129W A SG 10201403129WA SG 10201403129W A SG10201403129W A SG 10201403129WA
- Authority
- SG
- Singapore
- Prior art keywords
- inactive gas
- gas introducing
- stop
- facility
- nullifying
- Prior art date
Links
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C13/00—Details of vessels or of the filling or discharging of vessels
- F17C13/02—Special adaptations of indicating, measuring, or monitoring equipment
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2221/00—Handled fluid, in particular type of fluid
- F17C2221/01—Pure fluids
- F17C2221/014—Nitrogen
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
- F17C2227/04—Methods for emptying or filling
- F17C2227/044—Methods for emptying or filling by purging
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
- F17C2250/03—Control means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
- F17C2250/03—Control means
- F17C2250/032—Control means using computers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
- F17C2250/07—Actions triggered by measured parameters
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2260/00—Purposes of gas storage and gas handling
- F17C2260/04—Reducing risks and environmental impact
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2270/00—Applications
- F17C2270/05—Applications for industrial use
- F17C2270/0518—Semiconductors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2270/00—Applications
- F17C2270/05—Applications for industrial use
- F17C2270/059—Mass bottling, e.g. merry belts
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Warehouses Or Storage Devices (AREA)
Abstract
45 TITLE OF THE INVENTION: Inactive Gas Introducing Facility and 5 An inactive gas introducing facility for a storage rack is provided in which supply of inactive gas to a container is stopped if an open state of an inspection door is detected while in a normal stop state in which a stop nullifying command is not issued and in which the supply of the inactive gas 10 based on the immediately preceding supply pattern is continued and any changes, through manual operation, to a parameter that defines the immediately preceding supply pattern are prohibited, if an open state of an inspection door is detected while in a stop nullifying state in which the stop nullifying command is issued. 15 Fig. 4 20
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013123858A JP5776947B2 (en) | 2013-06-12 | 2013-06-12 | Inert gas injector for storage shelves |
Publications (1)
Publication Number | Publication Date |
---|---|
SG10201403129WA true SG10201403129WA (en) | 2015-01-29 |
Family
ID=52018185
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG10201403129WA SG10201403129WA (en) | 2013-06-12 | 2014-06-11 | Inactive Gas Introducing Facility and Inactive Gas Introducing Method |
Country Status (6)
Country | Link |
---|---|
US (2) | US9453610B2 (en) |
JP (1) | JP5776947B2 (en) |
KR (1) | KR102155616B1 (en) |
CN (1) | CN104241166B (en) |
SG (1) | SG10201403129WA (en) |
TW (1) | TWI628690B (en) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5527624B2 (en) * | 2012-01-05 | 2014-06-18 | 株式会社ダイフク | Inert gas injector for storage shelves |
JP5776947B2 (en) * | 2013-06-12 | 2015-09-09 | 株式会社ダイフク | Inert gas injector for storage shelves |
WO2015045582A1 (en) * | 2013-09-26 | 2015-04-02 | 村田機械株式会社 | Purging device and purging method |
US9550219B2 (en) * | 2014-12-29 | 2017-01-24 | Daifuku Co., Ltd. | Apparatus of inhalation type for stocking wafer at ceiling and inhaling type wafer stocking system having the same |
JP6561700B2 (en) * | 2015-09-04 | 2019-08-21 | シンフォニアテクノロジー株式会社 | Gas injection equipment |
JP6610475B2 (en) | 2016-09-09 | 2019-11-27 | 株式会社ダイフク | Container storage equipment |
JP6903883B2 (en) * | 2016-09-09 | 2021-07-14 | Tdk株式会社 | Container cleaning device |
JP6720905B2 (en) * | 2017-03-22 | 2020-07-08 | 株式会社ダイフク | Worship facility |
CN110475730B (en) * | 2017-04-06 | 2022-03-15 | 美商美国大福公司 | Storage system including vertical transfer device |
CN110289231B (en) * | 2019-06-26 | 2020-06-12 | 英特尔半导体(大连)有限公司 | Gas pipeline control device for semiconductor manufacturing equipment |
CN111955944A (en) * | 2020-08-27 | 2020-11-20 | 代永金 | Air conditioning system of traditional Chinese medicine cabinet |
JP7501497B2 (en) | 2021-11-10 | 2024-06-18 | 株式会社ダイフク | Container storage facilities |
JP7501498B2 (en) | 2021-11-10 | 2024-06-18 | 株式会社ダイフク | Container storage facilities |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3242417B2 (en) * | 1991-04-03 | 2001-12-25 | 東京エレクトロン株式会社 | Chamber interlock mechanism |
KR100211646B1 (en) * | 1996-02-14 | 1999-08-02 | 윤종용 | Gas change checking system of manufacturing semiconductor device |
JPH10125760A (en) * | 1996-10-18 | 1998-05-15 | Fujitsu Ltd | Automatic substrate feeding/recovering apparatus and semiconductor manufacturing apparatus |
JP4049281B2 (en) * | 1997-10-28 | 2008-02-20 | 株式会社日立国際電気 | Substrate processing equipment |
JP3866840B2 (en) * | 1997-10-28 | 2007-01-10 | 三機工業株式会社 | Inert gas supply equipment |
WO2000014782A1 (en) * | 1998-09-03 | 2000-03-16 | Nippon Sanso Corporation | Feed device for large amount of semiconductor process gas |
JP4372901B2 (en) * | 1999-08-06 | 2009-11-25 | 大日本印刷株式会社 | Case opener |
JP3913420B2 (en) * | 1999-10-26 | 2007-05-09 | 東京エレクトロン株式会社 | Substrate processing apparatus and maintenance method thereof |
JP4413376B2 (en) | 2000-05-29 | 2010-02-10 | 全協化成工業株式会社 | Wafer storage device |
JP3939101B2 (en) * | 2000-12-04 | 2007-07-04 | 株式会社荏原製作所 | Substrate transport method and substrate transport container |
JP4218821B2 (en) * | 2002-06-11 | 2009-02-04 | 株式会社日立国際電気 | Substrate processing equipment |
JP3994345B2 (en) * | 2003-07-02 | 2007-10-17 | 株式会社ダイフク | Goods storage facility |
US8868229B2 (en) * | 2006-08-19 | 2014-10-21 | Dynamic Micro System Semiconductor Equipment GmbH | Buffer station for stocker system |
KR100848782B1 (en) * | 2007-08-21 | 2008-07-28 | 주식회사 동부하이텍 | N2 gas controlling system for photoresist changing process |
JP2009190103A (en) * | 2008-02-13 | 2009-08-27 | Hitachi High-Tech Control Systems Corp | Semiconductor conveyor |
JP5470002B2 (en) * | 2008-12-10 | 2014-04-16 | 株式会社日立国際電気 | Substrate processing apparatus and display method in substrate processing apparatus |
JP5236518B2 (en) * | 2009-02-03 | 2013-07-17 | 株式会社ダン・タクマ | Storage system and storage method |
IT1404058B1 (en) * | 2011-02-11 | 2013-11-08 | Piombino | SUPPORTING DEVICE FOR THE BABY'S COMFORT |
JP5527624B2 (en) * | 2012-01-05 | 2014-06-18 | 株式会社ダイフク | Inert gas injector for storage shelves |
US9321977B2 (en) * | 2012-01-24 | 2016-04-26 | Sunoco Partners Marketing & Terminals L.P. | Methods for making and distributing batches of butane-enriched gasoline |
JP5776947B2 (en) * | 2013-06-12 | 2015-09-09 | 株式会社ダイフク | Inert gas injector for storage shelves |
-
2013
- 2013-06-12 JP JP2013123858A patent/JP5776947B2/en active Active
-
2014
- 2014-05-27 TW TW103118409A patent/TWI628690B/en active
- 2014-06-10 KR KR1020140070026A patent/KR102155616B1/en active IP Right Grant
- 2014-06-10 US US14/300,637 patent/US9453610B2/en active Active
- 2014-06-11 CN CN201410256255.4A patent/CN104241166B/en active Active
- 2014-06-11 SG SG10201403129WA patent/SG10201403129WA/en unknown
-
2016
- 2016-08-11 US US15/234,793 patent/US10247361B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
CN104241166A (en) | 2014-12-24 |
JP2014241377A (en) | 2014-12-25 |
TWI628690B (en) | 2018-07-01 |
US20160348843A1 (en) | 2016-12-01 |
US10247361B2 (en) | 2019-04-02 |
CN104241166B (en) | 2018-09-07 |
US9453610B2 (en) | 2016-09-27 |
KR20140145076A (en) | 2014-12-22 |
US20140366983A1 (en) | 2014-12-18 |
KR102155616B1 (en) | 2020-09-14 |
TW201511081A (en) | 2015-03-16 |
JP5776947B2 (en) | 2015-09-09 |
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