SG10201403129WA - Inactive Gas Introducing Facility and Inactive Gas Introducing Method - Google Patents

Inactive Gas Introducing Facility and Inactive Gas Introducing Method

Info

Publication number
SG10201403129WA
SG10201403129WA SG10201403129WA SG10201403129WA SG10201403129WA SG 10201403129W A SG10201403129W A SG 10201403129WA SG 10201403129W A SG10201403129W A SG 10201403129WA SG 10201403129W A SG10201403129W A SG 10201403129WA SG 10201403129W A SG10201403129W A SG 10201403129WA
Authority
SG
Singapore
Prior art keywords
inactive gas
gas introducing
stop
facility
nullifying
Prior art date
Application number
SG10201403129WA
Inventor
Takahara Masahiro
Ueda Toshihito
Original Assignee
Daifuku Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daifuku Kk filed Critical Daifuku Kk
Publication of SG10201403129WA publication Critical patent/SG10201403129WA/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/02—Special adaptations of indicating, measuring, or monitoring equipment
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2221/00—Handled fluid, in particular type of fluid
    • F17C2221/01—Pure fluids
    • F17C2221/014—Nitrogen
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
    • F17C2227/04—Methods for emptying or filling
    • F17C2227/044—Methods for emptying or filling by purging
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/03—Control means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/03—Control means
    • F17C2250/032—Control means using computers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/07—Actions triggered by measured parameters
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2260/00—Purposes of gas storage and gas handling
    • F17C2260/04—Reducing risks and environmental impact
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2270/00—Applications
    • F17C2270/05—Applications for industrial use
    • F17C2270/0518—Semiconductors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2270/00—Applications
    • F17C2270/05—Applications for industrial use
    • F17C2270/059—Mass bottling, e.g. merry belts

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Warehouses Or Storage Devices (AREA)

Abstract

45 TITLE OF THE INVENTION: Inactive Gas Introducing Facility and 5 An inactive gas introducing facility for a storage rack is provided in which supply of inactive gas to a container is stopped if an open state of an inspection door is detected while in a normal stop state in which a stop nullifying command is not issued and in which the supply of the inactive gas 10 based on the immediately preceding supply pattern is continued and any changes, through manual operation, to a parameter that defines the immediately preceding supply pattern are prohibited, if an open state of an inspection door is detected while in a stop nullifying state in which the stop nullifying command is issued. 15 Fig. 4 20
SG10201403129WA 2013-06-12 2014-06-11 Inactive Gas Introducing Facility and Inactive Gas Introducing Method SG10201403129WA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013123858A JP5776947B2 (en) 2013-06-12 2013-06-12 Inert gas injector for storage shelves

Publications (1)

Publication Number Publication Date
SG10201403129WA true SG10201403129WA (en) 2015-01-29

Family

ID=52018185

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10201403129WA SG10201403129WA (en) 2013-06-12 2014-06-11 Inactive Gas Introducing Facility and Inactive Gas Introducing Method

Country Status (6)

Country Link
US (2) US9453610B2 (en)
JP (1) JP5776947B2 (en)
KR (1) KR102155616B1 (en)
CN (1) CN104241166B (en)
SG (1) SG10201403129WA (en)
TW (1) TWI628690B (en)

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JP5527624B2 (en) * 2012-01-05 2014-06-18 株式会社ダイフク Inert gas injector for storage shelves
JP5776947B2 (en) * 2013-06-12 2015-09-09 株式会社ダイフク Inert gas injector for storage shelves
JP6032372B2 (en) * 2013-09-26 2016-11-30 村田機械株式会社 Purge apparatus and purge method
US9550219B2 (en) * 2014-12-29 2017-01-24 Daifuku Co., Ltd. Apparatus of inhalation type for stocking wafer at ceiling and inhaling type wafer stocking system having the same
JP6561700B2 (en) * 2015-09-04 2019-08-21 シンフォニアテクノロジー株式会社 Gas injection equipment
JP6903883B2 (en) * 2016-09-09 2021-07-14 Tdk株式会社 Container cleaning device
JP6610475B2 (en) 2016-09-09 2019-11-27 株式会社ダイフク Container storage equipment
JP6720905B2 (en) * 2017-03-22 2020-07-08 株式会社ダイフク Worship facility
US11235926B2 (en) 2017-04-06 2022-02-01 Daifuku America Corporation Storage system including a vertical transfer device
CN110289231B (en) * 2019-06-26 2020-06-12 英特尔半导体(大连)有限公司 Gas pipeline control device for semiconductor manufacturing equipment
CN111955944A (en) * 2020-08-27 2020-11-20 代永金 Air conditioning system of traditional Chinese medicine cabinet
JP7501497B2 (en) 2021-11-10 2024-06-18 株式会社ダイフク Container storage facilities
JP7501498B2 (en) 2021-11-10 2024-06-18 株式会社ダイフク Container storage facilities

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JP3242417B2 (en) * 1991-04-03 2001-12-25 東京エレクトロン株式会社 Chamber interlock mechanism
KR100211646B1 (en) * 1996-02-14 1999-08-02 윤종용 Gas change checking system of manufacturing semiconductor device
JPH10125760A (en) * 1996-10-18 1998-05-15 Fujitsu Ltd Automatic substrate feeding/recovering apparatus and semiconductor manufacturing apparatus
JP4049281B2 (en) * 1997-10-28 2008-02-20 株式会社日立国際電気 Substrate processing equipment
JP3866840B2 (en) * 1997-10-28 2007-01-10 三機工業株式会社 Inert gas supply equipment
EP1037269A4 (en) * 1998-09-03 2007-05-02 Taiyo Nippon Sanso Corp Feed device for large amount of semiconductor process gas
JP4372901B2 (en) 1999-08-06 2009-11-25 大日本印刷株式会社 Case opener
JP3913420B2 (en) * 1999-10-26 2007-05-09 東京エレクトロン株式会社 Substrate processing apparatus and maintenance method thereof
JP4413376B2 (en) 2000-05-29 2010-02-10 全協化成工業株式会社 Wafer storage device
JP3939101B2 (en) * 2000-12-04 2007-07-04 株式会社荏原製作所 Substrate transport method and substrate transport container
JP4218821B2 (en) * 2002-06-11 2009-02-04 株式会社日立国際電気 Substrate processing equipment
JP3994345B2 (en) * 2003-07-02 2007-10-17 株式会社ダイフク Goods storage facility
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JP5527624B2 (en) * 2012-01-05 2014-06-18 株式会社ダイフク Inert gas injector for storage shelves
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JP5776947B2 (en) * 2013-06-12 2015-09-09 株式会社ダイフク Inert gas injector for storage shelves

Also Published As

Publication number Publication date
CN104241166A (en) 2014-12-24
TWI628690B (en) 2018-07-01
US10247361B2 (en) 2019-04-02
KR20140145076A (en) 2014-12-22
JP2014241377A (en) 2014-12-25
TW201511081A (en) 2015-03-16
JP5776947B2 (en) 2015-09-09
KR102155616B1 (en) 2020-09-14
US20140366983A1 (en) 2014-12-18
US20160348843A1 (en) 2016-12-01
CN104241166B (en) 2018-09-07
US9453610B2 (en) 2016-09-27

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