SG10201400111TA - Sensor with vacuum-sealed cavity - Google Patents

Sensor with vacuum-sealed cavity

Info

Publication number
SG10201400111TA
SG10201400111TA SG10201400111TA SG10201400111TA SG10201400111TA SG 10201400111T A SG10201400111T A SG 10201400111TA SG 10201400111T A SG10201400111T A SG 10201400111TA SG 10201400111T A SG10201400111T A SG 10201400111TA SG 10201400111T A SG10201400111T A SG 10201400111TA
Authority
SG
Singapore
Prior art keywords
vacuum
sensor
sealed cavity
sealed
cavity
Prior art date
Application number
SG10201400111TA
Inventor
Jinghui Xu
Ming-Lin Julius Tsai
Winston Sun
Chengliang Sun
Original Assignee
Pgs Geophysical As
Agency Science Tech & Res
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pgs Geophysical As, Agency Science Tech & Res filed Critical Pgs Geophysical As
Publication of SG10201400111TA publication Critical patent/SG10201400111TA/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
    • B81C1/00182—Arrangements of deformable or non-deformable structures, e.g. membrane and cavity for use in a transducer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
    • G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
    • G01H11/08—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means using piezoelectric devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
    • G01V1/00—Seismology; Seismic or acoustic prospecting or detecting
    • G01V1/16—Receiving elements for seismic signals; Arrangements or adaptations of receiving elements
    • G01V1/18—Receiving elements, e.g. seismometer, geophone or torque detectors, for localised single point measurements
    • G01V1/186—Hydrophones
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
    • G01V1/00—Seismology; Seismic or acoustic prospecting or detecting
    • G01V1/38—Seismology; Seismic or acoustic prospecting or detecting specially adapted for water-covered areas
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers
    • H04R17/005—Piezoelectric transducers; Electrostrictive transducers using a piezoelectric polymer
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0257—Microphones or microspeakers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Remote Sensing (AREA)
  • Acoustics & Sound (AREA)
  • Manufacturing & Machinery (AREA)
  • Geology (AREA)
  • Environmental & Geological Engineering (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geophysics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Signal Processing (AREA)
  • Oceanography (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Computer Hardware Design (AREA)
SG10201400111TA 2013-02-20 2014-02-20 Sensor with vacuum-sealed cavity SG10201400111TA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US13/772,183 US9321630B2 (en) 2013-02-20 2013-02-20 Sensor with vacuum-sealed cavity

Publications (1)

Publication Number Publication Date
SG10201400111TA true SG10201400111TA (en) 2014-09-26

Family

ID=50440341

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10201400111TA SG10201400111TA (en) 2013-02-20 2014-02-20 Sensor with vacuum-sealed cavity

Country Status (5)

Country Link
US (1) US9321630B2 (en)
CA (1) CA2842769C (en)
FR (2) FR3002405B1 (en)
GB (2) GB2512724B (en)
SG (1) SG10201400111TA (en)

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* Cited by examiner, † Cited by third party
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BR112016015113B1 (en) * 2013-12-30 2022-09-27 Pgs Geophysical As CONTROL SYSTEM AND METHOD FOR MARINE VIBRATORS
US20180321402A1 (en) 2017-05-03 2018-11-08 Pgs Geophysical As Geophysical sensor cables
CN107271029A (en) * 2017-06-06 2017-10-20 纽威仕微电子（无锡）有限公司 A kind of hydrophone integration module and its manufacturing process
US10870577B2 (en) 2018-10-05 2020-12-22 Knowles Electronics, Llc Methods of forming MEMS diaphragms including corrugations
DE112019004970T5 (en) 2018-10-05 2021-06-24 Knowles Electronics, Llc Microphone device with ingress protection
WO2020072904A1 (en) 2018-10-05 2020-04-09 Knowles Electronics, Llc Acoustic transducers with a low pressure zone and diaphragms having enhanced compliance
CN109855721A (en) * 2019-02-01 2019-06-07 中北大学 Condenser type pressure hydrophone based on MEMS technology and preparation method thereof
CN111811638A (en) * 2019-04-12 2020-10-23 广州辰方互联信息科技有限公司 Piezoelectric type induction unit and hydrophone applying same
CN110311032B (en) * 2019-06-28 2021-01-05 东华大学 Flexible acoustic sensor with high sound-electricity conversion efficiency
CN110350078B (en) * 2019-06-28 2021-01-05 东华大学 Flexible acoustic sensor with high-efficiency acoustoelectric conversion characteristic
US11528546B2 (en) 2021-04-05 2022-12-13 Knowles Electronics, Llc Sealed vacuum MEMS die
US11540048B2 (en) 2021-04-16 2022-12-27 Knowles Electronics, Llc Reduced noise MEMS device with force feedback
US11649161B2 (en) 2021-07-26 2023-05-16 Knowles Electronics, Llc Diaphragm assembly with non-uniform pillar distribution
US11772961B2 (en) 2021-08-26 2023-10-03 Knowles Electronics, Llc MEMS device with perimeter barometric relief pierce
US11780726B2 (en) 2021-11-03 2023-10-10 Knowles Electronics, Llc Dual-diaphragm assembly having center constraint
CN115507938B (en) * 2022-11-16 2023-03-07 青岛国数信息科技有限公司 Piezoelectric MEMS hydrophone with pressure-resistant structure

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US4216401A (en) * 1978-12-22 1980-08-05 United Technologies Corporation Surface acoustic wave (SAW) pressure sensor structure
CH639762A5 (en) * 1980-11-12 1983-11-30 Centre Electron Horloger PRESSURE TRANSDUCER WITH VIBRATING ELEMENT.
DE4226485C1 (en) 1992-08-11 1993-12-23 Prakla Seismos Gmbh Hydrophone, process for its manufacture and use
US5459351A (en) * 1994-06-29 1995-10-17 Honeywell Inc. Apparatus for mounting an absolute pressure sensor
US5982708A (en) 1995-12-15 1999-11-09 Innovative Transducers, Inc. Acoustic sensor and array thereof
US5774417A (en) 1996-10-25 1998-06-30 Atlantic Richfield Company Amplitude and phase compensation in dual-sensor ocean bottom cable seismic data processing
US6314056B1 (en) 1998-01-23 2001-11-06 Petroleum Geo-Services Fiber optic sensor system and method
US6109113A (en) 1998-06-11 2000-08-29 Delco Electronics Corp. Silicon micromachined capacitive pressure sensor and method of manufacture
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DE602005027072D1 (en) 2005-09-16 2011-05-05 St Microelectronics Srl Pressure transducer with surface acoustic waves
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US20090058422A1 (en) 2007-09-04 2009-03-05 Stig Rune Tenghamn Fiber optic system for electromagnetic surveying
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US7974152B2 (en) 2009-06-23 2011-07-05 Pgs Geophysical As Control system for marine vibrators and seismic acquisition system using such control system
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Also Published As

Publication number Publication date
FR3066833A1 (en) 2018-11-30
GB201402846D0 (en) 2014-04-02
GB2576116A (en) 2020-02-05
GB2512724A (en) 2014-10-08
CA2842769C (en) 2019-07-16
US20140230557A1 (en) 2014-08-21
FR3002405B1 (en) 2018-06-29
US9321630B2 (en) 2016-04-26
GB201912680D0 (en) 2019-10-16
GB2576116B (en) 2020-08-12
FR3002405A1 (en) 2014-08-22
CA2842769A1 (en) 2014-08-20
GB2512724B (en) 2020-05-06

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